纳米级面形精度光学平面镜加工

张峰

doi:10.3788/CO.20140704.0616

Volume 7 Issue 4

Aug. 2014

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Chinese Optics > 2014 > 7(4): 616-621.

ZHANG Feng. Fabrication of optical flat mirror with nanometer surface error[J]. Chinese Optics, 2014, 7(4): 616-621. doi: 10.3788/CO.20140704.0616

Citation:

ZHANG Feng. Fabrication of optical flat mirror with nanometer surface error[J]. Chinese Optics, 2014, 7(4): 616-621. doi: 10.3788/CO.20140704.0616

ZHANG Feng. Fabrication of optical flat mirror with nanometer surface error[J]. Chinese Optics, 2014, 7(4): 616-621. doi: 10.3788/CO.20140704.0616

Citation:

ZHANG Feng. Fabrication of optical flat mirror with nanometer surface error[J]. Chinese Optics, 2014, 7(4): 616-621. doi: 10.3788/CO.20140704.0616

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Fabrication of optical flat mirror with nanometer surface error

doi: 10.3788/CO.20140704.0616

ZHANG Feng^,

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Received Date: 17 Feb 2014
Rev Recd Date: 23 Apr 2014
Publish Date: 25 Jul 2014

Abstract

Abstract

In order to polish optical flat mirror with nanometer surface error efficiently, a consisting of new polishing technology traditional continuous polishing(CP) and advanced ion beam figuring(IBF) is presented in this paper. The polishing principles of CP and IBF are introduced. The polishing experiment and material removal function of IBF are studied. A Ф150 mm optical flat mirror is polished by the combined polishing technology. After polishing, the surface error and roughness of the flat mirror are 1.217 nm RMS and 0.506 nm RMS, respectively. The experiment results indicate that the combined polishing technology is effective for polishing optical flat mirror with nanometer surface error.
- optical fabrication,
- continuous polishing(CP),
- ion beam figuring(IBF),
- material removal function

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References(1)

References

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