激光位移传感器传感探头微小型光学系统设计

张爽; 朱万彬; 李健; 鲁秀娥

doi:10.3788/CO.20181106.1001

Volume 11 Issue 6

Dec. 2018

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Chinese Optics > 2018 > 11(6): 1001-1010.

ZHANG Shuang, ZHU Wan-bin, LI Jian, LU Xiu-e. Design of micro-optical system for laser displacement sensor sensing probe[J]. Chinese Optics, 2018, 11(6): 1001-1010. doi: 10.3788/CO.20181106.1001

Citation:

ZHANG Shuang, ZHU Wan-bin, LI Jian, LU Xiu-e. Design of micro-optical system for laser displacement sensor sensing probe[J]. Chinese Optics, 2018, 11(6): 1001-1010. doi: 10.3788/CO.20181106.1001

ZHANG Shuang, ZHU Wan-bin, LI Jian, LU Xiu-e. Design of micro-optical system for laser displacement sensor sensing probe[J]. Chinese Optics, 2018, 11(6): 1001-1010. doi: 10.3788/CO.20181106.1001

Citation:

ZHANG Shuang, ZHU Wan-bin, LI Jian, LU Xiu-e. Design of micro-optical system for laser displacement sensor sensing probe[J]. Chinese Optics, 2018, 11(6): 1001-1010. doi: 10.3788/CO.20181106.1001

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Design of micro-optical system for laser displacement sensor sensing probe

doi: 10.3788/CO.20181106.1001

ZHANG Shuang^{1, 2
,},
ZHU Wan-bin^{1
,
,},
LI Jian^{1, 2
,},
LU Xiu-e^3
,

1.
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
Chinese Academy of Sciences, Beijing 100039, China
3.
Chanchun Coherent Optics Electromechanical Technology Co. Ltd

Funds:

Jilin Provincial Science and Technology Department Key Science and Technology Transformation Project 20150307036G X

Jilin Provincial Science and Technology Department Key Science and Technology Transformation Project 20150307039G X

More Information

Corresponding author: ZHU Wan-bin, E-mail:wanbinzhu@163.com
Received Date: 03 Jan 2018
Rev Recd Date: 01 Mar 2018
Publish Date: 01 Dec 2018

Abstract

Abstract

Spot quality can directly affect the measuring accuracy of laser displacement sensor. In order to improve the imaging quality of sensing probe optical system for the laser displacement sensor, a four-piece micro-optical system for sensing probes is designed. Based on the ideal imaging, we analyze the law of energy transfer in the optical system, compare the sensitivity of the photoelectric detector, and use the optical design software ZEMAX to realize the design of the micro-optical system of the laser displacement sensor. Through theoretical calculation and analysis, the size of the aperture of the sensing probe is strictly controlled, and the optical system is optimized. As a result, the maximum radius of spot is 3.226 μm, the value of Modulation Transfer Function(MTF) is over 0.5 when the spatial resolution is confined within the boundary of 120 lp/mm, the error of Ray Fan is 5 μm or less and the maximum distortion is less than 0.185 9%. The optical system has a good imaging effect, so that the laser displacement sensor detection system can meet the imaging spot quality requirements of the imaging system to ensure that the measurement accuracy of the sensor is better than 5 μm.
- micro-optical system,
- ZEMAX,
- spot quality

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References(40)

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