Volume 14 Issue 6
Nov.  2021
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YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J]. Chinese Optics, 2021, 14(6): 1362-1367. doi: 10.37188/CO.2021-0103
Citation: YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J]. Chinese Optics, 2021, 14(6): 1362-1367. doi: 10.37188/CO.2021-0103

Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability

doi: 10.37188/CO.2021-0103
Funds:  Supported by National Key R&D Program of China (No. 2016YFA0401004)
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  • Corresponding author: gbzhang@ustc.edu.cn
  • Received Date: 2021-05-10
  • Rev Recd Date: 2021-05-26
  • Available Online: 2021-07-02
  • Publish Date: 2021-11-19
  • Ultra-high quality optical elements are demanded by beamlimes on fourth-generation synchrotron facilities and free-electron laser facilities. A bimorph mirror is effectively used to achieve ultra-high-precision surface profile control and wavefront correction, yet it’s one of the bottlenecks of domestic techniques and must be overcome. In order to accomplish this, a 200 mm long bimorph mirror with 36 elements of piezoelectric actuators was developed. The structure parameters of the bimorph mirror were optimized by numerical simulation, and the bimorph mirror was fabricated by domestic technology. The test results show that the surface profile error and slope error of the bimorph mirror can be reduced to 1.38 nm (rms) and 240 nrad (rms), thus the nanoscale control of the mirror surface profile was realized.
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