数字微镜器件光刻和电沉积结合制备金微阵列电极的结构优化与性能检测

杨东方; 陆子凤; 刘华; 单桂晔

doi:10.37188/CO.2021-0109

Volume 15 Issue 3

May 2022

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Article Contents

Chinese Optics > 2022 > 15(3): 592-607.

YANG Dong-fang, LU Zi-feng, LIU Hua, SHAN Gui-ye. Structural optimization and performance testing of gold microarray electrode fabricated by DMD lithography and electrodeposition[J]. Chinese Optics, 2022, 15(3): 592-607. doi: 10.37188/CO.2021-0109

Citation:

YANG Dong-fang, LU Zi-feng, LIU Hua, SHAN Gui-ye. Structural optimization and performance testing of gold microarray electrode fabricated by DMD lithography and electrodeposition[J]. Chinese Optics, 2022, 15(3): 592-607. doi: 10.37188/CO.2021-0109

Citation:

YANG Dong-fang, LU Zi-feng, LIU Hua, SHAN Gui-ye. Structural optimization and performance testing of gold microarray electrode fabricated by DMD lithography and electrodeposition[J]. Chinese Optics, 2022, 15(3): 592-607. doi: 10.37188/CO.2021-0109

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Structural optimization and performance testing of gold microarray electrode fabricated by DMD lithography and electrodeposition

doi: 10.37188/CO.2021-0109

Center for Advanced Optoelectronic Functional Materials Research, and Key Laboratory for UV Emitting Materials and Technology of Ministry of Education, National Demonstration Center for Experimental Physics Education, Northeast Normal University, Changchun 130024, China

Funds: Supported by National Natural Science Foundation of China (No. 61875036); Jilin Scientific and Technological Development Program (No. 20190302049GX).

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Author Bio:
Yang Dongfang (1995—), female, born in Xinzhou, Shanxi, is now a master candidate in the School of Physics, Northeast Normal University, mainly engaged in the research of micro-nano processing, DMD lithography and other aspects. E-mail: 873717301@qq.com

Zifeng Lu (1974—), female, born in Suibin Farm, Suibin County, Heilongjiang Province, ph. D., now is a teacher in the School of Physics, Northeast Normal University, mainly engaged in the research of micro-nano processing, 3D printing and other aspects. E-mail: luzf934@nenu.edu.cn

Liu Hua (1976—), female, born in Fushun, Liaoning Province, Ph.D., now is a professor in the School of Physics, Northeast Normal University, mainly engaged in the research on 3D micro-nano printing of photosensitive materials and glass materials. E-mail: liuh146@nenu.edu.cn
Corresponding author: liuh146@nenu.edu.cn
Received Date: 14 May 2021
Rev Recd Date: 02 Jun 2021

Available Online: 16 Oct 2021

Publish Date: 20 May 2022

Abstract

Abstract

In order to improve the detection efficiency of Micro Array Electrodes (MAE) and reduce the production cost, a technology combining Digital Micromirror Device (DMD) maskless projection lithography with electrochemical deposition was proposed. Firstly, a user-defined micro array was fabricated by using the advantages of lithography system such as high-resolution PZS motion and imaging flexibility of DMD. And a uniform Au microarray electrode (Au/MAE) was fabricated after obtaining an Au conducting layer by electrodeposition. Then, the electrochemical properties of Au/MAE with different structures were compared by cyclic voltammetry, and the optimized structural parameters were obtained. Finally, the current response of optimized Au/MAE to the glucose with different concentrations and pH values was studied, and the anti-interference of Au/MAE in glucose detection was tested by chronoamperometry. The electrochemical analysis shows that the simple Au/MAE has a significant amperometric response, a strong anti-interference ability and a sensitivity of 101 μA·cm⁻²·mM⁻¹ in the electrochemical detection of glucose. This method has the advantages of high resolution, high consistency, simple process and low cost, which provides a feasible operation scheme for the fabrication of biosensor array.
- DMD lithography,
- electrochemical deposition,
- microstructure array,
- electrode

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References(20)

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