浸没式光刻投影物镜光学薄膜

毕丹丹; 张立超; 时光

doi:10.3788/CO.20181105.0745

Volume 11 Issue 5

Oct. 2018

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Chinese Optics > 2018 > 11(5): 745-764.

BI Dan-dan, ZHANG Li-chao, SHI Guang. Optical coatings for projection objective immersion lithography[J]. Chinese Optics, 2018, 11(5): 745-764. doi: 10.3788/CO.20181105.0745

Citation:

BI Dan-dan, ZHANG Li-chao, SHI Guang. Optical coatings for projection objective immersion lithography[J]. Chinese Optics, 2018, 11(5): 745-764. doi: 10.3788/CO.20181105.0745

BI Dan-dan, ZHANG Li-chao, SHI Guang. Optical coatings for projection objective immersion lithography[J]. Chinese Optics, 2018, 11(5): 745-764. doi: 10.3788/CO.20181105.0745

Citation:

BI Dan-dan, ZHANG Li-chao, SHI Guang. Optical coatings for projection objective immersion lithography[J]. Chinese Optics, 2018, 11(5): 745-764. doi: 10.3788/CO.20181105.0745

PDF( 3290 KB)

Optical coatings for projection objective immersion lithography

doi: 10.3788/CO.20181105.0745

BI Dan-dan^{1, 2
,},
ZHANG Li-chao^{1, 3
,
,},
SHI Guang^{1, 3
,}

1.
Engineering Research Center of Extreme Precision Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130039, China
2.
University of Chinese Academic of Sciences, Beijing 100049, China
3.
Changchun National Extreme Precision Optics Co. Ltd., Changchun 130039, China

Funds:

the National Science and Technology Major Project of the Ministry of Science and Technology of China 2009ZX02205

More Information

Author Bio:
BI Dan-dan(1992—), female, born in the city of Jilin, Jilin Province, who is a master-degree student studying at Changchun Institute of Optics, Fine Mechanics and Physics under Chinese Academy of Sciences and is mainly engaged in the optical coating technology research. E-mail:bidandan15@mails.ucas.ac.cn

ZHANG Li-chao(1979—), male, born in the city of Jilin, Jilin Province, who is a doctor-degree researcher with bachelor and master degrees from Jilin University obtained respectively in 2000 and 2003 as well as the doctor degree from Changchun Institute of Optics, Fine Mechanics and Physics under Chinese Academy of Sciences and is mainly engaged in the optical coating technology research. E-mail: zhanglic@klao.ac.cn

SHI Guang(1985—), female, born in the city of Jixi, Heilongjiang Province, who is an assistant researcher with bachelor and master degrees from University of Electronic Science and Technology of China obtained respectively in 2008 and 2011 and is mainly engaged in the deep ultraviolet optical coating research. E-mail:nrconnie@163.com
Corresponding author: ZHANG Li-chao, E-mail:zhanglc@sklao.ac.cn
Received Date: 20 Oct 2017
Rev Recd Date: 15 Dec 2017
Publish Date: 01 Oct 2018

Abstract

Abstract

The deep ultraviolet lithography is currently a main method for integrated circuit manufacture. The immersive projection objective must be used to increase resolution of the optical system for realization of smaller component feature dimensions. Therefore a number of rigorous requirements for optical coating component are put forward. In this paper we present designs of the film material and film system applicable to immersive lithographical system as well as the large angle polarization-maintaining film system required for optical systems at high NA. Key issues about immersion environment adaptability, hydrophobicity and anti-contamination of the immersion coating most critical to the objective are discussed. Laser irradiation lifetime of the coated components especially in the immersion environment that is an important factor to evaluate performance of the immersive lithographical system is analyzed.
- immersion lithography,
- optical coatings,
- coating system design,
- environmental adaptability,
- lifetime under laser irradiation

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References(51)

References

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Optical coatings for projection objective immersion lithography

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