当期目录

2022, 15(3): 405-417. doi: 10.37188/CO.2021-0198

2022, 15(3): 418-425. doi: 10.37188/CO.2021-0203

2022, 15(3): 426-432. doi: 10.37188/CO.2021-0200

2022, 15(3): 433-442. doi: 10.37188/CO.2021-0216

2022, 15(3): 443-453. doi: 10.37188/CO.2021-0223

2022, 15(3): 454-463. doi: 10.37188/CO.2021-0208

2022, 15(3): 464-475. doi: 10.37188/CO.2021-0194

2022, 15(3): 476-487. doi: 10.37188/CO.2022-0032

2022, 15(3): 488-497. doi: 10.37188/CO.2021-0220

2022, 15(3): 498-507. doi: 10.37188/CO.2021-0231

2022, 15(3): 508-513. doi: 10.37188/CO.2021-0179

2022, 15(3): 514-524. doi: 10.37188/CO.2021-0181

2022, 15(3): 525-533. doi: 10.37188/CO.2021-0202

2022, 15(3): 534-544. doi: 10.37188/CO.2021-0187

2022, 15(3): 545-551. doi: 10.37188/CO.2021-0182

2022, 15(3): 552-561. doi: 10.37188/CO.2021-0213

2022, 15(3): 562-567. doi: 10.37188/CO.2022-0090

2022, 15(3): 568-591. doi: 10.37188/CO.2021-0188

In order to achieve high spectral responsivity of the silicon avalanche photodiode in blue band (400−500 nm), Separated Absorption Control Multiplication (SACM) basic device structure was designed. Based on multiple physical models, the effect of the thickness on the avalanche breakdown voltage and the photocurrent gain of the device and the effect of the doping concentration of the multiplication layer on the optical responsivity were investigated. Comprehensively considering the factors of light responsivity and breakdown voltage, the results show that the device has a low breakdown voltage Vbr-apd=34.2 V when the doping concentration of the surface non-depleted layer is 1.0×1018 cm−3, and the thickness is 0.03 μm; the doping concentration of absorption layer is 1.0×1015 cm−3, the thickness is 1.3 μm, the doping concentration of field control layer is 8.0×1016 cm−3, the thickness is 0.2 μm and the doping concentration of double layer is 1.8×1016 cm−3 and the thickness is 0.5 μm. When Vapd=0.95Vbr-apd, it has higher optical responsivity in blue band, i.e. SR is 3.72~6.08 A·W−1. The above research results provide certain theoretical reference for the preparation of practical Si-APD devices with high blue light detection responsivity.
2022, 15(3): 592-607. doi: 10.37188/CO.2021-0109

In order to improve the detection efficiency of Micro Array Electrodes (MAE) and reduce the production cost, a technology combining Digital Micromirror Device (DMD) maskless projection lithography with electrochemical deposition was proposed. Firstly, a user-defined micro array was fabricated by using the advantages of lithography system such as high-resolution PZS motion and imaging flexibility of DMD. And a uniform Au microarray electrode (Au/MAE) was fabricated after obtaining an Au conducting layer by electrodeposition. Then, the electrochemical properties of Au/MAE with different structures were compared by cyclic voltammetry, and the optimized structural parameters were obtained. Finally, the current response of optimized Au/MAE to the glucose with different concentrations and pH values was studied, and the anti-interference of Au/MAE in glucose detection was tested by chronoamperometry. The electrochemical analysis shows that the simple Au/MAE has a significant amperometric response, a strong anti-interference ability and a sensitivity of 101 μA·cm−2·mM−1 in the electrochemical detection of glucose. This method has the advantages of high resolution, high consistency, simple process and low cost, which provides a feasible operation scheme for the fabrication of biosensor array.