X射线散射法测量Wolter-Ⅰ型掠入射望远镜的表面粗糙度

张亚超; 刘鹏; 王晓光; 何玲平; 陈波

doi:10.3788/CO.20191203.0587

Volume 12 Issue 3

Jun. 2019

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Chinese Optics > 2019 > 12(3): 587-595.

ZHANG Ya-chao, LIU Peng, WANG Xiao-guang, HE Ling-ping, CHEN Bo. Characterizing curved surface roughness of Wolter-Ⅰ X-ray grazing incidence telescope[J]. Chinese Optics, 2019, 12(3): 587-595. doi: 10.3788/CO.20191203.0587

Citation:

ZHANG Ya-chao, LIU Peng, WANG Xiao-guang, HE Ling-ping, CHEN Bo. Characterizing curved surface roughness of Wolter-Ⅰ X-ray grazing incidence telescope[J]. Chinese Optics, 2019, 12(3): 587-595. doi: 10.3788/CO.20191203.0587

Citation:

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Characterizing curved surface roughness of Wolter-Ⅰ X-ray grazing incidence telescope

doi: 10.3788/CO.20191203.0587

ZHANG Ya-chao^{1, 2
,},
LIU Peng^{1, 2},
WANG Xiao-guang¹,
HE Ling-ping¹,
CHEN Bo^{1
,
,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:

National Natural Science Foundation of China U1631117

More Information

Author Bio:
ZHANG Ya-chao(1989—), is a Ph.D. student at Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences. His current research interests include the calibration of X-ray optical system. E-mail:zyc198902@126.com

CHEN Bo(1961—), is a professor in the Chinese Academy of Sciences. He received his Ph.D. degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2003. His current research interests include soft X-ray and extreme ultraviolet sources, radiation metrology and optical space instruments. E-mail:chenb@ciomp.ac.cn
Corresponding author: CHEN Bo, E-mail:chenb@ciomp.ac.cn
Received Date: 18 May 2018
Rev Recd Date: 12 Jun 2018
Publish Date: 01 Jun 2019

Abstract

Abstract

The X-ray scattering method is investigated in application of characterizing surface roughness of X-ray grazing incidence telescope. The surface figure effect on the scattering diagram of the curved rough mirror is analyzed in detail based on generalized Harvey-Shack surface scatter theory and image formation theory, when smooth-surface approximation is met and the width of the incident beam is about one tenth of spatial wavelength of the surface figure. Based on the analysis, the characterizing scheme is designed and the determination error of the one-dimensional power spectral density function due to the finite width of the receiving slit before the detector is discussed. The scheme is simulated with Zemax and the simulated results verify that the surface figure only affects the measuring accuracy of the low-spatial-frequency surface roughness. The method overcomes difficulty in measuring roughness of the grazing incidence mirror with high resolution conveniently during the development of the X-ray grazing incidence telescope.
- surface scatter,
- roughness,
- power spectral density,
- grazing incidence telescope

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References(15)

References

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