采用五棱镜扫描法检测大口径平面镜的面形

袁理; 张晓辉

doi:10.3788/CO.20191204.0920

Volume 12 Issue 4

Aug. 2019

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Chinese Optics > 2019 > 12(4): 920-931.

YUAN Li, ZHANG Xiao-hui. Surface shape measurement of large flat mirrors using a scanning pentaprism method[J]. Chinese Optics, 2019, 12(4): 920-931. doi: 10.3788/CO.20191204.0920

Citation:

YUAN Li, ZHANG Xiao-hui. Surface shape measurement of large flat mirrors using a scanning pentaprism method[J]. Chinese Optics, 2019, 12(4): 920-931. doi: 10.3788/CO.20191204.0920

YUAN Li, ZHANG Xiao-hui. Surface shape measurement of large flat mirrors using a scanning pentaprism method[J]. Chinese Optics, 2019, 12(4): 920-931. doi: 10.3788/CO.20191204.0920

Citation:

YUAN Li, ZHANG Xiao-hui. Surface shape measurement of large flat mirrors using a scanning pentaprism method[J]. Chinese Optics, 2019, 12(4): 920-931. doi: 10.3788/CO.20191204.0920

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Surface shape measurement of large flat mirrors using a scanning pentaprism method

doi: 10.3788/CO.20191204.0920

YUAN Li^{1, 2
,},
ZHANG Xiao-hui^{1
,
,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:

National Natural Science Foundation of China 61675198

More Information

Corresponding author: ZHANG Xiao-hui, E-mail:xhz861@outlook.com
Received Date: 05 Feb 2018
Rev Recd Date: 05 Mar 2018
Publish Date: 01 Aug 2019

Abstract

Abstract

To improve the accuracy and efficiency of the surface shape measurements of large flat mirrors, a new scanning pentaprism method is proposed. In this method, we use a scanning pentaprism and an autocollimator to radially scan and measure the differences between the tilt angles. The surface shape of the flat mirror under test is expressed by a linear combination of Zernike polynomials and an equation set is established on the basis of the angle differences. Finally, the surface shape of the flat mirror can be derived through a least squares calculation. In the measuring process, this method can automatically accommodate changes in the pentaprism tilts during scans, which can reduce measurement errors. The error analysis indicates that the surface shape measurement accuracy by this method is 7.6 nm rms(root-mean-square). This method is used to measure the surface shape of a 1.5 m flat mirror and the result is compared to that of the Ritchey-Common method. The difference between the two surface shape results is 7.1 nm rms, which is less than the surface shape measurement results of the scanning pentaprism method. This proves that it is feasible using the scanning pentaprism method to measure the topographies of large flat mirrors.
- scanning pentaprism method,
- large flat mirror,
- surface shape,
- tilt angle of surface

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References(21)

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