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GU Peibing, FU Xiuhua, DONG Suotao, LI Zhi, ZHANG Jiaming, XIE Haifeng, WANG Shiwu. Research on optical path optimization design and signal enhancement technology for direct optical film thickness control systems[J]. Chinese Optics. doi: 10.37188/CO.2025-0153
Citation: GU Peibing, FU Xiuhua, DONG Suotao, LI Zhi, ZHANG Jiaming, XIE Haifeng, WANG Shiwu. Research on optical path optimization design and signal enhancement technology for direct optical film thickness control systems[J]. Chinese Optics. doi: 10.37188/CO.2025-0153

Research on optical path optimization design and signal enhancement technology for direct optical film thickness control systems

cstr: 32171.14.CO.2025-0153
Funds:  Supported by introducing innovative new team projects in Zhongshan City (No. CXTD2023008); Zhongshan Social Public Welfare Science and Technology Research Project (No. 2024B2044)
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  • Corresponding author: goptics@126.com
  • Received Date: 05 Dec 2025
  • Accepted Date: 06 Feb 2026
  • Available Online: 29 Apr 2026
  • With the advancement of photoelectric technology, optical films are extensively employed in military, medical, and communication fields. Film thickness is a critical parameter that determines optical performance, and the accuracy of its monitoring system directly affects spectral characteristics. To mitigate the significant thickness control errors in conventional direct monitoring systems—caused by light source divergence and weak detector response signals—this paper proposes an externalized optical configuration. In this design, both the optical transmitter and receiver are placed outside the vacuum chamber, thereby avoiding interference from chamber vibration, temperature variations, and assembly inconsistencies. Additionally, an optical signal modulation scheme based on fiber coupling and collimation-focusing is introduced. By adopting an external integrated light source combined with multimode optical fibers and a composite optical path, and by optimizing component parameters through optical simulation to improve spot quality and energy density, the stability of both optical and electrical signals is enhanced. After optimization, irradiance at the fiber receiving end increased by 222.7%, signal strength by 156.6%, and the signal-to-noise ratio by 70.38%. The system’s performance was validated by preparing a narrowband filter film with a center wavelength of 2400 nm and a bandwidth of 40 nm, achieving a wavelength deviation within 1 nm over three repeated tests while consistently maintaining the 40 nm bandwidth. These results confirm that the system enables high-precision and stable film thickness monitoring even in spectral bands with weak detector response.

     

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  • [1]
    唐晋发, 顾培夫, 刘旭. 现代光学薄膜技术[M]. 杭州: 浙江大学出版社, 2006.

    TANG J F, GU P F, LIU X. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006. (in Chinese).
    [2]
    庄秋慧, 王三强. 光学膜厚的监控方法[J]. 激光与光电子学进展, 2018, 55(10): 103102. doi: 10.3788/LOP55.103102

    ZHUANG Q H, WANG S Q. Monitoring method of optical film thickness[J]. Laser & Optoelectronics Progress, 2018, 55(10): 103102. (in Chinese). doi: 10.3788/LOP55.103102
    [3]
    常敏, 华博, 张学典, 等. 光电极值法结合外差干涉法监控膜厚的研究[J]. 光学技术, 2017, 43(2): 184-186. doi: 10.13741/j.cnki.11-1879/o4.2017.02.020

    CHANG M, HUA B, ZHANG X D, et al. Study on film monitoring based on the photoelectric extreme value method combined with heterodyne interferometry[J]. Optical Technique, 2017, 43(2): 184-186. (in Chinese). doi: 10.13741/j.cnki.11-1879/o4.2017.02.020
    [4]
    BRUNS S, FARR P, MELZIG T, et al. Improving optical thickness monitoring by including systematic and process-influenced transmittance deviations[J]. Applied Optics, 2023, 62(7): B141-B147. doi: 10.1364/AO.475076
    [5]
    LI N, WANG G H, BAI X S, et al. Effect of quartz crystal thermal stress on its performance in active temperature control quartz crystal microbalance dew point sensors[J]. Sensors and Actuators B: Chemical, 2022, 369: 132283. doi: 10.1016/j.snb.2022.132283
    [6]
    DONG S T, FU X H, LI CH. Noble infrared optical thickness monitoring system based on the algorithm of phase-locked output current–reflectivity coefficient[J]. Coatings, 2022, 12(6): 782. doi: 10.3390/coatings12060782
    [7]
    MELZIG T, AMOCHKINA T, BRUNS S, et al. Influence of fitting algorithms on thickness determination during monitoring of optical coatings[J]. Surface and Coatings Technology, 2024, 476: 130197. doi: 10.1016/j.surfcoat.2023.130197
    [8]
    杜昕, 付秀华, 董所涛, 等. 变量耦合动态监控光学膜厚补偿技术[J]. 中国光学(中英文), 2025, 18(3): 467-476.

    DU X, FU X H, DONG S T, et al. Variable coupling dynamic monitoring and compensation technology of optical film thickness[J]. Chinese Optics, 2025, 18(3): 467-476. (in Chinese).
    [9]
    MELZIG T, AMOCHKINA T, BRUNS S, et al. Influence of fitting algorithms on thickness determination during monitoring of optical coatings[J]. Surface and Coatings Technology, 2024, 476: 130197. (查阅网上资料, 本条文献与第7条文献重复, 请确认).
    [10]
    谢海峰, 付秀华, 董所涛, 等. 膜厚监控系统准直聚焦耦合光路的研制[J]. 光学 精密工程, 2025, 33(1): 25-36.

    XIE H F, FU X H, DONG S T, et al. Development of collimated focus coupled optical path for film thickness monitoring system[J]. Optics and Precision Engineering, 2025, 33(1): 25-36. (in Chinese).
    [11]
    BRUNS S, FARR P, MELZIG T, et al. Improving optical thickness monitoring by including systematic and process-influenced transmittance deviations[J]. Applied Optics, 2023, 62(7): B141-B147. (查阅网上资料, 本条文献与第4条文献重复, 请确认).
    [12]
    TIKHONRAVOV A, KOCHIKOV I, SHARAPOVA S, et al. Optical monitoring of coating production: correlation of errors and errors self-compensation[J]. Proceedings of SPIE, 2021, 11872: 118720Q.
    [13]
    杨琪, 曾敏, 周文祺, 等. 基于直流磁控溅射VO2薄膜的高效近红外光电探测器[J]. 发光学报, 2025, 46(11): 2119-2128. doi: 10.37188/CJL.20250148

    YANG Q, ZENG M, ZHOU W Q, et al. DC magnetron-sputtered VO2 thin films: towards high-performance near-infrared photodetectors[J]. Chinese Journal of Luminescence, 2025, 46(11): 2119-2128. (in Chinese). doi: 10.37188/CJL.20250148
    [14]
    张丹丹, 黄芷婷, 李君, 等. 半导体激光器与光纤耦合效率仿真分析[J/OL]. 应用光学, 2025: 1-15 (2025-09-01)[2025-11-24]. https://link.cnki.net/urlid/61.1171.O4.20250901.1415.002.

    ZHANG D D, HUANG ZH T, LI J, et al. Optimization of coupling efficiency between semiconductor laser and fiber based on intelligent algorithm[J/OL]. Journal of Applied Optics, 2025: 1-15 (2025-09-01)[2025-11-24]. https://link.cnki.net/urlid/61.1171.O4.20250901.1415.002. (in Chinese).
    [15]
    王锦荣, 叶建春, 侯丽英, 等. 基于Zemax非球面单透镜的优化设计[J]. 空间电子技术, 2024, 21(5): 87-92. doi: 10.3969/j.issn.1674-7135.2024.05.013

    WANG J R, YE J CH, HOU L Y, et al. The optimum design of aspherical single lens based on Zemax[J]. Space Electronic Technology, 2024, 21(5): 87-92. (in Chinese). doi: 10.3969/j.issn.1674-7135.2024.05.013
    [16]
    周双, 刘子建. 光学系统装配误差分析及装调路径优选[J]. 机械设计与制造, 2022, 371(1): 159-163,167. doi: 10.3969/j.issn.1001-3997.2022.01.036

    ZHOU SH, LIU Z J. The assembly error analysis of optical system and path optimization of alignment[J]. Machinery Design & Manufacture, 2022, 371(1): 159-163,167. (in Chinese). doi: 10.3969/j.issn.1001-3997.2022.01.036
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