| [1] FUKAGAWA Y,SHINANOY J,NAKAMORIM M. Optimum adjustment for distortion in semiconductor lithography equipment[J]. J. Advanced Mechanical Design Systems and Manufacturing,2008,2(3):378-382. [2] SHINANO Y,FUKAGAWA Y,TAKANOY Y,et al.. Lens system adjustment in semiconductor lithography equipment:optimization for lens groups rotation[J]. J. Advanced Mechanical Design Systems and Manufacturing,2008,2(5):844-852. [3] YOSHINARA T,KOIZUMI R,TAKAHASHI K,et al.. Realization of very-small aberration projection lenses[J]. SPIE,2000,4000:559-566. [4] 鲁亚飞,范大鹏,范世珣,等. 快速反射镜两轴柔性支撑设计[J]. 光学 精密工程,2010,18(12):257412582. LU Y F,FAN D P,FAN SH X,et al.. Design of two-axis elastic support for fast steering mirror[J]. Opt. Precision Eng.,2010,18(12):2574-2582.(in Chinese) [5] 王忠素,翟岩,梅贵,等. 空间光学遥感器反射镜柔性支撑的设计[J]. 光学 精密工程,2010,18(8):1833-1841. WANG ZH S,ZHAI Y,MEI G,et al.. Design of flexible support structure of reflector in space remote sensor[J]. Opt. Precision Eng.,2010,18(8):1833-1841.(in Chinese) [6] 沙巍,张星祥,陈长征,等. 圆形反射镜无隙支撑方法的应用[J]. 光学 精密工程,2010,18(10):2199-2205. SHA W,ZHANG X X,CHEN CH ZH,et al.. Application of zero clearance support method based on circle mirrors[J]. Opt. Precision Eng.,2010,18(10):2199-2205.(in Chinese) [7] AHMAD A. Optomechanical Engineering Handbook[M]. Boca Raton:CRC Press,1999. [8] WATSON D C. Kinematic optical mounting assembly with flexures:US:6,922,293. 2005-07-26. [9] SPINALI. Kinematic optical mounting:US:6,400,516. 2002-06-04 [10] MATSUYAMA T,OHMURA Y,WILLIAMSON D M. The lithographic lens:its history and evolution[J]. SPIE,2006,6154:615403. [11] 吴鹰飞,周兆英. 柔性铰链的设计计算[J]. 工程力学,2002,19(6):136-140. WU Y F,ZHOU ZH Y. Design of flexure hinges[J]. Eng. Mechanics,2002,19(6):136-140.(in Chinese) [12] 朱仁胜,沈健,谢祖强,等. 双轴柔性铰链柔度的设计计算[J]. 合肥工业大学学报,2009,32(9):1370-1373. ZHU R S,SHEN J,XIE Z Q,et al.. Design calculation of double-axis flexure hinges[J]. J. Hefei University of Technology(Natural Science),2009,32(9):1370-1373.(in Chinese) [13] YONG Y K,LU T F. Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges[J]. Mechanism and Machine Theory,2009,44(6):1156-1175. [14] 陈伟,丁亚林,惠守文,等. 碳化硅扫描反射镜支撑结构设计[J]. 中国光学,2012,5(2):161-166. CHEN W,DING Y L,HUI SH W,et al.. Design of kinematic mount for SiC scanning reflective mirror[J]. Chinese Optics,2012,5(2):161-166.(in Chinese) |