低阶梯多级微反射镜高度误差分析及制作研究

张敏; 吕金光; 梁静秋; 梁中翥; 秦余欣; 王维彪

doi:10.3788/CO.20191204.0791

Volume 12 Issue 4

Aug. 2019

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Article Contents

Chinese Optics > 2019 > 12(4): 791-803.

ZHANG Min, LV Jin-guang, LIANG Jing-qiu, LIANG Zhong-zhu, QIN Yu-xin, WANG Wei-biao. Error analysis and fabrication of low-stepped mirrors[J]. Chinese Optics, 2019, 12(4): 791-803. doi: 10.3788/CO.20191204.0791

Citation:

ZHANG Min, LV Jin-guang, LIANG Jing-qiu, LIANG Zhong-zhu, QIN Yu-xin, WANG Wei-biao. Error analysis and fabrication of low-stepped mirrors[J]. Chinese Optics, 2019, 12(4): 791-803. doi: 10.3788/CO.20191204.0791

Citation:

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Error analysis and fabrication of low-stepped mirrors

doi: 10.3788/CO.20191204.0791

1.
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033
2.
University of Chinese Academy of Sciences, Beijing 100049

Funds:

National Natural Science Foundation of China 61627819

National Natural Science Foundation of China 61575193

National Natural Science Foundation of China 61805239

National Natural Science Foundation of China 61727818

National Natural Science Foundation of China 61735018

Scientific and Technological Development Project of Jilin Province 20190303063SF

Scientific and Technological Development Project of Jilin Province 20180201024GX

Scientific and Technological Development Project of Jilin Province 20150520101JH

Scientific and Technological Development Project of Jilin Province 20170204077GX

Youth Innovation Promotion Association of the Chinese Academy of Sciences 2018254

Leading Talents and Team Project of Scientific and Technological Innovation for Young and Middle-aged Groups in Jilin Province 20190101012JH

More Information

Corresponding author: LIANG Jing-qiu, E-mail:liangjq@ciomp.ac.cn; LIANG Zhong-zhu, E-mail:liangzz@ciomp.ac.cn
Received Date: 05 Feb 2018
Rev Recd Date: 05 Mar 2018
Publish Date: 01 Aug 2019

Abstract

Abstract

In this study, a static and light Fourier transform infrared spectrometer based on stepped mirrors and a grid beam splitter was proposed. By introducing two stepped mirrors into the interference system, the optical path difference is discretized and the 2-dimensional sampling of the interferogram is obtained. Furthermore, by introducing the grid beam splitter into the interference system, the volume and weight are decreased. Stepped mirrors as the core optical devices of such a spectrometer, its step height consistency, face flatness and the structure's precision determine the spectral sampling interval, resolution and noise of the system. We propose a method based on MOEMS technology involving multiple depositions accompanied by a 50% reduction in thickness at every iteration to fabricate a low-stepped mirror with 32 steps and 0.625 μm in step height. The test results show that the root-mean-square of roughness is 1.72 nm and that the average height of the real steps is 626.9 nm. The effect of the height error on the recovered spectrum is analyzed. In order to reduce the influence of this error, two methods are proposed:one is through using tooling factor to reduce the monitoring error of the film thickness, thus reducing the height error; the other is through using the least-squares approximation cosine polynomial algorithm to correct the recovered spectrum. The spectrum-constructing error(SCE) is reduced to 2.34%, which meets the requirements of spectral restoration. Finally, the experiment was carried out using low stepped mirrors and the interferograms were obtained before and after the addition of the sample. The absorption spectrum of the sample acetonitrile can be obtained using a Fourier transform.
- fourier transform infrared spectrometer,
- low stepped multi-level mirror,
- height error analysis

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References(22)

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