基于MIM波导耦合双D型腔结构的模式杂化及多重Fano共振折射率传感器

常旭艳; 邱炎儿; 郝启明; 张彦军; 赵冬青; 张志东

doi:10.3724/CO.EN-2026-0018

基于MIM波导耦合双D型腔结构的模式杂化及多重Fano共振折射率传感器

1.
中北大学仪器科学与动态测试教育部重点实验室, 山西太原 030051
2.
吕梁学院物理与电子信息工程系, 山西吕梁 033001

详细信息

中图分类号: O482.31
计量
- 文章访问数: 7
- HTML全文浏览量: 5
- PDF下载量: 0
- 被引次数: 0
出版历程
- 收稿日期: 2020-01-03
- 修回日期: 2020-01-05
- 录用日期: 2026-06-26
- 网络出版日期: 2026-09-17

Refractive index sensor based on mode hybridized and multiple Fano resonances in a MIM waveguide coupled with dual D-shaped cavities

doi: 10.3724/CO.EN-2026-0018

1.
Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, P.R. China
2.
Department of Physics and Electronic Information Engineering, Lyuliang University, Lyuliang 033001, P.R. China

Funds: Supported by the Young Top-notch Talents in Science and Technology Innovation of the ‘San Jin Ying Cai’ Plan (Grant No. 1012631)

More Information

Author Bio:
CHANG Xuyan (2000—), female, born in Xinzhou, Shanxi Province, is currently a master's student in Instrumentation Engineering at North University of China, having received her bachelor's degree from Shanxi University in 2023. E-mail: 1927744674@qq.com

ZHAO Dongqing (1975—), male, born in Jinzhong, Shanxi Province, received his Ph.D. degree from North University of China. He is currently an Associate Professor and Master Supervisor with the School of Instrument and Electronics, North University of China. His research interests include digital signal acquisition and data processing. E-mail: hunterdq@nuc.edu.cn

Corresponding author: hunterdq@nuc.edu.cn

摘要

摘要:
本文提出了一种基于金属-绝缘体-金属（MIM）波导耦合双D型谐振腔的多重Fano共振折射率传感器。采用有限元法（FEM）对其透射光谱和稳态磁场分布进行了仿真计算。结果表明，该结构中观测到了多重显著的Fano共振现象，这主要归因于上下D型谐振腔所产生的共振模式之间的模式杂化效应。同时，本文系统探究了D型谐振腔几何参数对Fano共振特性的影响。此外，对基于多重Fano共振的折射率传感器性能进行了评估。结果表明，该传感器展现出优异的折射率传感性能，其最大灵敏度（S）和品质因数（FOM）分别高达 1860 nm/RIU 和 68.77 RIU^-1。该研究工作为高性能纳米光子器件的设计提供了理论基础。
- MIM波导 /
- 双D形腔 /
- 法诺共振 /
- 模式杂化 /
- 折射率传感器
Abstract:
A multiple Fano resonance refractive index sensor based on metal-insulator-metal (MIM) waveguides coupled with dual D-shaped cavities is proposed. The transmission spectra and steady-state magnetic field distributions were simulated using the finite element method (FEM). The results show that the multiple distinct Fano resonances are observed, which are primarily attributed to mode hybridization between the vibration modes generated by the upper and lower D-shaped resonant cavities. Meanwhile, the influence of the geometric parameters of the D-shaped cavity on the Fano resonance was systematically investigated. Furthermore, the performance of the refractive index sensor based on multiple Fano resonances was evaluated. The results indicate that the sensor demonstrates excellent refractive index sensing performance, with a maximum sensitivity and a figure of merit reaching 1860 nm/RIU and 68.77 RIU⁻¹, respectively. This work provides a theoretical basis for the design of high-performance nanophotonic devices.
- MIM waveguide /
- dual D-shaped cavities /
- fano resonance /
- mode hybridization /
- refractive index sensor

HTML全文

Figure 1. Schematic diagram of the MIM waveguide coupled with dual D-shaped cavities.

下载: 全尺寸图片幻灯片

Figure 2. The diagram of $ FWHM $.

下载: 全尺寸图片幻灯片

Figure 3. Transmission spectra for four distinct configurations.

下载: 全尺寸图片幻灯片

Figure 4. Mode Hybridization in a Double-D-Shaped Cavity Waveguide Coupling System, (a) λ = 1640 nm, (b) λ = 1375 nm, (c) λ = 810 nm, (d) λ = 710 nm.

下载: 全尺寸图片幻灯片

Figure 5. (a) Transmission spectra of the MIM waveguide coupled with dual D-shaped cavities for different r₁; (b) Shift of the resonance dip as a function of r₁.

下载: 全尺寸图片幻灯片

Figure 6. (a) Transmission spectra of the MIM waveguide coupled with dual D-shaped cavities for different r₂; (b) Shift of the resonance dip as a function of r₂.

下载: 全尺寸图片幻灯片

Figure 7. (a) Transmission spectra of the MIM waveguide coupled with dual D-shaped cavities for different l₁; (b) Shift of the resonance dip as a function of l₁.

下载: 全尺寸图片幻灯片

Figure 8. (a) Transmission spectra of the MIM waveguide coupled with dual D-shaped cavities for different l₂; (b) Shift of the resonance dip as a function of l₂.

下载: 全尺寸图片幻灯片

Figure 9. (a) Transmission spectra of the MIM waveguide coupled with dual D-shaped cavities for different g; (b) Shift of the resonance dip as a function of g.

下载: 全尺寸图片幻灯片

Figure 10. (a) Transmission spectra of the MIM waveguide coupled with dual D-shaped cavities for different d; (b) Shift of the resonance dip as a function of d.

下载: 全尺寸图片幻灯片

Figure 11. (a) Transmission spectra as a function of refractive index; (b) linear fit of the resonance dip wavelength versus refractive index.

下载: 全尺寸图片幻灯片

Table 1. Comparison of the proposed sensor with other reported plasmonic sensors.

Reference	Resonator structure	S (nm/RIU)	FOM (RIU⁻¹)
[16]	circular split ring	1250	54
[17]	semicircular cavity	941.33	-
[31]	a nanoring	567.2	3.72
[33]	square shaped cavity	1210.12	20
[34]	dual-ring resonator	324.76	10.187
[35]	arc-shaped resonator	867.20	57.80
[36]	L-shaped resonator	1638	21.84
[37]	semi-elliptical ring resonator	1783	27
This work	dual D-shaped cavities	1860,1350,760,680	57.25,68.77, 56.69,48.97

下载: 导出CSV

参考文献(37)

[1]	HU F F, YI H X, ZHOU ZH P. Band-pass plasmonic slot filter with band selection and spectrally splitting capabilities[J]. Optics Express, 2011, 19(6): 4848-4855. doi: 10.1364/OE.19.004848
[2]	BARNES W L, DEREUX A, EBBESEN T W. Surface plasmon subwavelength optics[J]. Nature, 2003, 424(6950): 824-830. doi: 10.1038/nature01937
[3]	HADDOUCHE L, CHERBI L. Comparison of finite element and transfer matrix methods for numerical investigation of surface plasmon waveguides[J]. Optics Communications, 2017, 382: 132-137. doi: 10.1016/j.optcom.2016.07.068
[4]	HAN ZH H, BOZHEVOLNYI S I. Radiation guiding with surface plasmon polaritons[J]. Reports on Progress in Physics, 2013, 76(1): 016402. doi: 10.1088/0034-4885/76/1/016402
[5]	REN X B, REN K, CAI Y X. Tunable compact nanosensor based on Fano resonance in a plasmonic waveguide system[J]. Applied Optics, 2017, 56(31): H1-H9. doi: 10.1364/AO.56.0000H1
[6]	TUHIN S S, ROUF H K. High-performance MIM plasmonic notch filters based on ring resonators using phase-change-materials[J]. Plasmonics, 2025, 20(7): 4821-4833. doi: 10.1007/s11468-024-02675-w
[7]	SONG J Q, TIAN H, HAO Y, et al. A tunable low-pass filter based on MIM structure with kerr effect[J]. Plasmonics, 2025, 20(5): 2625-2633. doi: 10.1007/s11468-024-02502-2
[8]	KORKMAZ S. Multiple ultra-narrow band-stop filters based on MIM plasmonic waveguide with nanoring cavities[J]. Physica Scripta, 2024, 99(3): 035503. doi: 10.1088/1402-4896/ad203d
[9]	NANDA R, RATH R, SWARNAKAR S, et al. Design of all-optical directional coupler using plasmonic MIM waveguide for switching applications[J]. Plasmonics, 2022, 17(5): 2153-2159. doi: 10.1007/s11468-022-01695-8
[10]	YADAV G K, SARKAR D, METYA S K. High FOM plasmonic nanosensor for blood biomolecule detection[J]. Plasmonics, 2025, 20(5): 2655-2663. doi: 10.1007/s11468-024-02487-y
[11]	LIU W X, YAN SH B, XU ZH Y, et al. Plasmonic sensor based on an MIM waveguide coupled with a ring–bridge–rounded square resonator[J]. Photonics, 2025, 13(1): 34. doi: 10.3390/photonics13010034
[12]	YAN ZH K, YAN SH B, XU Z H, et al. Multi-structure-based refractive index sensor and its application in temperature sensing[J]. Sensors, 2025, 25(2): 412. doi: 10.3390/s25020412
[13]	XU D J, YAN SH B, YANG X Y, et al. A nanoscale structure based on a ring with matchstick-shape cavity for glucose concentration and temperature detection[J]. IEEE Sensors Journal, 2021, 21(4): 4442-4450. doi: 10.1109/JSEN.2020.3029052
[14]	ZHANG ZH D, ZHANG H N, LIANG J, et al. Double Fano resonance and refractive index sensors based on parallel-arranged Au nanorod dimer metasurface arrays[J]. Chinese Optics, 2023, 16(4): 961-971. (in Chinese).
[15]	CHEN J F, LIAN X Y, ZHAO M, et al. Multimode Fano resonances sensing based on a non-through MIM waveguide with a square split-ring resonance cavity[J]. Biosensors, 2022, 12(5): 306. doi: 10.3390/bios12050306
[16]	ZHU J, XU Q N, JIAN ZH H. Novel high performance Fano resonance sensor with circular split ring resonance[J]. Physica B: Condensed Matter, 2024, 689: 416205. doi: 10.1016/j.physb.2024.416205
[17]	BUTT M A, KAZANSKIY N L, KHONINA S N. Metal-insulator-metal waveguide plasmonic sensor system for refractive index sensing applications[J]. Advanced Photonics Research, 2023, 4(7): 2300079. doi: 10.1002/adpr.202300079
[18]	CHEN J H, WANG L, FENG Y T, et al. A nano-refractive index sensor based on a MIM waveguide with a semicircular ring rectangular resonator[J]. Micro and Nanostructures, 2024, 186: 207730. doi: 10.1016/j.micrna.2023.207730
[19]	MOEINIMALEKI B, KAATUZIAN H, MALLAH LIVANI A, et al. Plasmonic refractive index nano sensor based on triplet coupled stub resonators based Fano resonances[J]. IET Optoelectronics, 2023, 17(6): 257-272. doi: 10.1049/ote2.12107
[20]	YAN SH B, SHI H R, YANG X Y, et al. Study on the nanosensor based on a MIM waveguide with a stub coupled with a horizontal b-type cavity[J]. Photonics, 2021, 8(4): 125. doi: 10.3390/photonics8040125
[21]	CAO Y H, YAN SH B, LIU F, et al. Nanoscale refractive index sensor based on an MIM waveguide coupled to U-shaped ring resonator with three stubs for alcohol solution concentration detection[J]. Plasmonics, 2024, 19(5): 2421-2432. doi: 10.1007/s11468-023-02175-3
[22]	BUTT M A. Numerical assessment of a metal-insulator-metal waveguide-based plasmonic sensor system for the recognition of tuberculosis in blood plasma[J]. Micromachines, 2023, 14(4): 729. doi: 10.3390/mi14040729
[23]	BUTT M A. Plasmonic sensor system embedded with orthogonal mode couplers for simultaneous monitoring of temperature and refractive index[J]. Plasmonics, 2025, 20(1): 459-469. doi: 10.1007/s11468-024-02303-7
[24]	GHANAVATI M, KARAMI M A. Ellipsoid defect in trapezoidal-shaped cavities coupled to multi-resonance plasmonic metal–insulator-metal waveguide toward ultrasensitive temperature sensor[J]. Plasmonics, 2023, 18(3): 1047-1057. doi: 10.1007/s11468-023-01831-y
[25]	ZAYATS A V, SMOLYANINOV I I, MARADUDIN A A. Nano-optics of surface plasmon polaritons[J]. Physics Reports, 2005, 408(3-4): 131-314. doi: 10.1016/j.physrep.2004.11.001
[26]	GAI H F, WANG J, TIAN Q. Modified Debye model parameters of metals applicable for broadband calculations[J]. Applied Optics, 2007, 46(12): 2229-2233. doi: 10.1364/AO.46.002229
[27]	ZHANG ZH D, LUO L, XUE CH Y, et al. Fano resonance based on metal-insulator-metal waveguide-coupled double rectangular cavities for plasmonic nanosensors[J]. Sensors, 2016, 16(5): 642. doi: 10.3390/s16050642
[28]	ZHANG ZH Y, WANG J D, ZHAO Y N, et al. Numerical investigation of a branch-shaped filter based on metal-insulator-metal waveguide[J]. Plasmonics, 2011, 6(4): 773-778. (查阅网上资料, 未能确认标黄作者信息, 请确认).
[29]	LIU X, LI J N, CHEN J F, et al. Independently tunable triple Fano resonances based on MIM waveguide structure with a semi-ring cavity and its sensing characteristics[J]. Optics Express, 2021, 29(13): 20829-20838. (查阅网上资料, 未能确认标黄作者信息, 请确认).
[30]	BUTT M A, KAZANSKIY N L, KHONINA S N. Highly sensitive refractive index sensor based on plasmonic bow tie configuration[J]. Photonic Sensors, 2020, 10(3): 223-232. doi: 10.1007/s13320-020-0588-z
[31]	SHOKORLOU Y M, HEIDARZADEH H, BAHADOR H. Simulation and analysis of ring shape metal–insulator-metal plasmonic biosensors for the detection of prostate-specific antigen (PSA)[J]. Plasmonics, 2022, 17(5): 2197-2204. doi: 10.1007/s11468-022-01707-7
[32]	SRIVASTAVA A, VERMA A, PRAJAPATI Y K. Theoretical study of hazardous carbon-di-oxide gas sensing using MIM structure-based SPR sensing scheme[J]. IET Optoelectronics, 2021, 15(4): 167-177. doi: 10.1049/ote2.12035
[33]	GHANAVATI M, KARAMI M A. Plasmonic CH₄ sensor based on MIM waveguide coupled to circular nanorod in a square-shaped cavity[J]. IET Optoelectronics, 2025, 19(1): e70002. doi: 10.1049/ote2.70002
[34]	KHODAIE A, RAFIGHIRANI Y, HEIDARZADEH H, et al. Design of a plasmonic optical biosensor based on a metal-insulator-metal ring resonator for the detection of various bacterial pathogens[J]. Scientific Reports, 2025, 15(1): 20699. doi: 10.1038/s41598-025-07331-9
[35]	TANG X Y, LI Y CH, CHEN F, et al. Gas concentration and refractive index sensor based on plasmonic induced absorption in metal-insulator-metal waveguide coupled with arc resonators structure[J]. Physica Scripta, 2024, 99(6): 065561. doi: 10.1088/1402-4896/ad4d2a
[36]	RAHAD R, HOSSAIN N, HOSSAIN A. Enhanced alcohol detection using surface plasmon polariton dependent MIM plasmonic sensor[J]. Plasmonics, 2025, 20(3): 1331-1340. doi: 10.1007/s11468-024-02360-y
[37]	FIGUIGUE M, MAHBOUB O, EL HAFFAR R. Optical properties of multiple Fano resonance in MIM waveguide system coupled with a semi-elliptical ring resonator[J]. Plasmonics, 2024, 19(2): 721-732. doi: 10.1007/s11468-023-02012-7