[1]

[1] OTAKIK, YAMAMOTOT. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror[J]. J. Vac.Sci. Technol. B, 2002, 20(1):295-300.
[2] SOMMARGRENG E, PHILLIOND W, JOHNM A, et al. 100-picometer interferometry for EUVL[J]. SPIE, 2002, 4688:316.
[3] TAYLORJ S, SOMMARGRENG E, SWEENEYD W, et al. The fabrication and testing of optics for EUV projection lithography[J]. SPIE, 1998, 3331:580-590.
[4] TAKEUCHI S, KAKUCHI O, YAMAZOEK, et al. Visible light point-diffraction interferometer for testing of EUVL optics[J]. SPIE, 2006:61510E-1-8.
[5] SMARTT R N, STRONG J. Point diffraction interferometer[J]. Opt. Soc. Am., 1974, 62:737-742.
[6] SOMMARGREN G E. Diffraction methods raise interferometer accuracy[J]. Laser Focus World, 1996, 32(8):61-66.
[7] 刘国淦, 张学军, 王权陡, 等. 光纤点衍射干涉仪技术研究[J]. 光学 精密工程, 2001, 9(2):142-145. LIU G G, ZHANG X J, WANG Q D, et al. Fiber point diffraction[J]. Opt. Precision Eng., 2001, 9(2):142-145.(in Chinese)
[8] 张宇. 极紫外光刻物镜系统波像差检测技术研究[D].长春:中国科学院长春光学精密机械与物理研究所, 2012. ZHANG Y. Research of measuring technology for wavefront aberration of EUVL objective system[D]. Changchun:Changchun Insitute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2012.(in Chinese)
[9] JOHNSONM A, PHILLIOND W, SOMMARGRENG E, et al. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems[J]. SPIE, 2005, 5869:156.
[10] 卢增雄, 金春水, 张立超, 等. 极紫外三维小孔矢量衍射波面质量分析[J]. 光学学报, 2012, 30(10):2849-2854. LU Z X, JIN CH SH, ZHANG L CH, et al.Wavefront quality analysis of three-dimension pinhole vector diffractional in extreme ultraviolet region[J]. Acta Optica Sinica, 2012, 30(10):2849-2854.(in Chinese)
[11] 师途, 杨甬英, 张磊, 等. 非球面光学元件的面形检测技术[J]. 中国光学, 2014, 7(1):26-46. SHI T, YANG YY, ZHANG L, et al. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1):26-46.(in Chinese)
[12] PHILLION D W, SOMMARGRENG E. Calibration of symmetric and non-sysmmetric errors for interferometry of ultra-precise imaging systems[J]. SPIE, 2005, 58690R-1-12.
[13] 于杰. 用于相移点衍射干涉仪的加权最小二乘相位提取算法[J]. 中国光学, 2010, 3(6):605-615. YU J. Weighted least square phase extraction algorithm for phase-shifting diffraction interferometer[J]. Chinese Optics, 2010, 3(6):605-615.(in Chinese)