激光焊接检测视觉传感器405 nm波长半导体激光线光源

赵子豪; 刘旭奇; 刘彦; 褚兆琪; 王睿; 彭浩; 柳娟; 唐霞辉

doi:10.37188/CO.2026-0042

激光焊接检测视觉传感器405 nm波长半导体激光线光源

doi: 10.37188/CO.2026-0042

cstr: 32171.14.CO.2026-0042

赵子豪^{1, †,},
刘旭奇^{1, †,},
刘彦¹,
褚兆琪²,
王睿¹,
彭浩^1, ,,
柳娟³,
唐霞辉¹

1.
华中科技大学光学与电子信息学院, 湖北武汉 430074
2.
厦门大学信息学院, 福建厦门 361102
3.
厦门大学萨本栋微米纳米科学技术研究院, 福建厦门 361102

基金项目: 国家自然科学基金（62375099）

详细信息

作者简介:
赵子豪(2000—)，男，湖北武汉人，硕士研究生，2018年于华中科技大学取得学士学位，主要从事激光焊接检测及蓝光半导体激光器方面的研究。E-mail：m202373262@hust.edu.cn

刘旭奇(1999—)，男，湖南益阳人，硕士，2024年于华中科技大学取得硕士学位，主要从事激光加工方面的研究。E-mail：675956685@qq.com

彭浩(1977—)，男，湖北荆州人，博士，讲师，2012年于华中科技大学取得博士学位，主要从事高功率射频CO₂激光器、蓝光半导体激光器及应用方面的研究。E-mail：penghao@hust.edu.cn

中图分类号: TN249;TP394.1;TH691.9
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出版历程
- 收稿日期: 2026-03-16
- 录用日期: 2026-05-28
- 网络出版日期: 2026-07-04

Laser welding inspection visual sensor 405 nm wavelength semiconductor laser line light source

ZHAO Zi-hao^{1, †
,},
LIU Xu-qi^{1, †
,},
LIU Yan¹,
ZHU Zhao-qi²,
WANG Rui¹,
PENG Hao^{1
, ,},
LIU Juan³,
TANG Xia-hui¹

1.
School of Optics and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
2.
School of Information Science, Xiamen University, Xiamen 361102, Fujian, China
3.
Peng-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, Fujian 361102, China

Funds: Fund program: National Natural Science Foundation of China （62375099）

More Information

Corresponding author: penghao@hust.edu.cn

摘要

摘要:
针对于激光焊接检测过程在尖角焊缝焊接、高速焊接、高反射材料焊接中对视觉传感器检测光源宽度、均匀性的巨大挑战。本文分析了线激光宽度对于检测精度的影响，针对窄宽度、高均匀性要求，提出了一种基于衍射光学元件(Diffractive Optical Element，DOE)和鲍威尔棱镜的线激光整形设计，波长为405 nm的半导体激光器产生的光源通过扩束准直后使用DOE面整形为理想高斯光束，之后使用鲍威尔棱镜整形为线激光，搭建模型仿真模拟上述过程，设计相应的实验验证线激光宽度与检测精度的关系。结果表明经过该DOE面后得到高斯光束在x方向和y方向的M ²因子分别为1.040和1.038，瑞利长度分别为316.1 mm和321.1 mm，通过鲍威尔棱镜整形后在距离鲍威尔棱镜150 mm处光束宽度为19.433 mm，均匀性为96.93%，满足线激光视觉传感器光源窄宽度、高均匀性要求。
- 激光焊接 /
- 焊缝检测 /
- 视觉传感器 /
- 半导体激光器 /
- 衍射光学元件
Abstract:
In response to the significant challenges posed by the width and uniformity of illumination from visual sensors during the inspection of sharp corner welds, high-speed welding, and the welding of highly reflective materials in the laser welding process, the influence of line laser width on inspection accuracy was analyzed in this paper. To meet the requirements of narrow width and high uniformity, a line laser shaping design based on a Diffractive Optical Element (DOE) and a Powell prism was proposed. The light generated by a semiconductor laser with a wavelength of 405 nm was shaped into an ideal Gaussian beam using a DOE after beam expansion and collimation, and subsequently shaped into a line laser using a Powell prism. A model was constructed to simulate the aforementioned process, and corresponding experiments were designed to verify the relationship between line laser width and inspection accuracy. The results showed that after passing through the DOE, the M ² factors of the Gaussian beam in the x-direction and y-direction were 1.040 and 1.038, respectively, with Rayleigh lengths of 316.1 mm and 321.1 mm. After shaping by the Powell prism, the beam width at a distance of 150 mm from the prism was 19.433 mm, with a uniformity of 96.93%, satisfying the requirements of narrow width and high uniformity for the illumination source in line laser vision sensors.
- laser welding /
- weld seam inspection /
- visual sensor /
- semiconductor laser /
- diffractive optical element
注释:

1) †These authors contributed equally to this work.

HTML全文

图 1 激光焊接机器人系统

Figure 1. Basic structure of laser welding robot system

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图 2 激光视觉传感器结构及测量原理

Figure 2. Structure and measurement principle of laser vision sensor

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图 3 不同线激光入射角度对瑞利长度的要求

Figure 3. 图3 The effect of different incident angles of line laser on the beam quality of line laser

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图 4 线激光宽度对传感器图像质量的影响

Figure 4. The influence of line laser width on sensors

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图 5 光线在鲍威尔棱镜内部的光路

Figure 5. The light path inside the Powell prism

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图 6 输入光场的复振幅分布

Figure 6. Complex amplitude distribution of the input light field

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图 7 DOE面及目标平面光场相位分布

Figure 7. Phase distribution of DOE surface and target plane light field

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图 8 DOE整形光束强度分布

Figure 8. Output beam intensity distribution

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图 9 光束宽度传播曲线

Figure 9. Beam width propagation curve

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图 10 整形过程中光斑强度分布变化

Figure 10. Changes in the intensity distribution of the light spot during the shaping process

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图 11 线激光x方向截面强度分布

Figure 11. Intensity distribution of the line laser in the x-direction cross-section

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图 12 线激光宽度及块规尺寸测试

Figure 12. Line laser width and gauge block size testing

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图 13 线激光束腰半径及块规宽度测量

Figure 13. Measurement of line laser beam waist radius and gauge block width

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图 14 线光斑在不同束腰位置处测量块规尺寸误差

Figure 14. Measurement of block gauge size error of line spot at different waist positions

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表 1 光束在x方向上和y方向上的光束参数

Table 1. Beam parameters in the x and y directions.

w₀/ mm θ/mrad z_R/ mm M²

x方向 0.202 0.637 316.1 0.99637
y方向 0.203 0.632 322.1 0.99671

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