| Citation: | WANG Xin-tian, SONG Zhang-yu, QIN Mu-yang, YUAN Hao, BU Fan-gao, GONG Wei, LIU Guo-hong, LI Zhen-ze, WANG Lei, YU Yan-Hao, CHEN Qi-dai. Ultrafastlaser processing of glass materials: mechanisms, applications, and prospects[J]. Chinese Optics. doi: 10.37188/CO.2026-0047
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Ultrafast lasers, owing to their high peak power and ultrashort pulse duration, enable highly precise and localized energy deposition inside transparent glass through nonlinear absorption. This process can induce a variety of micro-modifications, including refractive index changes, nanogratings, and microvoids, and is often accompanied by stress-field modulation and elemental migration in the near-focus region. Such a unique processing mechanism provides an important foundation for three-dimensional micro/nanofabrication inside glass materials. Starting from the interaction mechanism between ultrafast lasers and glass, this paper systematically reviews different types of material modification and their corresponding processing windows, and further summarizes recent progress in applications such as on-chip photonic device fabrication, high-precision cutting, optical waveguide writing, stress-based waveplate fabrication, microchannel processing, and burst-mode ultrafast laser machining. Finally, the paper analyzes the current bottlenecks in processing consistency, mechanistic understanding, and industrial implementation, highlights the importance of inverse engineering for process optimization, and discusses the potential of artificial intelligence technique in complex parameter optimization and intelligent laser processing.
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