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摘要:
针对高温环境下振动监测面临的传感器失效与信号失真问题，本文提出了一种全石英光纤法布里-珀罗高温振动传感器。设计了基于石英球透镜的准直耦合结构，实现了光纤与高温区振动敏感结构的一体化集成。利用微机电系统(MEMS)加工技术与热压键合技术实现传感器敏感单元批量化制备。采用三波长动态解调与光谱互相关解调相结合的方法，实现了对高温环境下振动信号的提取和温度补偿，消除了温度波动对振动灵敏度的干扰。实验结果表明，从室温（23 °C）至800 °C，传感器的灵敏度由1.051 nm/g降低到
0.8915 nm/g；经温度补偿后，传感器的残差平方和最大为0.168，全量程非线性误差不大于1.033%；在动态响应测试中，该传感器的特征频率远高于6000 Hz，在100~2000 Hz的频率响应范围内表现出较高的平坦度，其灵敏度在2000 ~6000 Hz之间逐渐增加，最大增量仅为0.177 nm/g。此外，传感器具有高一致性、全无胶化集成、抗电磁干扰等优点，为高温环境下的振动测量提供了一种新的解决思路，在高温振动领域具有广泛的应用前景。Abstract:An all-silica fiber-optic Fabry-Perot (F-P) high-temperature vibration sensor is proposed to address sensor failure and signal distortion in extreme environments. A collimated coupling structure based on a silica ball lens enables integrated, non-contact signal transmission between the fiber and the sensitive structure. The sensitive units are batch-fabricated using MEMS and thermal pressure bonding technologies. By combining three-wavelength dynamic demodulation with spectral cross-correlation, the extraction of vibration signal and temperature compensation are realized, eliminating the interference of temperature fluctuations on vibration sensitily. Experimental results indicate that as the temperature increases from room temperature (23 °C) to 800 °C, the sensitivity of the sensor decreases from 1.051 nm/g to
0.8915 nm/g. After temperature compensation, the maximum residual sum of squares (RSS) of the sensor is 0.168, and the full-scale nonlinearity error does not exceed 1.033%. In dynamic response tests, the characteristic frequency of the sensor is considerably higher than6000 Hz. The sensor exhibits high flatness within the frequency response range of 100−2000 Hz, and its sensitivity gradually increases between 2000 Hz and6000 Hz, with a maximum increment of only 0.177 nm/g. Featuring high consistency, adhesive-free integration, and electromagnetic immunity, this sensor provides a robust solution for vibration measurement in high-temperature environments.-
Key words:
- fiber optic sensor /
- fabry-perot /
- MEMS /
- vibration /
- high-temperature
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图 1 (a)振动传感器的结构示意图；(b)“梁-质量块”的结构模型图；(c)双FP腔的干涉模型
Figure 1. (a) Schematic diagram of the vibration sensor; (b) “structural model of beam-mass block”; (c) interference model of the dual FP cavities
图 2 (a)干法刻蚀制备振动法珀腔；(b)飞秒激光粗糙化处理及芯片直接键合流程；(c)传感器芯片制备及实物图
Figure 2. (a) Fabrication of vibrating FP cavity by dry etching; (b) process of femtosecond laser roughening and direct chip bonding; (c) preparation of sensor chip and its physical image
图 4 (a) 23 °C下的时域响应；(b) 800 °C下的时域响应；(c) 23 °C下的频率响应；(d) 800 °C下的频率响应
Figure 4. (a) Time-domain response at 23 °C; (b) time-domain response at 800 °C; (c) frequency response at 23 °C; (d) frequency response at 800 °C
图 7 振动腔初始腔长和温度腔腔长随温度变化曲线
Figure 7. Variation of initial vibration-cavity length and temperature-cavity length with temperature
图 8 振动腔初始腔长和温度腔腔长拟合残差分析图
Figure 8. Fitting residual analysis diagram of vibration initial cavity length and cavity temperature chamber cavity length
图 9 温度补偿后加速度的测量值与实际值的线性拟合
Figure 9. Linear fit of measured- and actual-acceleration after temperature compensation
表 1 敏感单元的结构参数
Table 1. Structural parameters of the sensitive unit
Parameters Symbol Value Length of the beam $ {l}_{1} $ 0.9 mm Width of the beam $ {l}_{2} $ 3.3 mm Width of the beam $ b $ 0.3 mm Thickness of the beam $ h $ 0.3 mm Density of $ {\mathrm{SiO}}_{2} $ $ \rho $ 2 650 kg·m−3 Young's modulus of $ {\mathrm{SiO}}_{2} $ $ E $ 73.1 GPa Sensitivity $ S $ 1.374 nm/g Frequence $ f $ 16100 Hz
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表 2 不同的高温F-P振动传感器的特性
Table 2. Characteristics of several high-temperature F-P vibration sensors
Signal transmission method
(in high-temperature area)Packaging
methodThe highest working
temperature ( °C)Sensitivity [13] Reflector and sphere lens Mechanical coupling 500 7.69 nm/g [15] Sapphire optical fiber Heat-resistant inorganic adhesives 1200 17.86 mV/g [17] Quartz optical fiber Ceramic glue 1000 0.0073 rad/g[20] Gold-plated FBG Laser welding 800 0.0093 rad/gthis work Gold-plated optical fiber and Silicon ball lens Mechanical coupling 800 1.051 nm/g
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