点衍射干涉检测技术

李瑶; 杨甬英; 王晨; 陈元恺; 陈晓钰

doi:10.3788/CO.20171004.0391

Volume 10 Issue 4

Jul. 2017

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Article Contents

Chinese Optics > 2017 > 10(4): 391-414.

LI Yao, YANG Yong-ying, WANG Chen, CHEN Yuan-kai, CHEN Xiao-yu. Point diffraction in terference detection technology[J]. Chinese Optics, 2017, 10(4): 391-414. doi: 10.3788/CO.20171004.0391

Citation:

LI Yao, YANG Yong-ying, WANG Chen, CHEN Yuan-kai, CHEN Xiao-yu. Point diffraction in terference detection technology[J]. Chinese Optics, 2017, 10(4): 391-414. doi: 10.3788/CO.20171004.0391

LI Yao, YANG Yong-ying, WANG Chen, CHEN Yuan-kai, CHEN Xiao-yu. Point diffraction in terference detection technology[J]. Chinese Optics, 2017, 10(4): 391-414. doi: 10.3788/CO.20171004.0391

Citation:

LI Yao, YANG Yong-ying, WANG Chen, CHEN Yuan-kai, CHEN Xiao-yu. Point diffraction in terference detection technology[J]. Chinese Optics, 2017, 10(4): 391-414. doi: 10.3788/CO.20171004.0391

PDF( 9809 KB)

Point diffraction in terference detection technology

doi: 10.3788/CO.20171004.0391

State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China

Funds:

National Natural Science Foundation of China 61627825

National Natural Science Foundation of China 11275172

Innovation Fund of State Key Laboratory of Modern Optical Instrumentation of China MOI2015B06

More Information

Corresponding author: YANG Yong-ying, E-mail:yyyang07@163.com
Received Date: 23 Feb 2017
Rev Recd Date: 31 Mar 2017
Publish Date: 01 Aug 2017

Abstract

Abstract

In this paper, several characteristics and applications of point diffraction interferometer at different development stages are introduced. In interferometers, high quality spherical wave as a reference wave is produced by pinhole with wavelength scale, which can achieve diffraction limited resolution. According to different light path characteristics, interferometers used for high-precision wavefront testing and surface shape testing are mainly divided into point diffraction common path interferometer and noncommon path interferometer. The former has the advantages of simple structure, low sensitivity to ambient vibration and low requirement for coherence light source. Based on beam polarization and diffraction grating characteristics, the traditional point diffraction splitter plate is improved. Moreover, the temporal phase modulation technology and adjustable interference contrast technology introduced to common path point diffraction interferometer can further improve the measurement accuracy of wavefront. In addition, reflex pinhole and various kinds of fiber structures are employed to develop noncommon point diffraction interferometer, realizing the high-accuracy measurement of large aperture spherical surface. Especially, the reflex pinhole point diffraction interferometer for high-accuracy spherical surface testing in extreme ultraviolet lithography is illustrated in detail. Finally, the wide prospects of application and development of point diffraction interference detection technology are forecasted in many fields, such as biological detection.
- point diffraction,
- fiber point diffraction,
- pinhole point diffraction,
- wavefront measurement,
- biological detection

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References(92)

References

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