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4通道交叉型二氧化硅光波导延迟线阵列的设计与制备

李浩 宋玲玲 张立钧 王焕然 李亮 王菲 衣云骥 张大明

李浩, 宋玲玲, 张立钧, 王焕然, 李亮, 王菲, 衣云骥, 张大明. 4通道交叉型二氧化硅光波导延迟线阵列的设计与制备[J]. 中国光学(中英文), 2014, 7(3): 435-441. doi: 10.3788/CO.20140703.0435
引用本文: 李浩, 宋玲玲, 张立钧, 王焕然, 李亮, 王菲, 衣云骥, 张大明. 4通道交叉型二氧化硅光波导延迟线阵列的设计与制备[J]. 中国光学(中英文), 2014, 7(3): 435-441. doi: 10.3788/CO.20140703.0435
LI Hao, SONG Ling-ling, ZHANG Li-jun, WANG Huan-ran, LI Liang, WANG Fei, YI Yun-ji, ZHANG Da-ming. Design and fabrication of 4 channels silica cross optical waveguide delay line array[J]. Chinese Optics, 2014, 7(3): 435-441. doi: 10.3788/CO.20140703.0435
Citation: LI Hao, SONG Ling-ling, ZHANG Li-jun, WANG Huan-ran, LI Liang, WANG Fei, YI Yun-ji, ZHANG Da-ming. Design and fabrication of 4 channels silica cross optical waveguide delay line array[J]. Chinese Optics, 2014, 7(3): 435-441. doi: 10.3788/CO.20140703.0435

4通道交叉型二氧化硅光波导延迟线阵列的设计与制备

doi: 10.3788/CO.20140703.0435
基金项目: 

国家自然科学基金资助项目(No.61177027,No.61077041,No.61261130586);吉林省科技发展计划资助项目(No.20110315);吉林省青年科研基金资助项目(No.20100174);吉林大学科研启动基金资助项目(No.450060491403);吉林大学创新训练资助项目(No.2013C51103)

详细信息
    作者简介:

    李浩(1981- ),男,吉林四平人,硕士研究生,主要从事高速光电子和平面光波导器件方面的研究。E-mail:25414758@qq.com

    通讯作者:

    衣云骥

  • 中图分类号: TN252

Design and fabrication of 4 channels silica cross optical waveguide delay line array

  • 摘要: 设计并制备了一种高集成度、低成本、低损耗4通道交叉型二氧化硅光波导延迟线阵列。利用BPM软件对交叉结构光波导延迟线的Y分支的损耗、弯曲损耗进行数值模拟。综合考虑器件尺寸和损耗参数,设计交叉型延迟线结构的弯曲半径最小为1 500 m,引入优化的锥口Y分支结构和垂直相交波导结构。采用标准半导体制作工艺制备器件,测试得到了器件的红外输出光斑,延迟线延迟时间分别为0、113、226和339 ps。4通道二氧化硅延迟线阵列能实现相邻通道相等的延迟时间间隔,且可通过集成实现延迟时间的增加,同时输出端可以与光纤阵列集成。

     

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出版历程
  • 收稿日期:  2014-01-21
  • 修回日期:  2014-03-23
  • 刊出日期:  2014-05-25

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