Research progress on high-power, high-beam-quality short-pulse/ultrashort-pulse solid-state green laser technology
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摘要:
高功率高光束质量短脉冲/超短脉冲绿光激光器在工业、医疗、科研等领域应用广泛。为了明晰基于二次谐波产生（倍频）的绿光光源的研究进展，本文系统综述了千赫兹重复频率下二次谐波产生绿光光源的最新进展，按脉宽和倍频形式分为纳秒腔内倍频、纳秒腔外倍频、皮秒腔外倍频及飞秒腔外倍频四大类别。纳秒腔内倍频KTP、LBO等晶体，功率升至51.1 W（能量50 mJ，重频1 kHz），效率50%。纳秒腔外以LBO为主，采用两倍频晶体串联可将倍频功率提升至1.04 kW（能量1.04 J，效率89%）。皮秒腔外倍频平均功率功率最高可达
1460 W（能量259 mJ，效率71%）。飞秒倍频通过采用薄晶体，功率提升至29 W（能量440 μJ，效率>52%）。基于二次谐波产生的绿光光源以及相关的应用技术进步，将不断拓展其在科研、工业、医疗等领域的应用边界。Abstract:High-power, high-beam-quality short-pulse/ultrashort-pulse green lasers have wide applications in industry, medicine, and scientific research. To clarify the research progress of green light sources based on second-harmonic generation (SHG, frequency doubling), this paper systematically reviews the latest advancements in SHG green light sources at kilohertz repetition rates, categorized by pulse width and doubling scheme into four types: nanosecond intracavity doubling, nanosecond extracavity doubling, picosecond extracavity doubling, and femtosecond extracavity doubling. For nanosecond intracavity doubling, crystals such as KTP and LBO are used, with power increased to 51.1 W (energy 50 mJ, repetition rate 1 kHz) and efficiency of 50%. Nanosecond extracavity doubling primarily employs LBO, where tandem frequency-doubling crystals can elevate the doubling power to 1.04 kW (energy 1.04 J, efficiency 89%). Picosecond extracavity doubling achieves the highest average power of
1460 W (energy 259 mJ, efficiency 71%). Femtosecond doubling, by employing thin crystals, boosts power to 29 W (energy 440 μJ, efficiency >52%). The advancements in SHG-based green light sources and related application technologies will continually expand their boundaries in scientific research, industry, medicine, and other fields.-
Key words:
- computer vision /
- edge detection /
- geometric figure /
- curve fitting /
- subpixel /
- optical efficiency /
- green laser
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图 1 （a）折叠（V型）腔内倍频[17]；（b）直线腔内倍频[9]；（c）单通腔外倍频[12]；（d）双通腔外倍频[12]；（e）外谐振腔倍频[12]；
Figure 1. (a) Folded (V-shaped) intracavity frequency doubling [17]; (b) Linear intracavity frequency doubling [9]; (c) Single-pass extracavity frequency doubling [12]; (d) Double-pass extracavity frequency doubling [12]; (e) External resonant cavity frequency doubling [12].
图 2 纳秒级腔内倍频输出平均功率、效率统计
Figure 2. Statistics on average output power and efficiency of nanosecond-level intracavity frequency doubling
图 3 纳秒级腔内倍频脉宽、重复频率、单脉冲能量统计
Figure 3. Statistics on pulse width, repetition rate, and single-pulse energy of nanosecond-level intracavity frequency doubling
图 4 纳秒级腔外倍频输出平均功率、效率统计
Figure 4. Statistics on average output power and efficiency of nanosecond-level extracavity frequency doubling
图 5 纳秒级腔外倍频脉宽、重复频率、单脉冲能量统计
Figure 5. Statistics on pulse width, repetition rate, and single-pulse energy of nanosecond-level extracavity frequency doubling
图 6 皮秒倍频输出平均功率、效率统计
Figure 6. Statistics on average output power and efficiency of picosecond frequency doubling
图 7 皮秒倍频脉宽、重复频率、单脉冲能量统计
Figure 7. Statistics on pulse width, repetition rate, and single-pulse energy of picosecond frequency doubling
图 8 飞秒倍频输出平均功率、效率统计
Figure 8. Statistics on average output power and efficiency of femtosecond frequency doubling
图 9 飞秒倍频脉宽、重复频率、单脉冲能量统计
Figure 9. Statistics on pulse width, repetition rate, and single-pulse energy of femtosecond frequency doubling
表 1 纳秒级腔内倍频研究进展（按倍频输出平均功率降序）
Table 1. Advances in Nanosecond Intracavity Frequency Doubling Research (Sorted in Descending Order of Frequency Doubling Output Average Power)
年份 非线性
晶体晶体
尺寸
(mm3)晶体
工作
温度倍频
平均
功率(W)倍频
波长
(nm)能量
(μJ)倍频
脉宽
(ns)相对于
吸收泵浦的
光光转换
效率(%)斜率
效率
(%)倍频M2 重频
(kHz)基频
波长
(nm)基频光
脉宽
(ns)2022[20] LBO - 150 °C 0.27 532 270 50 50 - - 1 1064 - 2017[16] PPLN 1*1*1.2 25 °C 0.323 532.7 4.84 320 5.2 6.9 - 66.7 1064 - 2020[18] BBO 4*4*8 20 °C 0.8 539.9 80 33.9 13.40 - - 10 1080 - 2020[19] LBO 3*3*10 29 °C 0.85 532 69 - 12 - - 12.41 1064 35 2015[14] GTR-KTP 3*3*7 室温 1.2 532 162 12.15 17 - <1.5 75 1064 - 2016[15] LBO 2*2*15 20 2.6 535 86.7 36.6 26.8 - - 26.8 1070 - 2023[9] KTP 4*4*10 20 3.8 532 380 192 45.504 - 1.6/1.73 10 1064 - 2020[17] BBO 4*4*8 20 °C 4.37 532 72.83 36 22.40 - - 60 1064 - 2024[21] LBO - - 51.1 527 50 mJ 98.7 11.45 - 18.1/14.593 1 1054 1. 基频光重频；2. 泵浦功率7 W时测得； 3. 为$ \text{M}_{\text{x}}^{2}/\text{M}_{\text{y}}^{2} $简写；4.效率为倍频转换效率；5.泵浦功率5.8 W时测得； 
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表 2 纳秒级腔外倍频研究进展（按倍频输出平均功率升序）
Table 2. Advances in Nanosecond Extracavity Frequency Doubling Research (Sorted in Ascending Order of Frequency Doubling Output Average Power)
年份 非线性
晶体晶体
尺寸
(mm3)晶体
工作
温度倍频
平均
功率(W)倍频
输出
波长(nm)能量 倍频
脉宽
(ns)光光
转换
效率(%)斜率
效率
(%)倍频
M2重频
(kHz)基频
波长
(nm)基频光
脉宽
(ns)2018[23] PPKTP - - 0.45 532 450 mJ 2.2 ns - - - 1 Hz 1064 - 2023[9] KTP 4*4*10 20 °C1 1.7 532 0.34 mJ 192 ns2 <24 - - 5 1064 2022[28] LBO 6*6*35 33.5 °C 26.4 532 13.2 mJ 6.4 ns 59.7 - 1.7/1.683 2 1064 - 2020[29] LBO 4*4*20 23 °C 32.7 532 16.4 mJ 6.5 ns 42.3 - 1.52/1.53 2 1064 - 2021[12] LBO 长40 - 50 515 0.5 mJ 5 ns - 68 <1.2 100-500 1030 - 2019[22] LBO 5*5*20 - 60.2 532 0.602 mJ 3.77 ns 68.80 - 1.78 100 1064 - 2023[27] LBO 4*4*40 145.6±
0.05 °C67.4 532 33.7 mJ 41.8 ns 75.40 - 1.31 2 1064 - 2023[26] LBO 长40 158.85 °C 70 528 0.78 mJ 65 - - 9004 1056 12 ns 2021[25] LBO - 142.85 °C 807 535 - - 36 - 1.28 400 1070 13 ns 2021[25] LBO - 142.85 °C 807 528 - - 60 - 1.28 400 1056 13 ns 2020[24] LBO 10*10*10 - 580 515 0.58J 2 ns5 89 - - 1 1030 - 2020[24] LBO 10*10*13 - 940 515 0.94J6 2 ns 78 - 1.4/1.323 1 1030 - 2020[24] LBO 10*10*13 - 1040 515 1.04J6 2 ns - - - 1 1030 - 1. 水冷铜炉温度为20 °C；2. 腔内倍频的脉宽；3. 为$ \text{M}_{\text{x}}^{2}/\text{M}_{\text{y}}^{2} $简写；4. 经由第一块晶体倍频产生；5. 基频光经时间整形至方形脉冲；6. 经由两块LBO晶体倍频输出的总能量；7. 输出的528 nm和535 nm混合光的平均功率；8. 输出的528 nm和535 nm混合光的光束质量；
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表 3 皮秒级脉宽倍频研究进展（按倍频输出平均功率升序）
Table 3. Advances in Picosecond Pulse Width Frequency Doubling Research (Sorted in Ascending Order of Frequency Doubling Output Average Power)
年份 非线性
晶体晶体
尺寸
(mm3)晶体
工作
温度平均
功率
(W)输出
波长
(nm)能量 脉宽
(ps)光光
转换
效率(%)倍频
M2重频
(kHz)基频
波长
(nm)基频光
脉宽2021[35] LBO - 40 °C 2.2 532 2.2 mJ 27 ps >70 1.5 1 1064 2020[36] LBO 8*8*2 - 4.38 515 4.38 mJ 1.3 ps 74 <1.6 1 1030 2023[3] LBO 4*4*12 50 °C 5.3 532.2 0.53 mJ 18.6 ps 81.50 1.09/1.121 10 1064 2015[37] LBO 4*4*20 24 1.96 mJ 18.9 ps 67 1.753 5 1064 2016[38] LBO 8*8*10 47 °C 35 515 0.35 mJ - 56 1.4/1.61 100 1030 4 ps 2019[39] LBO 9*9*20 - 40.5 532 40.5 mJ - 61.8 1.26/1.251 1 1064 600 ps 2016[40] LBO 厚1.47 - 42 515 42 mJ - 61 - 1 1030 1.2 ps 2020[33] LBO 6*6*15 149 °C 50 532 50 mJ - 68 3.358/2.4571 1 1064 100 ps 2016[31] BBO 厚1.5 室温 70 515 20 mJ - 70 1.84/1.661 5 1030 1 ps 2017[41] β-BBO 厚1.5 - 70 515 14 mJ - 70 52 1030 1 ps 2023[34] LBO - - 259 515 259 mJ - 59 - 1 1030 1 ps 2015[30] LBO 6*6*5 47 °C 820 515 2.7 mJ - 70 1.53/1.991 300 1030 7.7 ps 2020[32] LBO 15*15*5 47 °C 1460 515 4.87 mJ - 71 1.38/1.431 300 1030 7.7 ps 1. 为$ \mathrm{M}_{\mathrm{x}}^{2}/\mathrm{M}_{\mathrm{y}}^{2} $简写； 2. 基频光重频；3. 最大绿光脉冲能量1.96 mJ输出时测得；
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表 4 飞秒级脉宽倍频研究进展（按倍频输出平均功率降序）
Table 4. Advances in Femtosecond Pulse Width Frequency Doubling Research (Sorted in Descending Order of Frequency Doubling Output Average Power)
年份 非线性
晶体晶体
尺寸
(mm3)倍频
平均
功率(W)倍频
输出
波长(nm)能量
(μJ)倍频
脉宽
(fs)光光
转换
效率(%)倍频
M2重频
(kHz)基频
波长
(nm)基频光
脉宽
(fs)2020[45] KBOB 7*7*1 0.235 515 235 132 fs 26.70 - 1 kHz 1030 180 fs 2016[46] KDP 厚1 0.7 515 7 11 fs 35 - 100 kHz 1030 - 2020[45] KBOB 7*7*1 1.03 515 103 - 17.50 - 10 kHz 1030 180 fs 2018[47] - - 2.8 532 31 <20 fs 26.7 - 90 MHz 1063 - 2022[43] LBO 3*3*4 5.5 530 50 - ~41 - 100 kHz 1060 280 fs 2021[42] BBO 厚1 11.45 515 69 13 fs 40.6 - 166 kHz 1030 - 2023[44] BBO 长1.5 29 515 440 15.7 fs >52 1.19/1.171 50.8 kHz 1030 - 1. 为$ \mathrm{M}_{\mathrm{x}}^{2} $/$ \mathrm{M}_{\mathrm{y}}^{2} $简写形式
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