| Citation: | XIN Ya-wu, PENG Yong-chao, ZHANG Yu-xiang, CAO Xing-yu, HAN Yang, GUO Hong-ling, XIONG Shi-fu, HU Zhang-gui. Development of visible/near-infrared multiband laser filter film[J]. Chinese Optics. doi: 10.37188/CO.EN-2025-0031
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Filters, as a key component in the photoelectric detection system, can simplify the optical system and improve detection efficiency. Based on the usage requirements, a visible/near-infrared filter film with up to 5 wavebands needs to be designed and prepared, while simultaneously satisfying high reflection in 2 wavebands and high transmittance in 3 wavebands. Therefore, we have conducted a systematic study on the film design, thin film preparation process, and control accuracy of film layer thickness. In this work, the short-wave pass film system is superimposed with the long-wave pass film system, and the number of cycles and matching coefficient of the film system are tuned to meet the requirements of cut-off band. Additionally, Smith method was used to match bandpass film system to optimize the transmission band and complete the visible/near infrared multiband laser filter film design. In the preparation process, combined with the sensitivity of the film layer, inverse analysis is used to invert the film layer monitored by each optical monitoring chip. The optical control scheme with weak optical signal in the monitoring process is simulated and corrected, and the monitoring wavelength with stronger optical signal is matched, resulting in an improvement of the control accuracy for the film thickness and the transmittance in the specified wavelength range. Ultimately, the actual physical thickness is 9.66 μm, and the error with the theoretical design thickness is less than 0.4%, and the transmittance of the specified 3 wavebands exceeds 99%. The average transmittance of the cut-off bands at the 455−500 nm and 910−
| [1] |
ZHANG D H, DONG Z M, ZHANG CH, et al. Investigation on parallel auxiliary adjusting machine of spatial filter lens for a high-power laser facility[J]. Optics & Laser Technology, 2022, 147: 107597.
|
| [2] |
ZHANG J L, GAO G J, WANG B L, et al. Background noise resistant underwater wireless optical communication using faraday atomic line laser and filter[J]. Journal of Lightwave Technology, 2022, 40(1): 63-73. doi: 10.1109/JLT.2021.3118447
|
| [3] |
CHEN X CH, LIANG P X, WU Q, et al. Fluorescence enhanced optical resonator constituted of quantum dots and thin film resonant cavity for high-efficiency reflective color filter[J]. Nanomaterials, 2021, 11(11): 2813. doi: 10.3390/nano11112813
|
| [4] |
ZHU H, XIN Y W, CHEN Y R, et al. Development of resonant cavity film for 575 nm all-solid-state laser system[J]. Coatings, 2023, 13(7): 1278. doi: 10.3390/coatings13071278
|
| [5] |
SHAKTHI MURUGAN K H, SUMATHI M. Design and analysis of 5G optical communication system for various filtering operations using wireless optical transmission[J]. Results in Physics, 2019, 12: 460-468. doi: 10.1016/j.rinp.2018.10.064
|
| [6] |
GE P F, LING X T, WANG J H, et al. Optical filter bank modeling and design for multi-color visible light communications[J]. IEEE Photonics Journal, 2021, 13(1): 7901219.
|
| [7] |
NIKOLAIDOU K, CONDELIPES P G M, CANEIRA C F R, et al. Monolithically integrated optical interference and absorption filters on thin film amorphous silicon photosensors for biological detection[J]. Sensors and Actuators B: Chemical, 2022, 356: 131330. doi: 10.1016/j.snb.2021.131330
|
| [8] |
LIU ZH X, TAO L T, ZHANG Y ZH, et al. Narrowband near-infrared photodetector enabled by dual functional internal-filter-induced selective charge collection[J]. Advanced Optical Materials, 2021, 9(15): 2100288. doi: 10.1002/adom.202100288
|
| [9] |
BAN CH, GAO P, REN SH P, et al. Design and manufacturing of filter sets for dual-color synchronous gene sequencing[J]. Coatings, 2023, 13(9): 1555. doi: 10.3390/coatings13091555
|
| [10] |
WANG T T. Fabrication of hard infrared anti-reflection coating with broadband in the wavelength of 0.8~1.7 μm and 3.7~4.8 μm based on oxide material[J]. Chinese Optics, 2014, 7(5): 816-822. (in Chinese).
|
| [11] |
MI G Y, ZHANG J F, HAN J, et al. Research on antireflection coating for TV, laser, mid-infrared wavebands[J]. Laser & Infrared, 2016, 46(5): 593-596. (in Chinese). doi: 10.3969/j.issn.1001-5078.2016.05.016
|
| [12] |
BELLUM J C, FIELD E S, KLETECKA D E, et al. Design and laser damage properties of a dichroic beam combiner coating for 22.5-deg incidence and S polarization with high transmission at 527 nm and high reflection at 1054 nm[J]. Optical Engineering, 2016, 56(1): 011020. doi: 10.1117/1.OE.56.1.011020
|
| [13] |
SHI Y Y, XU J Q, LIU ZH, et al. Design and preparation of large aperture high reflective films composed entirely of dielectric materials for multi-band application[J]. Surface Technology, 2022, 51(4): 335-341. (in Chinese).
|
| [14] |
CHEN X Y, GUAN R Y, ZHANG SH L, et al. Study of multi-band infrared antireflection coatings on zinc selenide substrate[J]. Electro-Optic Technology Application, 2022, 37(6): 18-21,106. (in Chinese). doi: 10.3969/j.issn.1673-1255.2022.06.005
|
| [15] |
KIM D, KIM K M, HAN H, et al. Ti/TiO2/SiO2 multilayer thin films with enhanced spectral selectivity for optical narrow bandpass filters[J]. Scientific Reports, 2022, 12(1): 32. doi: 10.1038/s41598-021-03935-z
|
| [16] |
FAN H H, ZHANG Y G, SHEN W D, et al. Optical properties of Ta2O5 thin films fabricated by atomic layer deposition[J]. Acta Optica Sinica, 2011, 31(10): 1031001. (in Chinese). doi: 10.3788/AOS201131.1031001
|
| [17] |
SHANG P, XIONG SH M, LI L H, et al. Investigation on thermal stability of Ta2O5, TiO2 and Al2O3 coatings for application at high temperature[J]. Applied Surface Science, 2013, 285: 713-720. doi: 10.1016/j.apsusc.2013.08.115
|
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