基于连续域束缚态理论的圆盘双缺口型多功能超表面传感器研究

李继国; 张鑫; 焦庆斌; 姜思佳; 马顶; 杨名宇; 许亮; 谭鑫

doi:10.37188/CO.2026-0069

基于连续域束缚态理论的圆盘双缺口型多功能超表面传感器研究

doi: 10.37188/CO.2026-0069

cstr: 32171.14.CO.2026-0069

李继国^{1, 2,},
张鑫^{1, 2,},
焦庆斌^1,,
姜思佳¹,
马顶¹,
杨名宇¹,
许亮¹,
谭鑫^{1, 3, ,}

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
2.
中国科学院大学, 北京 100049
3.
中国科学院大学材料科学与光电技术学院, 北京 100049

基金项目: 吉林省科技发展计划项目(No. 20230508038RC)

详细信息

作者简介:
李继国(2001—)，男，吉林通化人，硕士，主要从事超表面相关仪器开发方面的研究。E-mail: lijiguo23@mails.ucas.ac.cn

张　鑫(2000—)，女，黑龙江牡丹江人，硕士，主要从事微纳器件制造方面的研究。E-mail: 984329771@qq.com

焦庆斌(1986—)，男，辽宁丹东人，博士，副研究员，2014年于中国科学院长春光学精密机械与物理研究所获博士学位，主要从事全息光栅、衍射光学器件方面的研究。E-mail: voynichjqb@163.com

谭　鑫(1980—)，男，吉林长春人，博士，研究员，博士生导师，2008年于中国科学技术大学获得博士学位，主要从事先进光谱技术及装备开发与应用方面研究。E-mail: xintan_grating@163.com

中图分类号: TH741
计量
- 文章访问数: 13
- HTML全文浏览量: 4
- PDF下载量: 0
- 被引次数: 0
出版历程
- 网络出版日期: 2026-07-11

The circular disk dual-notch multifunctional metasurface sensor based on the theory of bound states in the continuum

LI Jiguo^{1, 2
,},
ZHANG Xin^{1, 2
,},
JIAO Qingbin^1
,,
JIANG Sijia¹,
MA Ding¹,
YANG Mingyu¹,
XU Liang¹,
TAN Xin^{1, 3
, ,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China
3.
Center of Materials Science and Optoelectronics Engineering, Chinese Academy of Sciences, Beijing 100049, China

Funds: This work was supported by Jilin Province Science and Technology Development Plan Project (No. 20230508038RC)

More Information

Corresponding author: xintan_grating@163.com

摘要

摘要:
将超表面与光学传感器结合可有效缩小传感器的体积并提升其对电磁场调控的能力。本文提出并制备了一种基于石英基底的圆盘双缺口硅阵列全介质多功能超表面光学传感器。通过引入呈45°分布的双非对称缺口打破结构对称性，该结构成功将无辐射的理想BIC态转化为极强光局域场的高Q值准BIC态，并于1617 nm处激发了超窄线宽Fano传感谐振峰。仿真研究表明，谐振峰的主要贡献极子为磁偶（MD）极子，品质因子（Q）理论最高可达1.6×10⁵，FOM最高可达36350；其具有363.5 nm/RIU的折射率传感与51.96 pm/ °C的温度传感性能。此外，可通过改变入射光的偏振态对超表面谐振峰的调制深度进行调控。传感实验分析可得，其不同折射率液体的灵敏度为268.7 nm/RIU。本结构可广泛应用于环境监测、生物医学检测及偏振型光开关控制等领域，并为多参数超表面传感器设计提供了参考，扩展了超表面在实际传感应用中的多功能性。
- 全介质超表面 /
- 多功能光学传感器 /
- Fano共振 /
- 连续域束缚态理论
Abstract:
The integration of metasurfaces with optical sensors can effectively reduce the sensor volume and enhance its capability for electromagnetic field manipulation. This paper proposes and fabricates an all-dielectric multifunctional metasurface optical sensor based on a disk-with-double-gap silicon array on a quartz substrate. By introducing two asymmetrically arranged gaps oriented at 45° to break the structural symmetry, the proposed structure successfully converts the non-radiative ideal bound state in the continuum (BIC) into a high-Q quasi-BIC state with strongly localized optical fields, and excites an ultra-narrow linewidth Fano resonance sensing peak at 1617 nm. Simulation results indicate that the resonance peak is predominantly contributed by the magnetic dipole (MD) mode, with a theoretically maximum quality factor (Q) of up to 1.6×1051.6×10⁵ and a figure of merit (FOM) reaching 36350. The sensor exhibits a refractive index sensitivity of 363.5 nm/RIU and a temperature sensitivity of 51.96 pm/°C. Furthermore, the modulation depth of the metasurface resonance peak can be controlled by varying the polarization state of the incident light. Experimental sensing analysis demonstrates a sensitivity of 268.7 nm/RIU for liquids with different refractive indices. This structure holds promise for applications in environmental monitoring, biomedical detection, polarization-controlled optical switching, and provides a reference for multi-parameter metasurface sensors, extending the multifunctionality of metasurfaces in practical sensing applications.
- all-dielectric metasurfaces /
- multifunctional optical sensors /
- fano resonance /
- bound states in the continuun

HTML全文

图 1 圆盘双缺口超表面结构 (a) 超表面结构示意图 (b) 单个周期的结构图 (c) 单个周期结构的俯视图

Figure 1. Cylindrical double-notch metasurface structure (a) Schematic illustration of the metasurface structure (b) Unit cell geometry (c) Top-view representation of the unit cell

下载: 全尺寸图片幻灯片

图 2 超表面透射光谱响应(a) 所设计超表面的透射光谱 (b) 超表面透射光谱仿真结果（黑色）与Fano拟合曲线（红色）

Figure 2. Metasurface transmission spectral response (a) Transmission spectrum of the designed metasurface (b) Simulated transmission spectrum (black curve) and corresponding Fano fitting result (red curve)

下载: 全尺寸图片幻灯片

图 3 超表面在不同非对称破缺下的透射光谱(a) 不同非对称δ下超表面的透射光谱 (b) 透射光谱的2D-map (c) ∆与品质因子Q之间关系的仿真与拟合结果

Figure 3. The transmission spectra of metasurfaces under different asymmetric breakings (a) Transmission spectra of the metasurface under different asymmetry parameters (δ) (b) Two-dimensional map of the transmission spectra as a function of δ (c) Simulated and fitted relationship between spectral shift (∆) and quality factor Q

下载: 全尺寸图片幻灯片

图 4 多极子分析(a) 对称结构的多极子分解情况 (b) 非对称结构的多极子分解情况

Figure 4. Multipole analysis (a) Multipole decomposition of the symmetric metasurface structure (b) Multipole decomposition of the asymmetric metasurface structure

下载: 全尺寸图片幻灯片

图 5 超表面电磁场分布（白色箭头指示局域场矢量方向；黑色箭头指示等效偶极矩或总场环流方向）(a) 对称结构x-y平面电场 (b) 对称结构z-x平面磁场 (c) 结构中x-y平面（z=100 nm，蓝色）以及z-x平面(x=0 nm，粉色)的示意图 (d) 非对称结构MD极子示意图 (e) 非对称结构x-y平面电场（位移电流环） (f) 非对称结构z-x平面磁场

Figure 5. Electromagnetic field distribution of the metasurface (white arrows indicate the direction of the local field vector; black arrows indicate the direction of the equivalent dipole moment or the total field circulation) (a) Symmetric structure electric field in the x-y plane (b) Symmetric structure magnetic field in the z-x plane (c) Schematic illustration showing the x-y plane (z = 100 nm, in blue) and z-x plane (x = 0 nm, in pink) within the metasurface structure (d) Schematic diagram of MD polaritons in the asymmetric structure (e) Electric field in the x-y plane (displacement current loop) in the asymmetric structure (f) Magnetic field in the z-x plane in the asymmetric structure

下载: 全尺寸图片幻灯片

图 6 超表面透射光谱几何依赖性(a)-(d) 保持其他参数不变，分别只改变Px、Py、R、h对透射光谱以及超表面传感性能的影响。(S为折射率传感灵敏度)

Figure 6. Geometric dependence of the transmission spectrum of metasurfaces (a)-(d) Influence of geometric parameter variations—Px, Py, R, and h—on the transmission spectra and refractive index sensing sensitivity (S), with all other parameters held constant

下载: 全尺寸图片幻灯片

图 7 超表面折射率传感性能(a) 改变背景折射率n透射光谱的变化 (b) n对共振峰位置的线性拟合结果

Figure 7. Metasurface refractive index sensing performance (a) Transmission spectra as a function of background refractive index (n). (b) Linear fitting of the resonance peak wavelength versus refractive index (n)

下载: 全尺寸图片幻灯片

图 8 超表面温度传感特性(a) 不同温度下的透射光谱曲线 (b) 温度传感灵敏度拟合

Figure 8. Temperature sensing characteristics of metasurfaces (a) Transmission spectra measured at different temperatures. (b) Linear fitting of temperature sensing sensitivity

下载: 全尺寸图片幻灯片

图 9 超表面透射光谱偏振特性(a) 不同偏振角度下超表面的透射光谱曲线 (b) 不同偏振角度下的2D-color map (c) 不同偏振角度下的电场情况 (x-y平面，z=100 nm处)

Figure 9. Polarization characteristics of the transmission spectrum of metasurfaces (a) Transmission spectra of the metasurface under varying polarization angles. (b) Two-dimensional color map of spectral response as a function of polarization angle. (c) Electric field distribution in the x-y plane at z = 100 nm for different polarization angles

下载: 全尺寸图片幻灯片

图 10 超表面工艺流程图及制备

Figure 10. Process flow chart and preparation of metasurfaces

下载: 全尺寸图片幻灯片

图 11 折射率传感及偏振敏感实验结果

Figure 11. Experimental results of refractive index sensing and polarization sensitivity

下载: 全尺寸图片幻灯片

表 1 同类型超表面传感器仿真性能对比

Table 1. Simulation performance comparison of metasurface sensors of the same type

材料	n范围	共振峰位置(nm)	S_n (nm/RIU)	T范围	S_T	Q_max	FOM_max	偏振可调	参考文献
Si/SiO₂	1.33−1.40	1023.65, 1095.52,	232	5-50K	63pm/K	2.6×10⁴	3980	Yes	[14]
Si/Si₃N₄	1.33−1.40	2409.3, 2667.0	746	0-100 °C	54pm/ °C	54757	18650	None	[16]
LiNbO3/SiO₂	1.0−1.40	1230.19	241	None	None	10⁵	3×10⁵	None	[19]
TiO₂/SiO₂	1.31−1.35	936, 1013, 1010, 1052	288	None	None	6900	888	Yes	[20]
Si/SiO₂	1.0−1.08	1038.75, 1168.44	325	None	None	34176	10156	None	[27]
Si/SiO₂	1.0−2.0	1617	363.5	20−80 °C	51.96 pm/ °C	1.6×10⁵	36350	Yes	This work

下载: 导出CSV

表 2 实验测试中使用的不同类型待测溶液及其折射率标准值

Table 2. The different types of test solutions used in the experimental tests and their standard refractive index values

Solute type	Deionized water	Anhydrous ethanol	50% Ethanol	6% Sucrose	10% Sucrose	20% Sucrose	5% NaCl	10% NaCl	20% NaCl
n	1.33	1.3618	1.3584	1.3452	1.3532	1.3727	1.3377	1.3487	1.3707

下载: 导出CSV

参考文献(27)

[1]	SI L M, SHEN Q T, DONG L, et al. Crosstalk-free spin-selective metasurface for full-space wavefront manipulation with nearly 100% efficiency[J]. Advanced Optical Materials, 2026, 14(9): 2501041. doi: 10.1002/adom.202501041
[2]	NIU L, FENG X, ZHANG X Q, et al. Photonic terahertz phased array via selective excitation of nonlinear Pancharatnam-Berry elements[J]. Nature Communications, 2025, 16(1): 8159. doi: 10.1038/s41467-025-63127-5
[3]	ZHU R CH, WANG J F, DING CH, et al. Multi-field-sensing metasurface with robust self-adaptive reconfigurability[J]. Nanophotonics, 2023, 12(7): 1337-1345. doi: 10.1515/nanoph-2023-0050
[4]	HU SH G, LI M Y, XU J W, et al. Electromagnetic metamaterial agent[J]. Light: Science & Applications, 2025, 14(1): 12.
[5]	HE CH SH, ZHAO L, ZHANG SH, et al. Intrinsic topological hinge states induced by boundary gauge fields in photonic metamaterials[J]. eLight, 2025, 5(1): 19. doi: 10.1186/s43593-025-00097-7
[6]	HUANG Y J, XIE X, PU M B, et al. Dual-functional metasurface toward giant linear and circular dichroism[J]. Advanced Optical Materials, 2020, 8(11): 1902061. doi: 10.1002/adom.201902061
[7]	JIANG J Y, CAO Y, ZHOU X, et al. Colloidal self-assembly based ultrathin metasurface for perfect absorption across the entire visible spectrum[J]. Nanophotonics, 2023, 12(8): 1581-1590. doi: 10.1515/nanoph-2022-0686
[8]	WANG P L, LOU J, YU Y, et al. An ultra-sensitive metasurface biosensor for instant cancer detection based on terahertz spectra[J]. Nano Research, 2023, 16(5): 7304-7311. doi: 10.1007/s12274-023-5386-7
[9]	LV SH Q, TUERSUN P, LI SH Y, et al. Refractive index sensing properties of metal-dielectric yurt tetramer metasurface[J]. Nanomaterials, 2025, 15(20): 1570. doi: 10.3390/nano15201570
[10]	YEUNG C, TSAI R, PHAM B, et al. Global inverse design across multiple photonic structure classes using generative deep learning[J]. Advanced Optical Materials, 2021, 9(20): 2100548. doi: 10.1002/adom.202100548
[11]	LENG B R, ZHANG Y, TSAI D P, et al. Meta-device: advanced manufacturing[J]. Light: Advanced Manufacturing, 2024, 5(1): 117-132.
[12]	MUHAMMAD N, SU ZH X, JIANG Q, et al. Radiationless optical modes in metasurfaces: recent progress and applications[J]. Light: Science & Applications, 2024, 13(1): 192.
[13]	WANG T T, FANG W J, GUO H Y, et al. High Q-factor Fano resonances based on an all-dielectric metasurface for high-performance refractive index sensing[J]. Applied Optics, 2024, 63(24): 6322-6330. doi: 10.1364/AO.532692
[14]	YIN Y X, FAN X Y, FANG W J, et al. Double-parameter analysis of an asymmetric herringbone temperature and refractive index sensor based on all-dielectric metasurface[J]. Optics Express, 2024, 32(16): 28552-28569. doi: 10.1364/OE.531722
[15]	TANG X, HE R, CHEN CH, et al. Quasi-bound states in the continuum in a metal nanograting metasurface for a high figure-of-merit refractive index sensor[J]. Optics Express, 2024, 32(1): 762-773. doi: 10.1364/OE.505759
[16]	GUO L H, ZHANG Z X, XIE Q, et al. Toroidal dipole bound states in the continuum in all-dielectric metasurface for high-performance refractive index and temperature sensing[J]. Applied Surface Science, 2023, 615: 156408. doi: 10.1016/j.apsusc.2023.156408
[17]	HSIAO H H, HSU Y C, LIU A Y, et al. Ultrasensitive refractive index sensing based on the quasi-bound states in the continuum of all-dielectric metasurfaces[J]. Advanced Optical Materials, 2022, 10(19): 2200812. doi: 10.1002/adom.202200812
[18]	WANG D D, FAN X Y, FANG W J, et al. High-performance all-dielectric metasurface for quadruple Fano resonance-induced biosensing applications in the near-infrared range[J]. IEEE Sensors Journal, 2024, 24(8): 12286-12295. doi: 10.1109/JSEN.2024.3371937
[19]	HONG W, LIU S Y, SUI X B, et al. Ultra-sensitive refractive index sensor based on quasi-BIC formed in rectangular-split solid-ring metasurface with thin film lithium niobate[J]. Optics & Laser Technology, 2024, 175: 110776. doi: 10.1016/j.optlastec.2024.110776
[20]	GUO H Y, FANG W J, PANG J L, et al. Multiple Fano resonances based on all-dielectric metastructure for refractive index sensing[J]. Infrared Physics & Technology, 2024, 139: 105284. doi: 10.1016/j.infrared.2024.105284
[21]	PRUCHA E J. Handbook of Optical Constants of Solids[M]. San Diego: Academic Press, 1998.
[22]	SADRIEVA Z, FRIZYUK K, PETROV M, et al. Multipolar origin of bound states in the continuum[J]. Physical Review B, 2019, 100(11): 115303. doi: 10.1103/PhysRevB.100.115303
[23]	WANG T Y, LIU S Q, ZHANG J H, et al. Highly sensitive polarization-tunable Fano resonant metasurface excited by BICs for refractive index detection[J]. Results in Physics, 2024, 58: 107451. doi: 10.1016/j.rinp.2024.107451
[24]	LIU G D, ZHAI X, WANG L L, et al. A high-performance refractive index sensor based on Fano resonance in Si split-ring metasurface[J]. Plasmonics, 2018, 13(1): 15-19. doi: 10.1007/s11468-016-0478-9
[25]	ZHOU CH B, LI SH Y, WANG Y, et al. Multiple toroidal dipole Fano resonances of asymmetric dielectric nanohole arrays[J]. Physical Review B, 2019, 100(19): 195306. doi: 10.1103/PhysRevB.100.195306
[26]	CAO SH SH, FAN X Y, FANG W J, et al. Multi-function sensing applications based on high Q-factor multi-Fano resonances in an all-dielectric metastructure[J]. Biomedical Optics Express, 2024, 15(4): 2406-2418. doi: 10.1364/BOE.518910
[27]	XIAO W X, FAN X Y, WANG Y L, et al. High-Q Fano resonance metasurface sensor for refractive index and methane gas concentration measurement[J]. Optics Communications, 2025, 574: 131187. doi: 10.1016/j.optcom.2024.131187