斜照明式彩色共聚焦测量系统设计及其实验研究

张雅丽; 余卿; 尚文键; 王翀; 刘婷; 王寅; 程方

doi:10.37188/CO.2021-0181

Volume 15 Issue 3

May 2022

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Article Contents

Chinese Optics > 2022 > 15(3): 514-524.

ZHANG Ya-li, YU Qing, SHANG Wen-jian, WANG Chong, LIU Ting, WANG Yin, CHENG Fang. Chromatic confocal measurement system and its experimental study based on inclined illumination[J]. Chinese Optics, 2022, 15(3): 514-524. doi: 10.37188/CO.2021-0181

Citation:

ZHANG Ya-li, YU Qing, SHANG Wen-jian, WANG Chong, LIU Ting, WANG Yin, CHENG Fang. Chromatic confocal measurement system and its experimental study based on inclined illumination[J]. Chinese Optics, 2022, 15(3): 514-524. doi: 10.37188/CO.2021-0181

Citation:

ZHANG Ya-li, YU Qing, SHANG Wen-jian, WANG Chong, LIU Ting, WANG Yin, CHENG Fang. Chromatic confocal measurement system and its experimental study based on inclined illumination[J]. Chinese Optics, 2022, 15(3): 514-524. doi: 10.37188/CO.2021-0181

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Chromatic confocal measurement system and its experimental study based on inclined illumination

doi: 10.37188/CO.2021-0181

College of Mechanical Engineering and Automation, Huaqiao University, Fujian 361021, China

Funds: Supported by National Natural Science Foundation of China (No. 52075190, No. 62075067); Science and Technology Program of Fujian, China (No. 2019I0013); Promotion Program for Young and Middle-Aged Teachers in Science and Technology Research of Huaqiao University (No. ZQN-PY604).

More Information

Corresponding author: yuqing@hqu.edu.cn
Received Date: 21 Oct 2021
Rev Recd Date: 17 Nov 2021
Accepted Date: 21 Jan 2022

Available Online: 18 Feb 2022

Publish Date: 20 May 2022

Abstract

Abstract

Because the chromatic confocal technique has no axial scanning, high measurement speed, high precision, good axial tomography ability, and good axial resolution ability, it is widely used in industrial fields such as height measurement and transparent specimen thickness measurement. However, most chromatic confocal systems are coaxial illumination structures in which the illumination optical axis and imaging optical axis are perpendicular to the tested specimen which reduces its signal-to-noise ratio and light energy utility. However, the existing inclined illumination system has high light spot drift on the imaging surface, and the measurement accuracy and application range are limited. To overcome the above shortcomings, a chromatic confocal measurement method with inclined illumination is proposed in this paper. The "V-shaped" structure is changed to a triaxial structure, and the drift of the light spot is limited by adding an adjusting branch. Also, an array color camera is used as the photoelectric receiving device, and the height value is obtained by the light spot’s color processed by a color conversion algorithm. In this study, the calibration experiment was first carried out to determine the measurement range and accuracy of the device. Then, the self-made steps and transparent specimens were measured and the corresponding measured values were determined. In order to better verify the performance of the improved system under unchanged conditions, the V-shaped system was used for comparison. The experimental results show that the axial measurement range of the system is 350 μm, and the repeatability is greater than 1.69 μm. The axial measurement accuracy can reach the micron level and the system is highly capable of measuring the thickness of transparent specimens. Through comparison, it can be verified that the system has a good suppression effect on spot drift, and the measurement accuracy of the system has been significantly improved after suppression.
- chromatic confocal,
- inclined illumination,
- triaxial structure,
- transparent specimen

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References(22)

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