Research on all-silica fiber-optic fabry-perot high-temperature vibration sensor

To An all-silica fiber-optic Fabry-Perot (F-P) high-temperature vibration sensor is proposed to address sensor failure and signal distortion in extreme environments. A collimated coupling structure based on a silica ball lens enables integrated, non-contact signal transmission between the fiber and the sensitive structure. The sensitive units are batch-fabricated using MEMS and thermal pressure bonding technologies. By combining three-wavelength dynamic demodulation with spectral cross-correlation, precise vibration signal extraction and temperature compensation are achieved, effectively eliminating thermal cross-sensitivity. Experimental results indicate that as the temperature increases from room temperature (23 °C) to 800 °C, the sensitivity of the sensor decreases from 1.051 nm/g to 0.8915 nm/g. After temperature compensation, the maximum residual sum of squares (RSS) of the sensor is 0.168, and the full-scale nonlinearity error does not exceed 1.033%. In dynamic response tests, the characteristic frequency of the sensor is considerably higher than 6000 Hz. The sensor exhibits high flatness within the frequency response range of 100−2000 Hz, and its sensitivity gradually increases between 2000 Hz and 6000 Hz, with a maximum increment of only 0.177 nm/g. Featuring high consistency, adhesive-free integration, and electromagnetic immunity, this sensor provides a robust solution for vibration measurement in high-temperature environments.