高精度干涉检验移相算法对振动误差的免疫能力

刘艳; 苏东奇; 杨怀江; 隋永新

Volume 3 Issue 5

Nov. 2010

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Article Contents

Chinese Optics > 2010 > 3(5): 500-508.

LIU Yan, SU Dong-qi, YANG Huai-jiang, SUI Yong-xin. Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry[J]. Chinese Optics, 2010, 3(5): 500-508.

Citation:

LIU Yan, SU Dong-qi, YANG Huai-jiang, SUI Yong-xin. Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry[J]. Chinese Optics, 2010, 3(5): 500-508.

LIU Yan, SU Dong-qi, YANG Huai-jiang, SUI Yong-xin. Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry[J]. Chinese Optics, 2010, 3(5): 500-508.

Citation:

LIU Yan, SU Dong-qi, YANG Huai-jiang, SUI Yong-xin. Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry[J]. Chinese Optics, 2010, 3(5): 500-508.

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Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry

1.
State Key Laboratory of Applied Optics,Changchun Insititute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;
2.
Graduate University of Chinese Academy of Sciences,Beijing 100039,China

Received Date: 17 May 2010
Rev Recd Date: 25 Jul 2010
Publish Date: 25 Oct 2010

Abstract

Abstract

As vibration errors are the crucial source of error in a high accuracy interferometric test, this paper researches the effect of mechanical vibration on the phase shifting stability. It establishes vibration error models and simulates the immunity of vibration by using the three-step algorithm, five-step algorithm, seven-step algorithm and thirteen-step algorithm, respectively. The results show that the thirteen-step algorithm is the best in immunizing the vibration. For the results agreed with that in other literature, it proves the simulation in this paper is believable. To some extent, the method can give a reasonable prediction of the vibration error which effects the precision of interferometer and it also can evaluate and select the algorithm of phase shifting.
- phase shifting interferometry,
- vibration error,
- error analysis,
- phase shifting algorithm

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References(1)

References

[1] CREATH K. Phase-measurement interferometry techniques[J]. Progress Opt.,1988,(26):349-398. [2] BRUNING J H,HERRIOTT D R,GALLAGHER J E,et al.. Digital wavefront measuring interferometer for testing optical surfaces sand lenses[J]. Appl. Opt.,1974,13(11):2693-2703. [3] WINGERDEN J van,FRANKENA H H,SMORENBURG C. Linear approximation for measurement errors in phase shifting interferometry[J]. Appl. Opt.,1991,30:2718-2729. [4] CREATH K. Comparison of phase-measurement algorithms[J]. SPIE,1986,680:19-28. [5] MALACALA D. Optical Shop Testing[M]. 3rd. Hoboken:A John Wiley & Sons, Inc.,Publication, 2007. [6] GROOT P,DECK L L. Numerical simulations of vibration in phase-shifting interferometry[J]. Appl. Opt.,1996,35(13):2172-2178.

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