高功率准分子激光主振荡功率放大系统光学元件的稳定性

沈炎龙; 黄珂; 马连英; 郑国鑫; 王大辉

Volume 4 Issue 1

Feb. 2011

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Chinese Optics > 2011 > 4(1): 66-71.

SHEN Yan-long, HUANG Ke, MA Lian-ying, ZHENG Guo-xin, WANG Da-hui. Optical element stability of high power excimer laser MOPA system[J]. Chinese Optics, 2011, 4(1): 66-71.

Citation:

SHEN Yan-long, HUANG Ke, MA Lian-ying, ZHENG Guo-xin, WANG Da-hui. Optical element stability of high power excimer laser MOPA system[J]. Chinese Optics, 2011, 4(1): 66-71.

SHEN Yan-long, HUANG Ke, MA Lian-ying, ZHENG Guo-xin, WANG Da-hui. Optical element stability of high power excimer laser MOPA system[J]. Chinese Optics, 2011, 4(1): 66-71.

Citation:

SHEN Yan-long, HUANG Ke, MA Lian-ying, ZHENG Guo-xin, WANG Da-hui. Optical element stability of high power excimer laser MOPA system[J]. Chinese Optics, 2011, 4(1): 66-71.

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Optical element stability of high power excimer laser MOPA system

State Key Laboratory of Laser Interaction with Matter, Northwest Institute of Nuclear Technology,Xi'an 710024,China

Received Date: 16 Aug 2010
Rev Recd Date: 24 Oct 2010
Publish Date: 25 Feb 2011

Abstract

Abstract

In order to analyze the impacts of stability of optical elements on the target positioning in a high power excimer laser Master Oscillator Power Amplification(MOPA) system, an analyzing model for the system was established and a mirror mount was also designed according to the analyzing results to meet the need for the system experiment. Firstly, in light of the unique feature of high power excimer laser MOPA system, the beam path was effectively simplified, and a three dimensional layout model to analyze the system was established. Then, in terms of the model and the requirements of target positioning precision of the system, the stability request of every optical element in this system was obtained by using the three dimensional coordinate conversion and ray-tracing. Finally, the stability parameters of the mirror mount designed by ourselves were measured. The simulating results indicate that the rotations of mirrors and the drift of lens vertical to the optical axis are the chief factors affecting the target positioning precision. In addition, the rotations of mirrors in the main amplifiers round X and Y axes should be controlled less than 0.8 and 1.6 rad, respectively. The experimental results for the mirror mount designed point out that the rotations round X and Y axes are not more than 0.6 and 0.81 rad, respectively, which means that the tolerance of coordinate parameters of each optical element corresponding to the target positioning precision satisfies the requirement of the system.
- excimer laser,
- Master Oscillator Power Amplification(MOPA) system,
- coordinate conversion,
- ray-tracing,
- stability

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References

[1] VOROBYEV A Y,GUO CH L. Colorizing metals with femtosecond laser pulses[J]. Appl. Phys. Lett.,2008,92:041914. [2] VOROBYEV A Y,GUO CH L. Femtosecond laser blackening of platinum[J]. J. Appl. Phys.,2008,104:053516 [3] VOROBYEV A Y,GUO CH L. Effects of nanostructure covered femtosecond laser induced periodic surface structures on optical absorptance of metals[J]. Appl. Phys.,2007,86:321324 [4] TOMITA T K R,KINOSHITA K T,MATSUO SH G K,et al.. Effect of surface roughening on femtosecond laser induced ripple structures[J]. Appl. Phys. Lett.,2007,90:153115. [5] BONSE J. Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses[J]. Appl. Phys.,2005,97:013538. [6] WU Q H,MA Y R. Femtosecond laser induced periodic surface structure on diamond film[J]. Appl. Phys. Lett.,2003,82(11):1703-1705. [7] KRENN J R,WEEBER J C. Surface plasmon polaritons inmetal stripes and wires[J]. R. Soc. Lond. A,2004, 362:739-756. [8] RAETHER H. Surface Plasmons[M]. Berlin:Springer-Verlag,1988. [9] BARNES W L,MURRAY W A,DINTINGER J. Surface plasmon polaritons and their role in the enhanced transmission of light through periodic arrays of subwavelength holes in a metal film[J]. Phys. Rev. Lett.,2004,92(10):107401. [10] VOROBYEV A Y,GUO CH L. Femtosecond laser induced periodic surface structure formation on tungsten[J]. Appl. Phys.,2008,104:063523. [11] BONCH-BRUEVICH A M,LIBENSON M N,MAKIN V S,et al.. Surface electromagnetic waves in optics[J]. Opt. Eng.,1992,31(4):718-730. [12] VOROBYEV A Y,MAKIN V S,GUO CH L. Periodic ordering of random surface nanostructures induced by femtosecond laser pulses on metals[J]. Appl. Phys.,2007,101:0349031. [13] HWANG T Y,VOROBYEV A Y,GUO CH L. Surface-plasmon-enhanced photoelectron emission from nanostructure-covered periodic grooves on metals[J]. Phys. Rev. B,2009,79:085425.

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