差分五棱镜扫描法在波前检测中的应用

汤兆鑫; 黄玮; 许伟才; 刘立峰; 徐象如

doi:10.3788/CO.20140706.1003

Volume 7 Issue 6

Nov. 2014

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Chinese Optics > 2014 > 7(6): 1003-1011.

TANG Zhao-xin, HUANG Wei, XU Wei-cai, LIU Li-feng, XU Xiang-ru. Application of differential pentaprism scanning in wavefront detection[J]. Chinese Optics, 2014, 7(6): 1003-1011. doi: 10.3788/CO.20140706.1003

Citation:

TANG Zhao-xin, HUANG Wei, XU Wei-cai, LIU Li-feng, XU Xiang-ru. Application of differential pentaprism scanning in wavefront detection[J]. Chinese Optics, 2014, 7(6): 1003-1011. doi: 10.3788/CO.20140706.1003

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Application of differential pentaprism scanning in wavefront detection

doi: 10.3788/CO.20140706.1003

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2.
University of Chinese Academy of Sciences, Beijing 100049, China;
3.
State Key Laboratory of Applied Optics, Changchun 130033, China

Received Date: 23 Sep 2014
Rev Recd Date: 20 Oct 2014
Publish Date: 25 Nov 2014

Abstract

Abstract

In order to realize the high precise wavefront test of large-aperture collimator and evaluate its wavefront quality, the method of differential pentaprism scanning wavefront detection is proposed in this paper. This method is the optimization of pentaprism scanning detection. Firstly, the information of wavefront curvature is obtained by measuring wavefront slope change to reconstruct the wavefront. The title and defocus error instructed by inaccurate calibration of center of mass are eliminated. Secondly, the differential pentaprism scanning wavefront detection system is established to verify the feasibility of this method. Lastly, the error analysis is given. The error analysis shows that the testing precise of this method is 10.54 nm. The experimental results show that the repeatability precisions of wave peak and valley value(PV) and root mean square(RMS) are increased by 74.41% and 125.81% compared with pentaprism scanning method. This method basically meets the requirements of high accuracy and good stability for collimator wavefront detection, which can be used to evaluate the quality of collimator wavefront.
- wavefront detection,
- differential pentaprism scanning,
- collimator,
- error analysis

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References(1)

References

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