高鲁棒RGO柔性可拉伸平面微型超级电容器的激光制造与性能研究

姜昊伯; 张誉尹; 张誉元; 王哲; 付秀燕; 李骅芮; 刘健琦; 辛巍

doi:10.3724/CO.EN-2026-0011

高鲁棒RGO柔性可拉伸平面微型超级电容器的激光制造与性能研究

姜昊伯^1, ,,
张誉尹^{1, 3},
张誉元²,
王哲²,
付秀燕^1, ,,
李骅芮¹,
刘健琦¹,
辛巍^2, ,

1.
吉林师范大学物理学院, 功能材料物理与化学教育部重点实验室, 长春 130103
2.
东北师范大学集成光电子学国家重点实验室, 紫外光发射材料与技术教育部重点实验室, 长春 130024
3.
长春汽车职业技术大学, 长春 130103

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中图分类号: O482.31
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出版历程
- 收稿日期: 2026-04-09
- 录用日期: 2026-06-26
- 网络出版日期: 2026-09-10

Laser processing of flexible and stretchable RGO in-plane micro-supercapacitors with strong performance robustness

doi: 10.3724/CO.EN-2026-0011

JIANG Hao-bo^{1
, ,},
ZHANG Yu-yin^{1, 3},
ZHANG Yu-yuan²,
WANG Zhe²,
FU Xiu-yan^{1
, ,},
LI Hua-rui¹,
LIU Jian-qi¹,
XIN Wei^{2
, ,}

1.
Key Laboratory of Functional Materials Physics and Chemistry of Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, China
2.
State Key Laboratory of Integrated Optoelectronics, Key Laboratory of UV-Emitting Materials and Technology of Ministry of Education, Northeast Normal University, Changchun 130024, China
3.
Changchun Technical University of Automobile, Changchun 130103, China

Funds: Supported by the Development of Science and Technology of Jilin Province (No. YDZJ202301ZYTS383); the Science and Technology Project of Jilin Province Education Department (No. JJKH20240572KJ); the National Natural Science Foundation of China (No. 22478149, No. 62505109, No. 12274065); PhD Start-up Fund of Jilin Normal University (No. 0420104, No. 0420103)

More Information

Author Bio:
JIANG Hao-bo (1988—) is a associate professor and master's supervisor from Changchun, Jilin Province. She received her Ph.D. in 2016 from the college of Electronic Science and Engineering at Jilin University. Her current research focuses on laser micro/nano fabrication of two-dimensional materials, for example, graphene, and their applications in energy storage devices. E-mail：jianghaobo@jlnu.edu.cn

FU Xiu-yan (1991—) is a lecturer and master's supervisor from Taian, Shandong Province. She received her Ph.D. from Jilin University in 2020. Her research primarily focuses on laser processing of two-dimensional nanomaterials for energy storage devices. E-mail: fuxy@jlnu.edu.cn

XIN Wei (1987—) is a associate professor and doctoral supervisor from Tonghua, Jilin Province. He received his Ph.D. from Nankai University in 2017. He then worked and studied at several institutions, including the Changchun Institute of Optics, Fine Mechanics and Physics, Zhejiang University, and the Shanghai Institute of Technical Physics. His current research focuses on the micro/nano optoelectronic properties of two-dimensional materials and their device performance. E-mail: xinwei@nenu.edu.cn

Corresponding author: jianghaobo@jlnu.edu.cn; fuxy@jlnu.edu.cn; xinwei@nenu.edu.cn

摘要

摘要:
柔性可拉伸平面微型超级电容器（FS-MSCs）在大变形下的性能不稳定和性能退化限制了其应用。选择合适的柔性电极材料并将其与可拉伸基底集成是解决该问题的关键，但简化器件制备流程并优化性能仍面临挑战。在此，我们报告了一种可编程的单一波长激光加工策略，该策略可同时对氧化石墨烯（GO）叉指电极薄膜进行图案化和还原处理，并对弹性基底规整性纹理化。通过预拉伸基底并将其与柔性电极适配，我们的器件展现出了优异的性能鲁棒性。该器件能够承受超过300°的弯曲角度和约为原始长度120%的拉伸程度。此外，通过优化基底表面形貌至有序网格，器件的电化学性能和稳定性得到了进一步显著提升。在不同拉伸条件下，其最大电容达到1.34 mF/cm²，波动仅为1.5%。即使电流密度从0.01 mA/cm²逐渐增加到0.05 mA/cm²，在不同拉伸强度下，器件的比电容波动仍保持在<7.4%。我们的工作为简化器件构建、并提高平面FS-MSCs在恶劣变形环境下的性能稳定性提供了一种有效解决方案，在可穿戴和便携式储能的未来应用中具有巨大潜力。
- 激光加工 /
- 微型超级电容器 /
- RGO /
- 鲁棒性 /
- 柔性与可拉伸性
Abstract:
The performance instability and degradation of flexible and stretchable in-plane micro-supercapacitors (FS-MSCs) under large deformation have limited their applications. Selecting suitable flexible electrode materials and integrating them with stretchable substrates is crucial to solve the problem, while it remains a challenge to simplify the device preparation and optimize performance. Here, we report a programmable single-wavelength laser processing strategy that simultaneously reduces/patterns reduced graphene oxide (RGO) interdigital electrodes and textures an elastomeric substrate. By pre-stretching the substrate and fitting it to the flexible RGO electrodes, our device demonstrates excellent performance robustness. A bending angle of over 300° and a tensile strain of about 120% of its original length can be withstood. Furthermore, by optimizing the substrate surface morphology with ordered gridding, the electrochemical properties and stability of the device have been significantly improved, which achieves a maximum capacitance of 1.34 mF/cm² with a fluctuation of only 1.5% under different tensile conditions. Even as the current density increases from 0.01 to 0.05 mA/cm² gradually, the specific capacitance fluctuation of the devices remains <7.4% under varying tensile strengths. Our work offers an effective solution for enhancing performance stability of in-plane FS-MSCs in harsh deformation environments, holding great potential for their future applications in wearable and portable energy storage.
- laser processing /
- micro-supercapacitors /
- RGO /
- robustness /
- flexibility and stretchability

HTML全文

Figure 1. (a) Schematic diagram of RGO in-plane FS-MSCs processing with laser direct writing technique. (b) OM and SEM images of local electrodes positions. (c)-(e) XPS, Raman and XRD spectra characterization of GO films where it is photo-reduced or not.

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Figure 2. (a) OM images of our RGO FS-MSCs assembled on the attachments with different curvatures. (b)-(c) CV and GCD curves respectively measured under different scan rates and current densities, (d)-(f) specific capacitance retention (SCR), variation on frequency, and Nyquist plots of the devices. (g) SCR of devices after 1000 bending cycles (top) and the corresponding CV, GCD performance comparison at different bending conditions (bottom).

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Figure 3. (a) FS-MSC schematic (top), 3D confocal laser scanning microscopy (CLSM) image of the structured substrate (bottom), and the OM images of the FS-MSCs at different tensile strain conditions. The scale is 3 mm. The 120% of the tensile strain corresponds to a stretching deformation of 220% of the initial length of sample. Other tensile strain conditions are defined according to the same criteria. (b) Cs values comparison calculated from CV (scan rate 20 mV/s) and GCD (current density 0.01 mA/cm²) curves before and after the RGO supercapacitor is transferred to an elastomeric substrate. (c)-(d) The CV (scan rate 20 mV/s) and GCD performance (current density 0.01 mA/cm²) of the devices under different tension conditions. (e) SCR of the devices with the increase of scan rate and current density.

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Figure 4. (a) OMs of the gridding substrate and the corresponding assembled RGO FS-MSC. (b) OMs of the S5-2, S5-5 and S5-8 substrates under pre-stretching. (c) SCR comparison of RGO FS-MSCs assembled on the groove and gridding substrates under different tensile conditions. (d) SCR comparison of S5-5 FS-MSC. The numerical errors are caused by the difference in tensile strength.

下载: 全尺寸图片幻灯片

Table 1. Performance comparison between laser-processed graphene-based supercapacitors

Laser	Wavelength (nm)	Material	Areal Capacitance (mF/cm²)	Flexibility	Stretchability	Stability	Reference
UV	346	GO/leaves	34.68	99% retention (0–60°)	_	99%@50k cycles 100%@20k (45°)	[38]
	355	GO-MG-(PANI)/PET/PI/PTFE	3.8	F	_	82%@20k cycles 86%@1k (150°)	[39]
	355	GO/SEBS	1.336	98% retention (0–180°)	20%	90%@1k bend 90%@1k (20%)	[40]
	355	CNT/ natural latex balloon	13.5	F	400%	93%@12k cycles 97%@200 (20%)	[9]
VIS	400-450	FB-LIG/PI	49.81	99% retention (0–180°)	_	97.56%@10k cycles 90.16%@10k (90°)	[41]
	405	Mxene-GO/PET	2.58	98% retention (0–150°)	_	97.7%@10k cycles	[42]
	405	PEDOT- GO/PET	5.78	98% retention (0–135°)	_	85.4%@5k cycles	[43]
NIR	800	GO-MnO₂	128	F	_	95%@12k cycles 100%@0–180° bend	[44]
	1030	GO/PET	7.2 F/cm³	95% retention (0–180°)	_	96%@10k cycles	[45]
	1030	GO-RuO₂/ PET	2.35	F	_	90%@4k cycles	[46]
	1064	GO/PVA	88.32	95% retention (0–180°)	_	82%@2k cycles 95%@5k (90°)	[47]
MIR	10600	GO	3.41	F	_	99%@1k cycles (1%)	[48]
	10600	GO/PET	43.7	F	_	90%@3k cycles	[49]
	10600	LIG-CrO_x/PI	13.48	99% retention (0–90°)	_	85%@1.5k cycles	[50]
	10600	NiO-Co₃O₄-GO/WPU	2.4	100% retention (±180°)	280%	98.4%@10k 80.2%@1k (100%)	[51]
	10600	GO/3M tape	1.34	96.5% retention (>300°)	120%	111%@1k (>300°)	This work

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高鲁棒RGO柔性可拉伸平面微型超级电容器的激光制造与性能研究

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Laser processing of flexible and stretchable RGO in-plane micro-supercapacitors with strong performance robustness

doi: 10.3724/CO.EN-2026-0011

Corresponding author: jianghaobo@jlnu.edu.cn; fuxy@jlnu.edu.cn; xinwei@nenu.edu.cn

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高鲁棒RGO柔性可拉伸平面微型超级电容器的激光制造与性能研究

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Laser processing of flexible and stretchable RGO in-plane micro-supercapacitors with strong performance robustness

doi: 10.3724/CO.EN-2026-0011

Corresponding author: jianghaobo@jlnu.edu.cn; fuxy@jlnu.edu.cn; xinwei@nenu.edu.cn

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