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双点干涉法位相缺陷检测中的解相算法比较

戚子文 刘炳国 张仲海 卢丙辉 刘国栋

戚子文, 刘炳国, 张仲海, 卢丙辉, 刘国栋. 双点干涉法位相缺陷检测中的解相算法比较[J]. 中国光学, 2016, 9(4): 483-490. doi: 10.3788/CO.20160904.0483
引用本文: 戚子文, 刘炳国, 张仲海, 卢丙辉, 刘国栋. 双点干涉法位相缺陷检测中的解相算法比较[J]. 中国光学, 2016, 9(4): 483-490. doi: 10.3788/CO.20160904.0483
QI Zi-wen, LIU Bing-guo, ZHANG Zhong-hai, LU Bing-hui, LIU Guo-dong. Comparison of phase extraction algorithms in testing of phase defects with two-point interference[J]. Chinese Optics, 2016, 9(4): 483-490. doi: 10.3788/CO.20160904.0483
Citation: QI Zi-wen, LIU Bing-guo, ZHANG Zhong-hai, LU Bing-hui, LIU Guo-dong. Comparison of phase extraction algorithms in testing of phase defects with two-point interference[J]. Chinese Optics, 2016, 9(4): 483-490. doi: 10.3788/CO.20160904.0483

双点干涉法位相缺陷检测中的解相算法比较

doi: 10.3788/CO.20160904.0483
基金项目: 

国家自然科学基金资助项目 No. 61275096

详细信息
    作者简介:

    戚子文(1992-),男,江苏扬州人,硕士研究生,主要从事干涉测量和算法类方面的研究。E-mail:13613612496@163.com

    通讯作者:

    刘国栋(1974-),男,辽宁大连人,博士,博士生导师,主要从事光电检测技术方面的研究。E-mail:lgd@hit.edu.cn

  • 中图分类号: TH744.3

Comparison of phase extraction algorithms in testing of phase defects with two-point interference

Funds: 

National Natural Science Foundation of China No. 61275096

More Information
  • 摘要: 双点光源移相干涉测量是大口径光学元件位相缺陷检测的一种重要方法。为了分析双点干涉中误差对解相算法的影响,首先给出相位缺陷检测的系统结构和理论模型,在此基础上,针对测量过程中主要存在的一次移相误差、二次移相误差、光强误差和随机振动误差,研究了Hariharan 5帧移相算法、13帧移相算法和迭代随机移相算法的解相误差,并进行了仿真分析。结果表明,针对这几种误差源,13帧算法解相精度整体优于5帧法,迭代随机移相算法解相效果优于13帧法和5帧法,当这几种误差按实际指标同时作用时,迭代随机移相算法解相误差RMS小于5帧法和13帧法,PV值稳定在0.5 nm以内。由于随机振动占主要作用,说明迭代随机移相算法受误差影响很小。
  • 图  1  系统原理

    Figure  1.  Principle sketch of the system

    图  2  AIA算法流程图

    Figure  2.  Flow chart of AIA

    图  3  相位分布

    Figure  3.  Phase distribution

    图  4  干涉图

    Figure  4.  Interference pattern

    图  5  一次误差引起的解相误差

    Figure  5.  Phase error due to linear phase shift

    图  6  二次误差引起的解相误差

    Figure  6.  Phase error due to nonlinear phase shift

    图  7  光强误差引起的解相误差

    Figure  7.  Phase error due to light intensity phase shift

    表  1  不同振幅下解相结果

    Table  1.   Phase errors due to vibration with different amplitude

    Amplitude of vibration/nm5-frame13-frameAIA
    00.48/2.200.11/0.310.077 8/0.267 1
    101.37/2.550.97/0.600.246 7/0.233 4
    303.36/2.263.09/1.400.232 6/0.371 3
    505.90/3.385.66/2.390.700 6/0.522 8
    709.41/6.348.97/3.443.048 1/0.403 0
    下载: 导出CSV
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出版历程
  • 收稿日期:  2016-03-11
  • 修回日期:  2016-04-15
  • 刊出日期:  2016-08-01

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