Citation: | LI Hua-dong, QI Ke-qi, SHI Qiang, WANG Shao-xin, WANG Zhi. Performance test of piezoelectric actuators for space inertial sensors[J]. Chinese Optics, 2020, 13(2): 344-353. doi: 10.3788/CO.20201302.0344 |
[1] |
罗子人, 白姗, 边星, 等.空间激光干涉引力波探测[J].力学进展, 2013, 43(4):415-447. http://d.old.wanfangdata.com.cn/Periodical/twxjz201501004
LUO Z R, BAI SH, BIAN X, et al..Space laser interferometry gravitational wave detection[J]. Advances in Mechanics, 2013, 43(4):415-447. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/twxjz201501004
|
[2] |
王智, 马军, 李静秋.空间引力波探测计划-LISA系统设计要点[J].中国光学, 2015, 8(6):980-987. doi: 10.3788/CO.20150806.0980
WANG ZH, MA J, LI J Q. Space-based gravitational wave detection mission:design highlights of LISA system[J]. Chinese Optics, 2015, 8(6):980-987. (in Chinese) doi: 10.3788/CO.20150806.0980
|
[3] |
高瑞弘, 刘河山, 罗子人, 等.太极计划激光指向调控方案介绍[J].中国光学, 2019, 12(3):425-431. doi: 10.3788/CO.20191203.0425
GAO R H, LIU H SH, LUO Z R, et al..Introduction of laser pointing scheme in the Taiji program[J]. Chinese Optics, 2019, 12(3):425-431. (in Chinese) doi: 10.3788/CO.20191203.0425
|
[4] |
赵亚, 姚东, 王智, 等.应用于空间精密测量的全玻璃光纤耦合器的系统设计[J].中国光学, 2019, 12(3):432-440. doi: 10.3788/CO.20191203.0432
ZHAO Y, YAO D, WANG ZH, et al..System design of all glass fiber couplers for precise space measurement[J]. Chinese Optics, 2019, 12(3):432-440. (in Chinese) doi: 10.3788/CO.20191203.0432
|
[5] |
LI Y P, LIU H SH, ZHAO Y, et al..Demonstration of an ultraprecise optical bench for the Taiji space gravitational wave detection path finder mission[J]. Applied Sciences, 2019, 9(10):2087. doi: 10.3390/app9102087
|
[6] |
王少鑫, 齐克奇, 王玉坤, 等.电极不对称性对惯性传感器性能损失的研究[J].中国光学, 2019, 12(3):455-462. doi: 10.3788/CO.20191203.0455
WANG SH X, QI K Q, WANG Y K, et al..Study on loss of performance in inertial sensors due to electrode asymmetry[J]. Chinese Optics, 2019, 12(3):455-462. (in Chinese) doi: 10.3788/CO.20191203.0455
|
[7] |
白彦峥, 田蔚, 周泽兵, 等.高精度空间加速度计及其应用[J].空间科学学报, 2010, 30(6):601-606. http://d.old.wanfangdata.com.cn/Periodical/kjkxxb201006014
BAI Y ZH, TIAN W, ZHOU Z B, et al..High-precision space-borne accelerometer and its applications[J]. Chinese Journal of Space Science, 2010, 30(6):601-606. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/kjkxxb201006014
|
[8] |
BORTOLUZZI D, MÁUSLI P A, ANTONELLO R, et al..Modeling and identification of an electro-mechanical system:the LISA grabbing positioning and release mechanism case[J]. Advances in Space Research, 2011, 47(3):453-465. doi: 10.1016/j.asr.2010.09.004
|
[9] |
BORTOLUZZI D, ZANONI C, VITALE S.Improvements in the measurement of metallic adhesion dynamics[J]. Mechanical Systems and Signal Processing, 2015, 52-53:600-613. doi: 10.1016/j.ymssp.2014.06.002
|
[10] |
BORTOLUZZI D, BAGLIVO L, BENEDETTI M, et al..Test-mass release phase ground testing for the LISA path finder mission[C]. American Institute of Physics Conference Proceedings of the 6th International LISA Symposium, NASA Goddard Space Flight Center, 2006: 556-561.
|
[11] |
赵宏伟, 刘建芳, 华顺明, 等.压电型步进精密旋转驱动器[J].光学 精密工程, 2005, 13(3):305-310. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc200503010
ZHAO H W, LIU J F, HUA SH M, et al..Piezoelectric-type stepping precision rotary actuator[J]. Opt. Precision Eng., 2005, 13(3):305-310. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc200503010
|
[12] |
李鹏志.压电促动器的纳米级精度控制及其在光刻物镜中的应用研究[D].长春: 中国科学院大学(中国科学院长春光学精密机械与物理研究所), 2019.
LI P ZH.Research on nano scale precise control of piezoelectric actuator and its application in lithographic projection lens[D]. Changchun: University of Chinese Academy of Sciences(Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences), 2019. (in Chinese)
|
[13] |
LI J P, ZHAO H W, QU X T, et al..Development of a compact 2-DOF precision piezoelectric positioning platform based on inchworm principle[J]. Sensors and Actuators A:Physical, 2015, 222:87-95. doi: 10.1016/j.sna.2014.12.001
|
[14] |
刘建芳.压电步进精密驱动器理论及实验研究[D].长春: 吉林大学, 2005.
LIU J F. Theoretical and experimental study on piezoelectric precision step actuator[D]. Changchun: Jilin University, 2005. (in Chinese)
|
[15] |
LI J P, ZHAO H W, QU H, et al..A piezoelectric-driven rotary actuator by means of inchworm motion[J]. Sensors and Actuators A:Physical, 2013, 194:269-276. doi: 10.1016/j.sna.2013.02.020
|
[16] |
刘宇阳.步进式压电驱动直线运动系统的研究[D].哈尔滨: 哈尔滨工业大学, 2017.
LIU Y Y. Research on linear motion system driven by stepping piezoelectric actuator[D]. Harbin: Harbin Institute of Technology, 2017. (in Chinese)
|
[17] |
齐克奇, 向阳.光刻物镜波像差检测球面波发生装置的研制[J].仪器仪表学报, 2014, 35(7):1518-1524. http://d.old.wanfangdata.com.cn/Periodical/yqyb201407010
QI K Q, XIANG Y. Development of spherical wave generating device for lithographic objective wavefront aberration detection[J]. Chinese Journal of Scientific Instrument, 2014, 35(7):1518-1524. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/yqyb201407010
|
[18] |
FU X, XIAO W L, XU L Y. Piezoelectric inchworm-type probe-approaching stepper[J]. Proceedings of SPIE, 2011, 8321:83210Z. doi: 10.1117/12.903935
|
[19] |
赵余杰, 孙庆龙, 张志豪, 等.压电尺蠖直线电机的设计[J].压电与声光, 2018, 40(2):206-210. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=ydysg201902018
ZHAO Y J, SUN Q L, ZHANG ZH H, et al..Design of a piezoelectric linear motor based on inchworm motion[J]. Piezoelectrics & Acousto Optics, 2018, 40(2):206-210. (in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=ydysg201902018
|
[20] |
郭文峰, 曲建俊, 曲华杰, 等.箝位体刚度平衡对被动箝位压电驱动器性能的影响[J].光学 精密工程, 2015, 23(3):738-744. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201503018
GUO W F, QU J J, QU H J, et al..Influences of balanced stiffness of clamping body on performance of inverse piezoelectric inchworm motor[J]. Opt. Precision Eng., 2015, 23(3):738-744. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201503018
|
[21] |
赵宏伟, 吴博达, 杨志刚, 等.尺蠖型压电直线驱动器的运动稳定性分析[J].纳米技术与精密工程, 2007, 5(1):49-54. doi: 10.3969/j.issn.1672-6030.2007.01.011
ZHAO H W, WU B D, YANG ZH G, et al..Analysis of motion stability for inchworm-type piezoelectric linear actuator[J]. Nanotechnology and Precision Engineering, 2007, 5(1):49-54. (in Chinese) doi: 10.3969/j.issn.1672-6030.2007.01.011
|
[22] |
李全松.尺蠖型压电直线电动机制作及性能测试[J].微特电机, 2014, 42(6):21-24. doi: 10.3969/j.issn.1004-7018.2014.06.006
LI Q S. Machining and functional testing of inchworm-type piezoelectric linear motor[J]. Small & Special Electrical Machines, 2014, 42(6):21-24. (in Chinese) doi: 10.3969/j.issn.1004-7018.2014.06.006
|