球面元件表面AlF<sub>3</sub>薄膜的光学特性和微观结构表征

时光; 梅林; 张立超

doi:10.3788/CO.20130606.906

Volume 6 Issue 6

Dec. 2013

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Chinese Optics > 2013 > 6(6): 906-911.

SHI Guang, MEI Lin, ZHANG Li-chao. Characterization of optical and microstructural properties of AlF3 thin films deposited on spherical element[J]. Chinese Optics, 2013, 6(6): 906-911. doi: 10.3788/CO.20130606.906

Citation:

SHI Guang, MEI Lin, ZHANG Li-chao. Characterization of optical and microstructural properties of AlF₃ thin films deposited on spherical element[J]. Chinese Optics, 2013, 6(6): 906-911. doi: 10.3788/CO.20130606.906

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Characterization of optical and microstructural properties of AlF₃ thin films deposited on spherical element

doi: 10.3788/CO.20130606.906

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Received Date: 12 Sep 2013
Rev Recd Date: 15 Nov 2013
Publish Date: 10 Dec 2013

Abstract

Abstract

Single AlF3 layers were deposited upon fused-silica substrates placed on a simulated fixture which has the same radius of curvature with the spherical element to characterize the optical and microstructural properties of the AlF3 films. First, transmittance and reflectance spectra of AlF3 layers at different positions on the fixture were measured by an UV-visible spectrophotometer from 185 nm to 800 nm, and their refractive indexes and extinction coefficients were obtained. Then the surface morphologies and surface roughnesses of AlF3 layers were assessed with an Atomic Force Microscopy(AFM). Finally, the X-ray Diffraction(XRD) was used to characterize the microstructure of AlF3 layers. Experimental results indicate that for AlF3 layers deposited at different diameters on the spherical element, their optical losses increase along with the diameters. The extinction coefficients of AlF3 layers at the edge position are 1.8 times of that at the center, and surface roughness are 17.7 times of that at the center. The results suggest that for the coating on the surface of spherical element, the difference in optical loss along the diameter caused by steam incident angles should be considered.
- thermal evaporation,
- AlF3 thin film,
- spherical element,
- microstructural property

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