Volume 14 Issue 6
Nov.  2021
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WANG Yi-meng, SHU Hao-wen, HAN Xiu-you. High-precision silicon-based integrated optical temperature sensor[J]. Chinese Optics, 2021, 14(6): 1355-1361. doi: 10.37188/CO.2021-0054
Citation: WANG Yi-meng, SHU Hao-wen, HAN Xiu-you. High-precision silicon-based integrated optical temperature sensor[J]. Chinese Optics, 2021, 14(6): 1355-1361. doi: 10.37188/CO.2021-0054

High-precision silicon-based integrated optical temperature sensor

doi: 10.37188/CO.2021-0054
Funds:  Supported by National Natural Science Foundation of China (No. 62075026, No. 61875028); China National Postdoctoral Program for Innovative Talents (No. BX20200017); National College Student Innovation Training Project of China (No. 2020101412100010090)
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  • Traditional temperature detection has certain limitations in terms of sensing accuracy and response time. Chip-level photoelectric sensors based on the thermo-optic effect recently aroused widespread interest not only because they can improve measurement sensitivity and speed, but also because they can help reduce system complexity and cost. State-of-art integrated optical temperature sensors mostly measure the optical interference of broadband light sources or tunable light sources in the micro-resonators to provide accurate and fast measurement solutions. However, these solutions based on wide-spectrum detection cannot achieve real-time processing, are costly with complicated signal post-processing, and are difficult to implement in highly integrated systems. To solve the above problems, we show a fast and high-precision temperature measurement method using a silicon-based integrated micro-ring array. The different responses of the cascaded micro-ring array are measured by a single-frequency laser at different temperatures. The results are utilized to model the relationship between the electrical response of the detector array and the real temperature, thereby realizing real-time high-precision temperature measurement. In addition, to enlarge the temperature detection range under a fixed-wavelength light source, a cascaded micro-ring structure is adopted. Based on the proposed structure, a silicon-based integrated temperature sensing system including a light source, a micro-ring array, a detector array, a signal post-processing unit and an output data unit is designed. Depending on the requirement of actual applications, the system can change the temperature measurement range and resolution by separately designing the number of cascaded micro-rings, the center resonance wavelength, and the half-width of the resonance peak while ensuring low system power consumption and cost. Through the optimized design of the micro-ring array, a temperature sensor with a response range covering −20~105°C, accuracy better than 60 mK, and a response time as quick as 20 μs is demonstrated.
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  • [1]
    XU H T, HAFEZI M, FAN J, et al. Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures[J]. Optics Express, 2014, 22(3): 3098-3104. doi: 10.1364/OE.22.003098
    KLIMOV N N, MITTAL S, BERGER M, et al. On-chip silicon waveguide Bragg grating photonic temperature sensor[J]. Optics Letters, 2015, 40(17): 3934-3936. doi: 10.1364/OL.40.003934
    ZHANG H, SHANG J Y, LIU X J, et al. High-sensitivity fiber liquid crystals temperature sensor with tiny size and simple tapered structure[J]. Chinese Optics Letters, 2020, 18(10): 101202. doi: 10.3788/COL202018.101202
    RAO Y J, WEBB D J, JACKSON D A, et al. In-fiber Bragg-grating temperature sensor system for medical applications[J]. Journal of Lightwave Technology, 1997, 15(5): 779-785. doi: 10.1109/50.580812
    IRACE A, BREGLIO G. All-silicon optical temperature sensor based on Multi-Mode Interference[J]. Optics Express, 2003, 11(22): 2807-2812. doi: 10.1364/OE.11.002807
    史振江, 李志全, 陆飞. 硅基波导微环谐振腔光学传输特性研究[J]. 传感器世界,2020,26(8):7-11. doi: 10.3969/j.issn.1006-883X.2020.08.001

    SHI ZH J, LI ZH Q, LU F. Research on optical transmission characteristics of microring resonator with silicon waveguide[J]. Sensor World, 2020, 26(8): 7-11. (in Chinese) doi: 10.3969/j.issn.1006-883X.2020.08.001
    QU ZH Y, LU P, LI Y J, et al. Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane[J]. Chinese Optics Letters, 2020, 18(10): 101201. doi: 10.3788/COL202018.101201
    吴妮珊, 夏历. 基于微波光子学的准分布式光纤传感解调技术[J]. 中国光学,2021,14(2):245-263. doi: 10.37188/CO.2020-0121

    WU N SH, XIA L. Interrogation technology for quasi-distributed optical fiber sensing systems based on microwave photonics[J]. Chinese Optics, 2021, 14(2): 245-263. (in Chinese) doi: 10.37188/CO.2020-0121
    GUAN X W, WANG X Y, FRANDSEN L H. Silicon photonic thermometer operating on multiple polarizations[C]. Conference on Lasers and Electro-Optics, Optical Society of America, 2016: JW2A. 131.
    KLIMOV N N, PURDY T, AHMED Z. Chip-packaged silicon photonic nanoscale thermometers[C]. Conference on Lasers and Electro-Optics, Optical Society of America, 2016: AW1J. 6.
    KLIMOV N, PURDY T, AHMED Z. Towards replacing resistance thermometry with photonic thermometry[J]. Sensors and Actuators A:Physical, 2018, 269: 308-312. doi: 10.1016/j.sna.2017.11.055
    KLIMOV N N, PURDY T, AHMED Z. On-chip integrated silicon photonic thermometers[J]. Sensors &Transducers, 2015, 191(8): 67-71.
    BOGAERTS W, DE HEYN P, VAN VAERENBERGH T, et al. Silicon microring resonators[J]. Laser &Photonics Reviews, 2012, 6(1): 47-73.
    AHMED Z, FILLA J, GUTHRIE W, et al. Fiber Bragg grating based thermometry[J]. NCSLI Measure, 2015, 10(4): 28-31. doi: 10.1080/19315775.2015.11721744
    LEUTHOLD J, KOOS C, FREUDE W, et al. Silicon-organic hybrid electro-optical devices[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2013, 19(6): 3401413.
    张家一, 罗莉君, 刘晓红, 等. 电化学发光传感器在农业传感领域中的研究进展[J]. 应用化学,2019,34(6):379-391.

    ZHANG J Y, LUO L J, LIU X H, et al. Research progress of electrochemistry sensors in the field of agricultural sensing[J]. Chinese Journal of Applied Chemistry, 2019, 34(6): 379-391. (in Chinese)
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