可调谐光学超构材料及其应用

曹暾; 刘宽; 李阳; 廉盟; 胡子贤; 刘萱; 李贵新

doi:10.37188/CO.2021-0080

Volume 14 Issue 4

Jul. 2021

Turn off MathJax

Article Contents

Chinese Optics > 2021 > 14(4): 968-985.

CAO Tun, LIU Kuan, LI Yang, LIAN Meng, HU Zi-xian, LIU Xuan, LI Gui-xin. Tunable optical metamaterials and their applications[J]. Chinese Optics, 2021, 14(4): 968-985. doi: 10.37188/CO.2021-0080

Citation:

CAO Tun, LIU Kuan, LI Yang, LIAN Meng, HU Zi-xian, LIU Xuan, LI Gui-xin. Tunable optical metamaterials and their applications[J]. Chinese Optics, 2021, 14(4): 968-985. doi: 10.37188/CO.2021-0080

CAO Tun, LIU Kuan, LI Yang, LIAN Meng, HU Zi-xian, LIU Xuan, LI Gui-xin. Tunable optical metamaterials and their applications[J]. Chinese Optics, 2021, 14(4): 968-985. doi: 10.37188/CO.2021-0080

Citation:

CAO Tun, LIU Kuan, LI Yang, LIAN Meng, HU Zi-xian, LIU Xuan, LI Gui-xin. Tunable optical metamaterials and their applications[J]. Chinese Optics, 2021, 14(4): 968-985. doi: 10.37188/CO.2021-0080

PDF( 4580 KB)

Tunable optical metamaterials and their applications

doi: 10.37188/CO.2021-0080

CAO Tun^{1
,
,},
LIU Kuan¹,
LI Yang^{1, 2},
LIAN Meng¹,
HU Zi-xian²,
LIU Xuan³,
LI Gui-xin^{2
,
,}

1.
Department of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China
2.
Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
3.
Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China

More Information

Corresponding author: caotun1806@dlut.edu.cn; ligx@sustech.edu.cn
Received Date: 12 Apr 2021
Rev Recd Date: 11 May 2021

Available Online: 27 May 2021

Publish Date: 01 Jul 2021

Abstract

Abstract

Optical metamaterials are composed of array of artificial sub-wavelength resonators, exhibiting novel optical phenomena that not occur in natural materials. By using optical metamaterials, one can flexibly control the light propagation and realize fantastic optical phenomena such as negative refraction, cloaking and unidirectional transmission, etc. Traditional optical metamaterials usually have fixed geometric structures and unchanged material properties, which limits their capabilities of tuning optical responses. Recently, tunable optical metamaterials based on exceptional materials or structures have attracted much attention. In this review, we investigate the fundamentals of tunable optical metamaterials realized by either integrating the active materials (i.e., varactor diodes, liquid crystals, phase change materials, graphene, etc.) or reconstructing the resonators array (i.e., micro electromechanical systems, stretchable materials, etc.). We systematically summarize the progress in this area, analyze the features of tunable optical metamaterials under different control mechanisms, elaborate the challenges of tunable optical metamaterials facing in future applications, and predict the future development direction.
- optical metamaterials,
- optical metasurface,
- tunable

FullText(HTML)

References(119)

References

[1]	PENDRY J B, HOLDEN A J, STEWART W J, et al. Extremely low frequency plasmons in metallic mesostructures[J]. Physical Review Letters, 1996, 76(25): 4773-4776. doi: 10.1103/PhysRevLett.76.4773
[2]	PENDRY J B. Negative refraction makes a perfect lens[J]. Physical Review Letters, 2000, 85(18): 3966-3969. doi: 10.1103/PhysRevLett.85.3966
[3]	FANG N, LEE H, SUN CH, et al. Sub-diffraction-limited optical imaging with a silver superlens[J]. Science, 2005, 308(5721): 534-537. doi: 10.1126/science.1108759
[4]	SCHURIG D, MOCK J J, JUSTICE B J, et al. Metamaterial electromagnetic cloak at microwave frequencies[J]. Science, 2006, 314(5801): 977-980. doi: 10.1126/science.1133628
[5]	LIU R, JI C, MOCK J J, et al. Broadband ground-plane cloak[J]. Science, 2009, 323(5912): 366-369. doi: 10.1126/science.1166949
[6]	MA H F, CUI T J. Three-dimensional broadband ground-plane cloak made of metamaterials[J]. Nature Communications, 2010, 1(3): 21.
[7]	ERGIN T, STENGER N, BRENNER P, et al. Three-dimensional invisibility cloak at optical wavelengths[J]. Science, 2010, 328(5976): 337-339. doi: 10.1126/science.1186351
[8]	CUI T J, LI L L, LIU SH, et al. Information metamaterial systems[J]. iScience, 2020, 23(8): 101403. doi: 10.1016/j.isci.2020.101403
[9]	ZHELUDEV N I, KIVSHAR Y S. From metamaterials to metadevices[J]. Nature Materials, 2012, 11(11): 917-924. doi: 10.1038/nmat3431
[10]	REN ZH H, CHANG Y H, MA Y M, et al. Leveraging of MEMS technologies for optical metamaterials applications[J]. Advanced Optical Materials, 2020, 8(3): 1900653. doi: 10.1002/adom.201900653
[11]	CHEN H T, TAYLOR A J, YU N F. A review of metasurfaces: physics and applications[J]. Reports on Progress in Physics, 2016, 79(7): 076401. doi: 10.1088/0034-4885/79/7/076401
[12]	HE Q, SUN SH L, ZHOU L. Tunable/reconfigurable metasurfaces: physics and applications[J]. Research, 2019, 2019: 1849272.
[13]	CHE Y H, WANG X T, SONG Q H, et al. Tunable optical metasurfaces enabled by multiple modulation mechanisms[J]. Nanophotonics, 2020, 9(15): 4407-4431. doi: 10.1515/nanoph-2020-0311
[14]	CUI T, BAI B F, SUN H B. Tunable metasurfaces based on active materials[J]. Advanced Functional Materials, 2019, 29(10): 1806692. doi: 10.1002/adfm.201806692
[15]	CHANG Y H, WEI J X, LEE C. Metamaterials-from fundamentals and MEMS tuning mechanisms to applications[J]. Nanophotonics, 2020, 9(10): 3049-3070. doi: 10.1515/nanoph-2020-0045
[16]	MENG K, PARK S J, LI L H, et al. Tunable broadband terahertz polarizer using graphene-metal hybrid metasurface[J]. Optics Express, 2019, 27(23): 33768-33778. doi: 10.1364/OE.27.033768
[17]	ZHANG J, WEI X ZH, RUKHLENKO I D, et al. Electrically tunable metasurface with independent frequency and amplitude modulations[J]. ACS Photonics, 2020, 7(1): 265-271. doi: 10.1021/acsphotonics.9b01532
[18]	ARBABI E, ARBABI A, KAMALI S M, et al. MEMS-tunable dielectric metasurface lens[J]. Nature Communications, 2018, 9: 812. doi: 10.1038/s41467-018-03155-6
[19]	LIU X B, WANG Q, ZHANG X Q, et al. Thermally dependent dynamic meta‐holography using a vanadium dioxide integrated metasurface[J]. Advanced Optical Materials, 2019, 7(12): 1900175. doi: 10.1002/adom.201900175
[20]	KIM Y, WU P C, SOKHOYAN R, et al. Phase modulation with electrically tunable vanadium dioxide phase-change metasurfaces[J]. Nano Letters, 2019, 19(6): 3961-3968. doi: 10.1021/acs.nanolett.9b01246
[21]	LEI D Y, APPAVOO K, LIGMAJER F, et al. Optically-triggered nanoscale memory effect in a hybrid plasmonic-phase changing nanostructure[J]. ACS Photonics, 2015, 2(9): 1306-1313. doi: 10.1021/acsphotonics.5b00249
[22]	HAIL C U, MICHEL A K U, POULIKAKOS D, et al. Optical metasurfaces: evolving from passive to adaptive[J]. Advanced Optical Materials, 2019, 7(14): 1801786. doi: 10.1002/adom.201801786
[23]	ZHONG M. A multi-band metamaterial absorber based on VO₂ layer[J]. Optics &Laser Technology, 2021, 139: 106930.
[24]	KATS M A, SHARMA D, LIN J, et al. Ultra-thin perfect absorber employing a tunable phase change material[J]. Applied Physics Letters, 2012, 101(22): 221101. doi: 10.1063/1.4767646
[25]	SHU F ZH, YU F F, PENG R W, et al. Dynamic plasmonic color generation based on phase transition of vanadium dioxide[J]. Advanced Optical Materials, 2018, 6(7): 1700939. doi: 10.1002/adom.201700939
[26]	HASHEMI M R M, YANG SH H, WANG T Y, et al. Electronically-controlled beam-steering through vanadium dioxide metasurfaces[J]. Scientific Reports, 2016, 6: 35439. doi: 10.1038/srep35439
[27]	ZHU M, COJOCARU‐MIRÉDIN O, MIO A M, et al. Unique bond breaking in crystalline phase change materials and the quest for metavalent bonding[J]. Advanced Materials, 2018, 30(18): 1706735. doi: 10.1002/adma.201706735
[28]	DING F, YANG Y Q, BOZHEVOLNYI S I. Dynamic metasurfaces using phase‐change chalcogenides[J]. Advanced Optical Materials, 2019, 7(14): 1801709. doi: 10.1002/adom.201801709
[29]	JEONG Y G, BAHK Y M, KIM D S. Dynamic terahertz plasmonics enabled by phase-change materials[J]. Advanced Optical Materials, 2020, 8(3): 1900548. doi: 10.1002/adom.201900548
[30]	WUTTIG M, YAMADA N. Phase-change materials for rewriteable data storage[J]. Nature Materials, 2007, 6(11): 824-832. doi: 10.1038/nmat2009
[31]	CAO T, WANG R Z, SIMPSON R E, et al. Photonic Ge-Sb-Te phase change metamaterials and their applications[J]. Progress in Quantum Electronics, 2020, 74: 100299. doi: 10.1016/j.pquantelec.2020.100299
[32]	CAO T, ZHANG L, SIMPSON R E, et al. Mid-infrared tunable polarization-independent perfect absorber using a phase-changing metamaterial[J]. Journal of the Optical Society of America B, 2013, 30(6): 1580-1585.
[33]	GHOLIPOUR B, ZHANG J F, MACDONALD K F, et al. An all-optical, non-volatile, bidirectional, phase-change meta-switch[J]. Advanced Materials, 2013, 25(22): 3050-3054. doi: 10.1002/adma.201300588
[34]	TITTL A, MICHEL A K U, SCHÄFERLING M, et al. A switchable mid-infrared plasmonic perfect absorber with multispectral thermal imaging capability[J]. Advanced Materials, 2015, 27(31): 4597-4603. doi: 10.1002/adma.201502023
[35]	QU Y R, LI Q, DU K K, et al. Dynamic thermal emission control based on ultrathin plasmonic metamaterials including phase-changing material GST[J]. Laser &Photonics Reviews, 2017, 11(5): 1700091.
[36]	BEHERA J K, LIU K, LIAN M, et al. A reconfigurable hyperbolic metamaterial perfect absorber[J]. Nanoscale Advances, 2021, 3(6): 1758-1766. doi: 10.1039/D0NA00787K
[37]	CAO T, LIU K, LU L, et al. Large-area broadband near-perfect absorption from a thin chalcogenide film coupled to gold nanoparticles[J]. ACS Applied Materials &Interfaces, 2019, 11(5): 5176-5182.
[38]	JULIAN M N, WILLIAMS C, BORG S, et al. Reversible optical tuning of GeSbTe phase-change metasurface spectral filters for mid-wave infrared imaging[J]. Optica, 2020, 7(7): 746-754. doi: 10.1364/OPTICA.392878
[39]	DE GALARRETA C R, SINEV I, ALEXEEV A M, et al. Reconfigurable multilevel control of hybrid all-dielectric phase-change metasurfaces[J]. Optica, 2020, 7(5): 476-484. doi: 10.1364/OPTICA.384138
[40]	WANG Y F, LANDREMAN P, SCHOEN D, et al. Electrical tuning of phase-change antennas and metasurfaces[J]. Nature Nanotechnology, 2021. doi: 10.1038/s41565-021-00882-8
[41]	ZHANG Y F, FOWLER C, LIANG J H, et al. Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material[J]. Nature Nanotechnology, 2021. doi: 10.1038/s41565-021-00881-9
[42]	HOSSEINI P, WRIGHT C D, BHASKARAN H. An optoelectronic framework enabled by low-dimensional phase-change films[J]. Nature, 2014, 511(7508): 206-211. doi: 10.1038/nature13487
[43]	YOO S, GWON T, EOM T, et al. Multicolor changeable optical coating by adopting multiple layers of ultrathin phase change material film[J]. ACS Photonics, 2016, 3(7): 1265-1270. doi: 10.1021/acsphotonics.6b00246
[44]	DE GALARRETA C R, ALEXEEV A M, AU Y Y, et al. Nonvolatile reconfigurable phase‐change metadevices for beam steering in the near infrared[J]. Advanced Functional Materials, 2018, 28(10): 1704993. doi: 10.1002/adfm.201704993
[45]	BAI W, YANG P, HUANG J, et al. Near-infrared tunable metalens based on phase change material Ge₂Sb₂Te₅[J]. Scientific Reports, 2019, 9(1): 5368. doi: 10.1038/s41598-019-41859-x
[46]	STAUDE I, SCHILLING J. Metamaterial-inspired silicon nanophotonics[J]. Nature Photonics, 2017, 11(5): 274-284. doi: 10.1038/nphoton.2017.39
[47]	HORIE Y, ARBABI A, ARBABI E, et al. High-speed, phase-dominant spatial light modulation with silicon-based active resonant antennas[J]. ACS Photonics, 2018, 5(5): 1711-1717. doi: 10.1021/acsphotonics.7b01073
[48]	RAHMANI M, XU L, MIROSHNICHENKO A E, et al. Reversible thermal tuning of all-dielectric metasurfaces[J]. Advanced Functional Materials, 2017, 27(31): 1700580. doi: 10.1002/adfm.201700580
[49]	NGUYEN Q M, ANTHONY T K, ZAGHLOUL A I. Free-Space-Impedance-Matched composite dielectric metamaterial with high refractive index[J]. IEEE Antennas and Wireless Propagation Letters, 2019, 18(12): 2751-2755. doi: 10.1109/LAWP.2019.2951122
[50]	CHEN X, FAN W H. Tunable bound states in the continuum in all-dielectric terahertz metasurfaces[J]. Nanomaterials, 2020, 10(4): 623. doi: 10.3390/nano10040623
[51]	ZHONG M, JIANG X T, ZHU X L, et al. Design and fabrication of a single metal layer tunable metamaterial absorber in THz range[J]. Optics &Laser Technology, 2020, 125: 106023.
[52]	MA Z, MENG X, LIU X, et al. Liquid crystal enabled dynamic nanodevices[J]. Nanomaterials, 2018, 8(11): 871.
[53]	SI G Y, ZHAO Y H, LEONG E S P, et al. Liquid-crystal-enabled active plasmonics: a review[J]. Materials, 2014, 7(2): 1296-1317. doi: 10.3390/ma7021296
[54]	KOMAR A, FANG ZH, BOHN J, et al. Electrically tunable all-dielectric optical metasurfaces based on liquid crystals[J]. Applied Physics Letters, 2017, 110(7): 071109. doi: 10.1063/1.4976504
[55]	ATORF B, MÜHLENBERND H, MULDARISNUR M, et al. Electro-optic tuning of split ring resonators embedded in a liquid crystal[J]. Optics Letters, 2014, 39(5): 1129-1132. doi: 10.1364/OL.39.001129
[56]	LI SH Q, XU X W, VEETIL R M, et al. Phase-only transmissive spatial light modulator based on tunable dielectric metasurface[J]. Science, 2019, 364(6445): 1087-1090. doi: 10.1126/science.aaw6747
[57]	SHARMA M, HENDLER N, ELLENBOGEN T. Electrically switchable color tags based on active liquid‐crystal plasmonic metasurface platform[J]. Advanced Optical Materials, 2020, 8(7): 1901182. doi: 10.1002/adom.201901182
[58]	FRANKLIN D, FRANK R, WU S T, et al. Actively addressed single pixel full-colour plasmonic display[J]. Nature Communications, 2017, 8: 15209. doi: 10.1038/ncomms15209
[59]	AMER A A G, SAPUAN S Z, NASIMUDDIN N, et al. A comprehensive review of metasurface structures suitable for RF energy harvesting[J]. IEEE Access, 2020, 8: 76433-76452. doi: 10.1109/ACCESS.2020.2989516
[60]	XU W R, SONKUSALE S. Microwave diode switchable metamaterial reflector/absorber[J]. Applied Physics Letters, 2013, 103(3): 031902. doi: 10.1063/1.4813750
[61]	ZHANG L, CHEN X Q, LIU SH, et al. Space-time-coding digital metasurfaces[J]. Nature Communications, 2018, 9(1): 4334. doi: 10.1038/s41467-018-06802-0
[62]	CUI T J, QI M Q, WAN X, et al. Coding metamaterials, digital metamaterials and programmable metamaterials[J]. Light:Science &Applications, 2014, 3(10): e218.
[63]	LI L L, SHUANG Y, MA Q, et al. Intelligent metasurface imager and recognizer[J]. Light:Science &Applications, 2019, 8: 97.
[64]	LI L L, CUI T J, JI W, et al. Electromagnetic reprogrammable coding-metasurface holograms[J]. Nature Communications, 2017, 8(1): 197. doi: 10.1038/s41467-017-00164-9
[65]	HUANG Y W, LEE H W H, SOKHOYAN R, et al. Gate-tunable conducting oxide metasurfaces[J]. Nano Letters, 2016, 16(9): 5319-5325. doi: 10.1021/acs.nanolett.6b00555
[66]	SHIRMANESH G K, SOKHOYAN R, PALA R A, et al. Dual-gated active metasurface at 1550 nm with wide (> 300°) phase tunability[J]. Nano Letters, 2018, 18(5): 2957-2963. doi: 10.1021/acs.nanolett.8b00351
[67]	FOROUZMAND A, SALARY M M, INAMPUDI S, et al. A tunable multigate indium-tin-oxide-assisted all-dielectric metasurface[J]. Advanced Optical Materials, 2018, 6(7): 1701275. doi: 10.1002/adom.201701275
[68]	PARK J, JEONG B G, KIM S I, et al. All-solid-state spatial light modulator with independent phase and amplitude control for three-dimensional LiDAR applications[J]. Nature Nanotechnology, 2021, 16(1): 69-76. doi: 10.1038/s41565-020-00787-y
[69]	WANG F, ZHANG Y B, TIAN CH SH, et al. Gate-variable optical transitions in graphene[J]. Science, 2008, 320(5873): 206-209. doi: 10.1126/science.1152793
[70]	LI Z Q, HENRIKSEN E A, JIANG Z, et al. Dirac charge dynamics in graphene by infrared spectroscopy[J]. Nature Physics, 2008, 4(7): 532-535. doi: 10.1038/nphys989
[71]	YAO Y, SHANKAR R, KATS M A, et al. Electrically tunable metasurface perfect absorbers for ultrathin mid-infrared optical modulators[J]. Nano Letters, 2014, 14(11): 6526-6532. doi: 10.1021/nl503104n
[72]	BONACCORSO F, SUN Z, HASAN T, et al. Graphene photonics and optoelectronics[J]. Nature Photonics, 2010, 4(9): 611-622. doi: 10.1038/nphoton.2010.186
[73]	SHERROTT M C, HON P W C, FOUNTAINE K T, et al. Experimental demonstration of > 230° phase modulation in gate-tunable graphene–gold reconfigurable mid-infrared metasurfaces[J]. Nano Letters, 2017, 17(5): 3027-3034. doi: 10.1021/acs.nanolett.7b00359
[74]	FAN K B, SUEN J, WU X Y, et al. Graphene metamaterial modulator for free-space thermal radiation[J]. Optics Express, 2016, 24(22): 25189-25201. doi: 10.1364/OE.24.025189
[75]	ZENG B B, HUANG ZH Q, SINGH A, et al. Hybrid graphene metasurfaces for high-speed mid-infrared light modulation and single-pixel imaging[J]. Light:Science &Applications, 2018, 7: 51.
[76]	DABIDIAN N, DUTTA-GUPTA S, KHOLMANOV I, et al. Experimental demonstration of phase modulation and motion sensing using graphene-integrated metasurfaces[J]. Nano Letters, 2016, 16(6): 3607-3615. doi: 10.1021/acs.nanolett.6b00732
[77]	CAI H L, HUANG Q P, HU X, et al. All‐optical and ultrafast tuning of terahertz plasmonic metasurfaces[J]. Advanced Optical Materials, 2018, 6(14): 1800143. doi: 10.1002/adom.201800143
[78]	GU J Q, SINGH R, LIU X J, et al. Active control of electromagnetically induced transparency analogue in terahertz metamaterials[J]. Nature Communications, 2012, 3: 1151. doi: 10.1038/ncomms2153
[79]	YANG Y M, KAMARAJU N, CAMPIONE S, et al. Transient GaAs plasmonic metasurfaces at terahertz frequencies[J]. ACS Photonics, 2017, 4(1): 15-21. doi: 10.1021/acsphotonics.6b00735
[80]	SHCHERBAKOV M R, LIU SH, ZUBYUK V V, et al. Ultrafast all-optical tuning of direct-gap semiconductor metasurfaces[J]. Nature Communications, 2017, 8: 17. doi: 10.1038/s41467-017-00019-3
[81]	YANG Y M, KELLEY K, SACHET E, et al. Femtosecond optical polarization switching using a cadmium oxide-based perfect absorber[J]. Nature Photonics, 2017, 11(6): 390-395. doi: 10.1038/nphoton.2017.64
[82]	CHANANA A, LIU X J, ZHANG CH, et al. Ultrafast frequency-agile terahertz devices using methylammonium lead halide perovskites[J]. Science Advances, 2018, 4(5): eaar7353. doi: 10.1126/sciadv.aar7353
[83]	MANJAPPA M, SRIVASTAVA Y K, SOLANKI A, et al. Hybrid lead halide perovskites for ultrasensitive photoactive switching in terahertz metamaterial devices[J]. Advanced Materials, 2017, 29(32): 1605881. doi: 10.1002/adma.201605881
[84]	KUMAR A, SOLANKI A, MANJAPPA M, et al. Excitons in 2D perovskites for ultrafast terahertz photonic devices[J]. Science Advances, 2020, 6(8): eaax8821. doi: 10.1126/sciadv.aax8821
[85]	BELOTELOV V I, KREILKAMP L E, AKIMOV I A, et al. Plasmon-mediated magneto-optical transparency[J]. Nature Communications, 2013, 4: 2128. doi: 10.1038/ncomms3128
[86]	TAN ZH Y, FAN F, LI T F, et al. Magnetically active terahertz wavefront control and superchiral field in a magneto-optical Pancharatnam-Berry metasurface[J]. Optics Express, 2021, 29(2): 2037-2048. doi: 10.1364/OE.414004
[87]	QIN J, DENG L J, KANG T T, et al. Switching the optical chirality in magnetoplasmonic metasurfaces using applied magnetic fields[J]. ACS Nano, 2020, 14(3): 2808-2816. doi: 10.1021/acsnano.9b05062
[88]	ZUBRITSKAYA I, MACCAFERRI N, EZEIZA X I, et al. Magnetic control of the chiroptical plasmonic surfaces[J]. Nano Letters, 2018, 18(1): 302-307. doi: 10.1021/acs.nanolett.7b04139
[89]	GUTRUF P, ZOU CH J, WITHAYACHUMNANKUL W, et al. Mechanically tunable dielectric resonator metasurfaces at visible frequencies[J]. ACS Nano, 2016, 10(1): 133-141. doi: 10.1021/acsnano.5b05954
[90]	TSENG M L, YANG J, SEMMLINGER M, et al. Two-dimensional active tuning of an aluminum plasmonic array for full-spectrum response[J]. Nano Letters, 2017, 17(10): 6034-6039. doi: 10.1021/acs.nanolett.7b02350
[91]	YOO D, JOHNSON T W, CHERUKULAPPURATH S, et al. Template-stripped tunable plasmonic devices on stretchable and rollable substrates[J]. ACS Nano, 2015, 9(11): 10647-10654. doi: 10.1021/acsnano.5b05279
[92]	MORITS D, MORITS M, OVCHINNIKOV V, et al. Multifunctional stretchable metasurface for the THz range[J]. Journal of Optics, 2014, 16(3): 032001. doi: 10.1088/2040-8978/16/3/032001
[93]	MALEK S C, EE H S, AGARWAL R. Strain multiplexed metasurface holograms on a stretchable substrate[J]. Nano Letters, 2017, 17(6): 3641-3645. doi: 10.1021/acs.nanolett.7b00807
[94]	KAMALI S M, ARBABI A, ARBABI E, et al. Decoupling optical function and geometrical form using conformal flexible dielectric metasurfaces[J]. Nature Communications, 2016, 7: 11618. doi: 10.1038/ncomms11618
[95]	SONG SH CH, MA X L, PU M B, et al. Actively tunable structural color rendering with tensile substrate[J]. Advanced Optical Materials, 2017, 5(9): 1600829. doi: 10.1002/adom.201600829
[96]	ZHANG CH, JING J X, WU Y K, et al. Stretchable all-dielectric metasurfaces with polarization-insensitive and full-spectrum response[J]. ACS Nano, 2020, 14(2): 1418-1426. doi: 10.1021/acsnano.9b08228
[97]	HUANG F M, BAUMBERG J J. Actively tuned plasmons on elastomerically driven Au nanoparticle dimers[J]. Nano Letters, 2010, 10(5): 1787-1792. doi: 10.1021/nl1004114
[98]	CHEN W X, LIU W J, JIANG Y J, et al. Ultrasensitive, mechanically responsive optical metasurfaces via strain amplification[J]. ACS Nano, 2018, 12(11): 10683-10692. doi: 10.1021/acsnano.8b04889
[99]	PRYCE I M, AYDIN K, KELAITA Y A, et al. Highly strained compliant optical metamaterials with large frequency tunability[J]. Nano Letters, 2010, 10(10): 4222-4227. doi: 10.1021/nl102684x
[100]	LIU X, HUANG ZH, ZHU CH K, et al. Out-of-plane designed soft metasurface for tunable surface plasmon polariton[J]. Nano Letters, 2018, 18(2): 1435-1441. doi: 10.1021/acs.nanolett.7b05190
[101]	GAO Y SH, FAN Y B, WANG Y J, et al. Nonlinear holographic all-dielectric metasurfaces[J]. Nano Letters, 2018, 18(12): 8054-8061. doi: 10.1021/acs.nanolett.8b04311
[102]	WAN W W, GAO J, YANG X D. Metasurface holograms for holographic imaging[J]. Advanced Optical Materials, 2017, 5(21): 1700541. doi: 10.1002/adom.201700541
[103]	KAMALI S M, ARBABI E, ARBABI A, et al. Highly tunable elastic dielectric metasurface lenses[J]. Laser &Photonics Reviews, 2016, 10(6): 1002-1008.
[104]	SHE A L, ZHANG SH Y, SHIAN S, et al. Adaptive metalenses with simultaneous electrical control of focal length, astigmatism, and shift[J]. Science Advances, 2018, 4(2): eaap9957. doi: 10.1126/sciadv.aap9957
[105]	OPRIS D M. Polar elastomers as novel materials for electromechanical actuator applications[J]. Advanced Materials, 2018, 30(5): 1703678. doi: 10.1002/adma.201703678
[106]	SKOV A L, YU L Y. Optimization techniques for improving the performance of silicone‐based dielectric elastomers[J]. Advanced Engineering Materials, 2018, 20(5): 1700762. doi: 10.1002/adem.201700762
[107]	SHAH S I H, SARKAR A, PHON R, et al. Two‐dimensional electromechanically transformable metasurface with beam scanning capability using four independently controllable shape memory alloy axes[J]. Advanced Optical Materials, 2020, 8(22): 2001180. doi: 10.1002/adom.202001180
[108]	ROY T, ZHANG SH Y, JUNG I W, et al. Dynamic metasurface lens based on MEMS technology[J]. APL Photonics, 2018, 3(2): 021302. doi: 10.1063/1.5018865
[109]	LIU X L, PADILLA W J. Dynamic manipulation of infrared radiation with MEMS metamaterials[J]. Advanced Optical Materials, 2013, 1(8): 559-562. doi: 10.1002/adom.201300163
[110]	FU Y H, LIU A Q, ZHU W M, et al. A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split‐ring resonators[J]. Advanced Functional Materials, 2011, 21(18): 3589-3594. doi: 10.1002/adfm.201101087
[111]	HU F R, QIAN Y X, LI ZH, et al. Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array[J]. Journal of Optics, 2013, 15(5): 055101. doi: 10.1088/2040-8978/15/5/055101
[112]	KAN T, ISOZAKI A, KANDA N, et al. Enantiomeric switching of chiral metamaterial for terahertz polarization modulation employing vertically deformable MEMS spirals[J]. Nature Communications, 2015, 6: 8422.
[113]	ZHU W M, LIU A Q, ZHANG X M, et al. Switchable magnetic metamaterials using micromachining processes[J]. Advanced Materials, 2011, 23(15): 1792-1796. doi: 10.1002/adma.201004341
[114]	REEVES J B, JAYNE R K, STARK T J, et al. Tunable infrared metasurface on a soft polymer scaffold[J]. Nano Letters, 2018, 18(5): 2802-2806. doi: 10.1021/acs.nanolett.7b05042
[115]	ZHAO X G, SCHALCH J, ZHANG J D, et al. Electromechanically tunable metasurface transmission waveplate at terahertz frequencies[J]. Optica, 2018, 5(3): 303-310. doi: 10.1364/OPTICA.5.000303
[116]	NAIK G V, SCHROEDER J L, NI X J, et al. Titanium nitride as a plasmonic material for visible and near-infrared wavelengths[J]. Optical Materials Express, 2012, 2(4): 478-489. doi: 10.1364/OME.2.000478
[117]	BANG S, KIM J, YOON G, et al. Recent advances in tunable and reconfigurable metamaterials[J]. Micromachines, 2018, 9(11): 560. doi: 10.3390/mi9110560
[118]	KANG L, JENKINS R P, WERNER D H. Recent progress in active optical metasurfaces[J]. Advanced Optical Materials, 2019, 7(14): 1801813. doi: 10.1002/adom.201801813
[119]	ZHANG X G, JIANG W X, JIANG H L, et al. An optically driven digital metasurface for programming electromagnetic functions[J]. Nature Electronics, 2020, 3(3): 165-171. doi: 10.1038/s41928-020-0380-5