碳化硅凸非球面反射镜的加工与检测

李俊峰

doi:10.3788/CO.20140702.0287

Volume 7 Issue 2

Mar. 2014

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Chinese Optics > 2014 > 7(2): 287-292.

LI Jun-feng. Fabrication and test of SiC convex aspheric mirror[J]. Chinese Optics, 2014, 7(2): 287-292. doi: 10.3788/CO.20140702.0287

Citation:

LI Jun-feng. Fabrication and test of SiC convex aspheric mirror[J]. Chinese Optics, 2014, 7(2): 287-292. doi: 10.3788/CO.20140702.0287

LI Jun-feng. Fabrication and test of SiC convex aspheric mirror[J]. Chinese Optics, 2014, 7(2): 287-292. doi: 10.3788/CO.20140702.0287

Citation:

LI Jun-feng. Fabrication and test of SiC convex aspheric mirror[J]. Chinese Optics, 2014, 7(2): 287-292. doi: 10.3788/CO.20140702.0287

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Fabrication and test of SiC convex aspheric mirror

doi: 10.3788/CO.20140702.0287

LI Jun-feng^,

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Received Date: 18 Nov 2013
Rev Recd Date: 15 Feb 2014
Publish Date: 25 Mar 2014

Abstract

Abstract

In order to satisfy all-frequency error quality controlling and high-precision test during the process of the convex asphere, double laps with polar coordinate polishing technique and the measuring poles method used for the alignment of Hindle test are proposed. Firstly, the double laps with polar coordinate polishing technique for manufacturing the aspheric mirror and the numerical control machine for processing aspheric surface are presented. Then, the measuring poles method used to control the distances between vertex of the standard sphere and the vertex and focus of the tested asphere is introduced, and the controlling precision is analyzed. Finally, for a convex asphere with the aperture of 158 mm, the test results and precision of the Hindle test are described. The results indicate that the double laps polishing technique can make the low-frequency surface error convergence quickly, and the mid-frequency surface error is restrained at the same time. The controlling precision of the low-frequency surface error is about /30(=633 nm). The limit error using the measuring poles to control the distance is 0.065 mm, and the tolerances of the two space parameters are 0.22 mm and 0.30 mm, respectively. The fast manufacture and all-frequency controlling of the convex asphere are realized by the double laps with polar coordinate polishing technique, and the test result of low-frequency surface error is 0.022(RMS,@633 nm) in the Hindle test, which satisfies the specification requirements of the optical design.
- double laps,
- asphere,
- Hindle test,
- measuring pole

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References

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