电铸金属光栅中金属沉积过程的在线监测

朱春霖; 胡昊; 焦庆斌; 谭鑫; 巴音贺希格

doi:10.3788/CO.20191203.0606

Volume 12 Issue 3

Jun. 2019

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Chinese Optics > 2019 > 12(3): 606-615.

ZHU Chun-lin, HU Hao, JIAO Qing-bin, TAN Xin, Bayanheshig. In-situ monitoring of metal depositing in the fabrication of metallic grating[J]. Chinese Optics, 2019, 12(3): 606-615. doi: 10.3788/CO.20191203.0606

Citation:

ZHU Chun-lin, HU Hao, JIAO Qing-bin, TAN Xin, Bayanheshig. In-situ monitoring of metal depositing in the fabrication of metallic grating[J]. Chinese Optics, 2019, 12(3): 606-615. doi: 10.3788/CO.20191203.0606

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In-situ monitoring of metal depositing in the fabrication of metallic grating

doi: 10.3788/CO.20191203.0606

ZHU Chun-lin^{1, 2
,},
HU Hao^{1, 2
,},
JIAO Qing-bin^1
,,
TAN Xin^1
,,
Bayanheshig^{1
,
,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:

the National Natural Science Foundation of China(NSFC) 61227901

the National Natural Science Foundation of China(NSFC) 61605197

More Information

Corresponding author: Bayanheshig, E-mail:bayin888@sina.com
Received Date: 29 Oct 2018
Rev Recd Date: 05 Dec 2018
Publish Date: 01 Jun 2019

Abstract

Abstract

During the fabrication process of metallic gratings using electro-deposition, the thickness of deposited metal usually cannot be precisely controlled by the traditional timing method. In order to monitor the deposit thickness of grating bars and precisely stop depositing metal in a timely manner during the fabrication of metallic gratings, an in-situ monitoring system based on diffraction efficiency measurements was introduced. The change law of diffraction efficiency varying with Au deposition thickness was calculated using the rigorous coupled wave analysis(RCWA) method and the effect of the photoresistor grating's duty cycle and deposition current density on diffraction efficiency was discussed. The energy loss of monitoring lasers in the system was also calculated. The efficiency curve of the experiment coincides with simulation and the energy loss induced by the electro-deposition pool and solution was up to 94.88%. The experimental results indicate that the in-situ monitoring system is effective in estimating the thickness of deposited metal during the fabrication of metallic gratings. The duty cycle of photoresistor gratings has less influence on in-situ monitoring than that of deposition current density and a higher current density was more beneficial for monitoring.
- metallic grating,
- in-situ monitoring,
- RCWA,
- duty cycle,
- current density,
- energy loss

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References(22)

References

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