[1] 李英海, 巴音贺希格, 齐向东, 等. 用于衍射光栅刻划的超精密金刚石刻刀的研制[J]. 微细加工技术, 2006, 12:15-17. LI Y H, BAYANHESHIG, QI X D, et al.. The manufacture of ultra-precision diamond tool used the diffraction grating ruling[J]. Microfabrication Technology Processes, 2006, 12:15-17.(in Chinese)
[2] PALMER E W, HUTLEY M C, FRANKS A, et al.. Diffraction gratings[J]. Rep. Prog. Phys., 1975, 38:975-1048.
[3] DAVIES D A, STIFF G M. Diffraction grating ruling in australia[J]. A.Pplied Optics, 1969, 8(7):1379-1384.
[4] 宗文俊. 高精度金刚石刀具的机械刃磨技术及其切削性能优化研究[D].哈尔滨:哈尔滨工业大学, 2008. ZONG W J. Mechanical lapping techniques and cutting performance optimization of high-accuracy diamond cutting tools[D]. Harbin:Harbin Institute of Technology, 2008.(in Chinese)
[5] VERRILL J F. The effects of diamond wear on the production and properties of ruled diffraction gratings[J]. J. Phys. E: Sci. Instrum., 1982, 15(5):16.
[6] 祝绍箕, 邹海兴, 包学诚, 等.衍射光栅[M]. 北京:机械工业出版社, 1986. ZHU SH J, ZOU H X, BAO X CH, et al.. Diffraction Gratings[M]. Beijing:Machinery Industry Press, 1986.(in Chinese)
[7] 蔡锦达, 王英, 颜廷萌, 等. 衍射光栅刻划机的闭环控制系统[J]. 光学 精密工程, 2012, 20(11):2416-2423. CAI J D, WANG Y, YAN T M, et al.. Closed-loop control system for diffraction grating ruling machine[J]. Opt. Precision Eng., 2012, 20(11):2416-2423.(in Chinese)
[8] 韩建, 巴音贺希格, 李文昊, 等. 全息光栅制作中光栅掩模槽形形状随光刻胶特性曲线的演化规律[J]. 光学 精密工程, 2012, 20(11):2380-2388. HAN J, BAYANHESHIG, LI W H, et al.. Groove profile evolution of grating masks for different photoresist response curves in fabrication of holographic gratings[J]. Opt. Precision Eng., 2012, 20(11):2380-2388.(in Chinese)
[9] DEFORMTM 3D Version 10.1Use's Manual.[2007-8-18].[EB/OL].https://www.cs.purdue.edu/spgist/spgist4postgresql.pdf.
[10] 张宝庆, 史国权, 石广丰, 等. 衍射光栅机械刻划成槽的预控试验[J]. 光学 精密工程, 2013, 21(7):1666-1675. ZHANG B Q, SHI G Q, SHI G F, et al.. Pre-control of mechanical scratching diffractive grating[J]. Opt. Precision Eng., 2013, 21(7):1666-1675.(in Chinese)
|