基于衍射光栅的干涉式精密位移测量系统

吕强; 李文昊; 巴音贺希格; 柏杨; 刘兆武; 王玮

doi:10.3788/CO.20171001.0039

Volume 10 Issue 1

Jan. 2017

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Chinese Optics > 2017 > 10(1): 39-50.

LV Qiang, LI Wen-hao, Bayanheshig, BAI Yang, LIU Zhao-wu, WANG Wei. Interferometric precision displacement measurement system based on diffraction grating[J]. Chinese Optics, 2017, 10(1): 39-50. doi: 10.3788/CO.20171001.0039

Citation:

LV Qiang, LI Wen-hao, Bayanheshig, BAI Yang, LIU Zhao-wu, WANG Wei. Interferometric precision displacement measurement system based on diffraction grating[J]. Chinese Optics, 2017, 10(1): 39-50. doi: 10.3788/CO.20171001.0039

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Interferometric precision displacement measurement system based on diffraction grating

doi: 10.3788/CO.20171001.0039

LV Qiang^{1, 2
,},
LI Wen-hao^{1
,
,},
Bayanheshig¹,
BAI Yang³,
LIU Zhao-wu^{1, 2},
WANG Wei^{1, 2}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 101408, China
3.
College of Biological and Agricultural Engineering, Jilin University, Changchun 130022, China

Funds:

the National Science and Technology Major Project of the Ministry of Science and Technology of China 61227901

More Information

Corresponding author: LI Wen-hao, E-mail:leewenho@163.com
Received Date: 22 Aug 2016
Rev Recd Date: 16 Sep 2016
Publish Date: 01 Feb 2017

Abstract

Abstract

This paper introduces the principles and the characteristics of the grating displacement measurement system based on geometric moire fringe and the principle of diffraction and interference. It summarizes the research progress of the diffraction grating interferometer displacement measurement system at home and abroad and its key problems and development trend. The advantages of the diffraction grating interferometer displacement measurement system are that low the effect of environment requirement, high resolution and precision, compact structure and low cost. The problems of this system needed to be solved include how to improve the fabrication and installation accuracy of grating and optical components, and seek a higher accuracy of detection means to calibrate the grating displacement measurement system and so on. The development trend of the system is higher resolution and accuracy, larger range, multi-dimensional measurement and more compact structure. The diffraction grating interferometer displacement measurement system will have a wider application prospect in the field of modern industrial processing and manufacturing.
- displacement measurement,
- grating,
- diffraction interference,
- high precision

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References(71)

References

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