数字微镜器件超分辨成像光学系统装调误差影响研究

邢思远; 王超; 徐淼; 李英超; 史浩东; 刘壮; 付强

doi:10.37188/CO.2020-0220

Volume 14 Issue 5

Sep. 2021

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Chinese Optics > 2021 > 14(5): 1194-1201.

XING Si-yuan, WANG Chao, XU Miao, LI Ying-chao, SHI Hao-dong, LIU Zhuang, FU Qiang. Influence of alignment error on DMD super-resolution imaging optical system[J]. Chinese Optics, 2021, 14(5): 1194-1201. doi: 10.37188/CO.2020-0220

Citation:

XING Si-yuan, WANG Chao, XU Miao, LI Ying-chao, SHI Hao-dong, LIU Zhuang, FU Qiang. Influence of alignment error on DMD super-resolution imaging optical system[J]. Chinese Optics, 2021, 14(5): 1194-1201. doi: 10.37188/CO.2020-0220

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Influence of alignment error on DMD super-resolution imaging optical system

doi: 10.37188/CO.2020-0220

XING Si-yuan^{1, 3
,},
WANG Chao^{1, 2},
XU Miao^{1, 3},
LI Ying-chao^{1, 3
,
,},
SHI Hao-dong^{1, 3},
LIU Zhuang^{1, 3},
FU Qiang^{1, 3}

1.
Jilin Province Key Laboratory of Space Opto-Electronics Technology, Changchun University of Science and Technology, Changchun 130022, China
2.
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
3.
School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, China

Funds: Supported by National Natural Science Foundation of China(No. 61805028, No. 61805027, No. 61705019, No. 61701045); The Second Batch of Rapid Support Projects in 2020(No. 61404140517); Special Project of Science and Industry Bureau(No. KJSP2016010202); Joint Astronomical Fund of National Natural Science Foundation of China(No. U1731240); Natural Science Foundation of Jilin Province(No. 20180101338JC); Open Fund of State Key Laboratory of Applied Optics(No. SKLA02020001A11)

More Information

Corresponding author: hsjlyc@126.com
Received Date: 28 Dec 2020
Rev Recd Date: 14 Jan 2021

Available Online: 08 May 2021

Publish Date: 18 Sep 2021

Abstract

Abstract

At present, most of the research on super-resolution imaging technology is focused on the super-resolution reconstruction algorithm, but the influence of the alignment error of an optical system on the super-resolution imaging results has not been reported. To solve this problem, We researche the influence of alignment error on super-resolution imaging. First, the basic imaging model of super-resolution imaging optical system based on Digital Micro-mirror Device (DMD) is established. A DMD super-resolution imaging optical system with operating band of 8~12 μm is designed, and a method used to analyze the influence of the alignment error on super-resolution imaging quality is proposed. In the imaging model, alignment errors such as eccentricity, tilt, lens spacing error and defocus are introduced, and the reconstruction results are analyzed. Finally, the range of tolerance of the super-resolution imaging optical system is obtained. The results show that the total eccentricity error in the X direction is controlled within ± 0.07 mm, and that in the Y direction is within ±0.05 mm; the total tilt error in the X and Y directions is controlled within ±0.06°; the overall lens spacing error is controlled within ±0.02 mm; the defocusing amount of the imaging object lens is controlled within ±0.04 mm; the defocusing amount of the projection objective lens is controlled within ±0.05 mm, and within this range, the super-resolution imaging optical system can ensure the quality of super-resolution imaging.
- alignment error tolerance,
- super-resolution imaging,
- optical design,
- digital micro-mirror device

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References(18)

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