投影物镜小比率模型的计算机辅助装调

赵阳; 巩岩; 赵阳; 巩岩

doi:10.3788/CO.20120504.0394

[1] 王丽萍. 极紫外投影光刻光学系统[J]. 中国光学与应用光学 ,2010,3(5):452-461. WANG L P. Optical system of extreme ultraviloet lithography[J]. Chinese J. Opt. Appl. Opt.,2010,3(5):452-461.(in Chinese) [2] FLAGELLO D G,DE KLERK J,DAVIES G,et al.. Towards a comprehensive control of full-field image quality in optical photolithography[J]. SPIE,1997,3051:672-685. [3] 刘磊,李景林,吕清涛,等. 大口径反射光学系统装调装置设计研究[J]. 光学精密工程 ,2005,增1:134-137. LIU L,LI J L,LV Q T,et al.. Research on adjusting device of large aperture reflective optics system[J]. Opt. Precision Eng.,2005,S1:134-137.(in Chinese) [4] 孙敬伟,王建立,陈涛,等. 地平式大口径地基望远镜主光学系统装调技术[J]. 激光与红外 ,2010,40(3):233-237. SUN J W,WANG J L,CHEN T,et al.. Alignment technology of the large alt-azimuth ground-base telescope main optical system[J]. Laser & Infrared,2010,40(3):233-237.(in Chinese) [5] 李旭阳,李英才,马臻,等. 折轴三反射光学系统的计算机辅助装调技术研究[J]. 应用光学 ,2009,30(6):901-906. LI X Y,LI Y C,MA ZH,et al.. Computer-aided alignment mothod of coaxial three-mirror-anastigmat system[J]. J. Appl. Opt.,2009,30(6):901-906.(in Chinese) [6] 张庭成,王涌天,常军,等. 反射变焦系统的计算机辅助装调[J]. 光学学报 ,2010,30(6):1688-1692. ZHANG T CH,WANG Y T,CHANG J,et al.. Computer-aided alignment for reflective zoom systems[J]. Acta Optica Sinica,2010,30(6):1688-1692.(in Chinese) [7] LUNDGREN M A,WOLFE W L. Alignemnt of a three-mirror off-axis telescope by reverse optimization[J]. Opt. Engineering,1991,30(3):307-311. [8] 孙敬伟,陈涛,王建立,等. 主次镜系统的计算机辅助装调[J]. 光学精密工程 ,2010,18(10):2156-2163. SUN J W,CHEN T,WANG J L,et al.. Computer-aided alignment for primary and secondary mirrors[J]. Opt. Precision Eng.,2010,18(10):2156-2163.(in Chinese) [9] 陈钦芳,李英才,马臻,等. 离轴非球面反射镜补偿检验的计算机辅助装调技术研究[J]. 光子学报 ,2010,39(12):2220-2223. CHEN Q F,LI Y C,MA ZH,et al.. Computer-aided alignment of off-axis aspheric mirrors in null testing[J]. Acta Photonica Sinica,2010,39(12):2220-2223.(in Chinese) [10] 巩盾,田铁印,王红. 利用Zernike系数对离轴三反射系统进行计算机辅助装调[J]. 光学精密工程 ,2010,18(8):1754-1759. GONG D,TIAN T Y,WANG H. Computer-aided alignment of off-axis three-mirror system by using Zernike coefficients[J]. Opt. Precision Eng.,2010,18(8):1754-1759.(in Chinese) [11] 车驰骋,李英才,樊学武,等. 基于矢量波像差理论的计算机辅助装调技术研究[J]. 光子学报 ,2008,37(8):1630-1634. CHE CH CH,LI Y C,FAN X W,et al.. Research on computer-aided alignment based on vector aberration theory[J]. Acta Photonica Sinica,2008,37(8):1630-1634.(in Chinese) [12] LIU J F,LONG F N,ZHANG W. Study on computer-aided alignment method[J]. SPIE,2005,5638:674-681. [13] 薛晓光,李国喜,龚京忠,等. 面向装配过程的精密光学系统计算机辅助装调技术[J]. 计算机集成制造系统 ,2011,17(10):2163-2170. XUE X G,LI G X,GONG J ZH,et al.. Assembly process oriented computer aided alignment technology of precision optical system[J]. Computer Integrated Manufacturing Systems,2011,17(10):2163-2170.(in Chinese) [14] YANG H S,KIM S H,LEE Y W,et al.. Computer aided alignment using Zernike coefficients[J]. SPIE,2006,6293:6293O1. [15] AGUROK I. Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field-of-view of optical systems: lens design, testing, and alignment[J]. SPIE,1998,3430:80-87.