Volume 14 Issue 6
Nov.  2021
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WU Yue, WANG Li-ping, YU Jie, ZHANG Xu, JIN Chun-shui. Design of off-axis multi-reflective optical system based on particle swarm optimization[J]. Chinese Optics, 2021, 14(6): 1435-1450. doi: 10.37188/CO.2021-0087
Citation: WU Yue, WANG Li-ping, YU Jie, ZHANG Xu, JIN Chun-shui. Design of off-axis multi-reflective optical system based on particle swarm optimization[J]. Chinese Optics, 2021, 14(6): 1435-1450. doi: 10.37188/CO.2021-0087

Design of off-axis multi-reflective optical system based on particle swarm optimization

doi: 10.37188/CO.2021-0087
Funds:  Supported by National Science and Technology Major Project (No. 2018ZX02102002)
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  • Author Bio:

    WU Yue (1993—), male, born in Huanggang, Hubei Province, Ph.D. student. He received his bachelor's degree from Northeast Normal University in 2015. He is mainly engaged in the research of optical design. E-mail: wy2398236580@163.com

    WANG Li-ping (1981—), female, born in Changchun, Jilin Province. She is a Ph.D., researcher. She received her doctor's degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2009. She is mainly engaged in the research on optics technology of EUV. She has published 17 articles and 26 authorized patents. E-mail: wlp8121@126.com

    JIN Chun-shui (1964—), male, born in Changchun, Jilin, Ph.D., researcher, doctoral supervisor. He received his Ph.D. degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2003. He is mainly engaged in the research on UV-EUV imaging optics, UV-EUV optical thin film technology and ultra-high-precision optical metrology. E-mail: jincs@sklao.ac.cn

  • Corresponding author: wlp8121@126.comjincs@sklao.ac.cn
  • Received Date: 22 Apr 2021
  • Rev Recd Date: 06 May 2021
  • Available Online: 22 Jun 2021
  • Publish Date: 19 Nov 2021
  • An initial construction satisfying aberration balance and multi-constraint control is essential for the design of an off-axis multi-reflective optical system with minimal aberration. In this paper, a mathematical model for calculating the initial structure of off-axis multi-reflective is established based on the grouping design method combining spatial ray tracing and aberration correction, and an improved Particle Swarm Optimization (PSO) is proposed to solve the initial structure problem of an off-axis multi-reflective optical system. The PSO of natural selection with shrinkage factor is applied to improve calculation accuracy and design efficiency, so as to obtain the initial structure of the off-axis multi-reflection optical system. In the last part of this paper, taking an Extreme UltraViolet (EUV) lithography projection objective with six-mirror reflective aspheric mirrors as an example, the reliability and effectiveness of this method are verified. A 0.33 numerical aperture EUV lithographic objective with wave-front error better than 1/80λ (λ=13.5 nm) RMS is achieved.

     

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