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同步辐射用36单元压电变形镜研制及其面形调控研究

袁德波 许亮 张文斌 周志勇 董晓浩 刘正坤 张国斌

袁德波, 许亮, 张文斌, 周志勇, 董晓浩, 刘正坤, 张国斌. 同步辐射用36单元压电变形镜研制及其面形调控研究[J]. 中国光学, 2021, 14(6): 1362-1367. doi: 10.37188/CO.2021-0103
引用本文: 袁德波, 许亮, 张文斌, 周志勇, 董晓浩, 刘正坤, 张国斌. 同步辐射用36单元压电变形镜研制及其面形调控研究[J]. 中国光学, 2021, 14(6): 1362-1367. doi: 10.37188/CO.2021-0103
YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J]. Chinese Optics, 2021, 14(6): 1362-1367. doi: 10.37188/CO.2021-0103
Citation: YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J]. Chinese Optics, 2021, 14(6): 1362-1367. doi: 10.37188/CO.2021-0103

同步辐射用36单元压电变形镜研制及其面形调控研究

doi: 10.37188/CO.2021-0103
基金项目: 国家重点研发计划(No. 2016YFA0401004)
详细信息
    作者简介:

    袁德波(1996—),男,安徽六安人,中国科学技术大学国家同步辐射实验室硕士研究生,2019年于南京理工大学获得学士学位,主要从事压电变形镜方面的研究。E-mail:yuandebo@mail.ustc.edu.cn

    张国斌(1967—),男,江苏常熟人,博士,研究员,博士生导师,1990年、2001年于中国科学技术大学分别获得学士、博士学位,主要从事氧化物量子功能材料制备与物性、同步辐射光学工程、X射线自适应光学的研究。E-mail:gbzhang@ustc.edu.cn

  • 中图分类号: TN384; O434

Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability

Funds: Supported by National Key R&D Program of China (No. 2016YFA0401004)
More Information
  • 摘要: 第4代同步辐射光源及自由电子激光装置中束线光学系统对光学元件性能提出了苛刻的要求。使用压电变形镜是实现超高面形精度调控和实施波前补偿的有效途径,也是目前亟需突破的国产化技术瓶颈。针对这一问题,研制了长度为200 mm、含36个单元压电促动器的压电变形镜。通过数值模拟优化了变形镜结构参数,利用国产工艺完成了变形镜样机的制作,并对其面形调控能力进行初步探究。测试结果表明:所研制变形镜样机的平面面形误差可降低至1.38 nm (rms),斜率误差降低至240 nrad (rms),实现了平面面形的nm级调控。
  • 图  1  双压电片变形镜示意图

    Figure  1.  Schematic diagram of bimorph mirror

    图  2  PZT促动能力(红)、PZT表面弯曲对反射镜面形造成的影响(黑)与PZT厚度关系

    Figure  2.  Relationship between the thickness of PZT and the actuation capacity of PZT (red) as well as that between the thickness of PZT and the influence of PZT’s bend on mirror surface (black)

    图  3  装配后的压电片变形镜

    Figure  3.  Assembled bimorph mirror

    图  4  100 V电压下的响应曲线

    Figure  4.  Response curve under 100 V voltage

    图  5  反射镜封装与校正前后面形

    Figure  5.  Mirror surfaces at different stages

    图  6  斜率误差曲线

    Figure  6.  Slope error curve

    表  1  变形镜材料参数

    Table  1.   Material parameters of bimorph mirror

    材料尺寸/mm3密度/(kg·m−3 泊松比 杨氏模量/MPa
    Si200×55×1023290.28170000
    PZT200×17.5×d75000.3463000
    下载: 导出CSV

    表  2  变形镜重复性

    Table  2.   Repeatability of bimorph mirror

    时间/天01234
    PV/nm3.753.923.444.033.68
    rms/nm1.381.531.211.651.51
    下载: 导出CSV
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出版历程
  • 收稿日期:  2021-05-10
  • 修回日期:  2021-05-26
  • 网络出版日期:  2021-07-02
  • 刊出日期:  2021-11-19

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