光程补偿近红外光透射反射干涉重构微结构内部形貌

史健华; 韩丙辰

doi:10.3788/CO.20191202.0395

Volume 12 Issue 2

Apr. 2019

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Article Contents

Chinese Optics > 2019 > 12(2): 395-404.

SHI Jian-hua, HAN Bing-chen. Internal profile reconstruction of microstructures based on near-infrared light transmission reflection interferometry with optical path compensation[J]. Chinese Optics, 2019, 12(2): 395-404. doi: 10.3788/CO.20191202.0395

Citation:

SHI Jian-hua, HAN Bing-chen. Internal profile reconstruction of microstructures based on near-infrared light transmission reflection interferometry with optical path compensation[J]. Chinese Optics, 2019, 12(2): 395-404. doi: 10.3788/CO.20191202.0395

Citation:

SHI Jian-hua, HAN Bing-chen. Internal profile reconstruction of microstructures based on near-infrared light transmission reflection interferometry with optical path compensation[J]. Chinese Optics, 2019, 12(2): 395-404. doi: 10.3788/CO.20191202.0395

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Internal profile reconstruction of microstructures based on near-infrared light transmission reflection interferometry with optical path compensation

doi: 10.3788/CO.20191202.0395

SHI Jian-hua^{1
,
,},
HAN Bing-chen²

1.
School of Physics and Electronic Science, Shanxi Datong University, Datong 037009, China
2.
Department of Physics, Taiyuan Normal University, Taiyuan 030619, China

Funds:

the National Natural Science Foundation Youth Foundation of China(NSFC) 11705107

the Science and Technology Infrastructure Program of the Ministry of Science and Technology of Shanxi Province, China 2015031002-1

the Shanxi Datong University Research Foundation for Ph. D. 2014B15

More Information

Author Bio:
SHI Jian-hua(1978—), male, Associate Professor, from Ningwu County, Shanxi Province, Master′s Research Degree. Present:Deputy Director of the Teaching Evaluation and Supervision Center, and teacher at the Institute of Physics and Energy, mainly engaged in the research of optical processing involving image processing. E-mail:shijianhua_dtdx@163.com
Corresponding author: SHI Jian-hua, E-mail:shijianhua_dtdx@163.com
Received Date: 05 Jun 2018
Rev Recd Date: 13 Jul 2018
Publish Date: 01 Apr 2019

Abstract

Abstract

The bottom and sidewall profile reconstruction of microstructures with a high aspect ratio is a problem that urgently needs to be solved in the field of MEMS(Micro-Electro-Mechanical system). Microstructures profile reconstruction method is presented based on near-infrared light transmission reflection interferometry with optical path compensation(OPC), which is extended from white light to near-infrared light and from reflection interference to transmission interference. The near-infrared light transmission interferometry system is composed of a near-infrared light source, an interference microscope, an infrared light CCD, piezoelectric ceramics with high accuracy and a data acquisition system. A GaAs sample microstructure with two steps was designed and the method of vertical scanning interference of near-infrared light with OPC was adopted to reconstruct the internal profile of a microstructure, which was then compared with the results of scanning electron microscopy(SEM). Test results show that the relative heights of the measured microstructure steps using near-infrared light transmission reflection interferometry were 2.132 μm and 0.766 μm with 2.16% and 2.68% relative errors, respectively, which agree with the results of SEM and that of the near-infrared light reflection interferometer. The measurement system has the ability to reconstruct the bottom and sidewall profile of microstructures with a high aspect ratio.
- near-infrared light transmission reflection interference,
- microstructures,
- internal profile reconstruction

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References(15)

References

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