CCD非线性效应对双频光栅三维面形测量的影响

乔闹生; 孙萍

doi:10.37188/CO.2020-0143

Volume 14 Issue 3

May 2021

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Chinese Optics > 2021 > 14(3): 661-669.

QIAO Nao-sheng, SUN Ping. Influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating[J]. Chinese Optics, 2021, 14(3): 661-669. doi: 10.37188/CO.2020-0143

Citation:

QIAO Nao-sheng, SUN Ping. Influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating[J]. Chinese Optics, 2021, 14(3): 661-669. doi: 10.37188/CO.2020-0143

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Influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating

doi: 10.37188/CO.2020-0143

QIAO Nao-sheng^{1, 2, 3
,},
SUN Ping^{4, 5
,
,}

1.
International College, Hunan University of Arts and Science, Changde 415000, China
2.
Hunan Province Cooperative Innovation Center for The Construction & Development of Dongting Lake Ecological Economic Zone, Changde 415000, China
3.
Mathematics and Physics Science College, Hunan University of Arts and Science, Changde 415000, China
4.
College of Optoelectronic Engineering, Chengdu University of Information Technology, Chengdu 610225, China
5.
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

Funds: Supported by National Natural Science Foundation of China (No. 61701050, No. 61703157, No. 61701050), Open Foundation of State Key Laboratory of Electronic Thin Films and Integrated Devices (No. KFJJ201807), Project of Sichuan Provincial Department of Education (No. 2018Z073)

More Information

Corresponding author: sunping19775525@163.com
Received Date: 17 Aug 2020
Rev Recd Date: 21 Sep 2020

Available Online: 30 Apr 2021

Publish Date: 14 May 2021

Abstract

Abstract

The CCD nonlinearity effect in the measurement system will affect the measurement accuracy of complex optical three-dimensional surface. Therefore, a method to eliminate the CCD nonlinearity effect by using dual frequency grating projection is proposed, which can improve the measurement accuracy. Firstly, the influence of CCD nonlinearity effect on three-dimensional shape measurement is analyzed. The analytical derivation and physical explanation of spectrum aliasing are given. Then, the measurement principle of dual frequency grating under the CCD nonlinearity effect is discussed. The light intensity distribution of deformed fringe and the principle of obtaining aliasing spectrum by Fourier transform are analyzed. Finally, the method to judge the measurement accuracy by the equivalent wavelength is given. The basic formula of measuring the height information of three-dimensional surface by using dual frequency grating projection is derived, and the theoretical analysis is carried out. The object is simulated as the maximum absolute value and average absolute value are 24.3181 mm and 1.0839 mm, respectively. The maximum absolute height error and average absolute height error between the measured value and the actual value are 0.8950 mm and 0.0622 mm, respectively. After increasing the fundamental frequency of the dual frequency grating, the corresponding values are reduced to 0.3710 mm and 0.0232 mm, respectively. When the fundamental frequency of the dual frequency grating is increased by 2.5 times, the separation between the fundamental frequency and the advanced spectrum becomes better, and the measurement accuracy is improved. Therefore, using dual frequency grating projection to eliminate CCD nonlinearity effect has strong practicability and is highly advisable.
- three-dimensional shape measurement,
- dual frequency grating,
- CCD nonlinearity effect,
- spectrum aliasing,
- measurement accuracy

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References(19)

References

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