电极不对称性对惯性传感器性能损失的研究

王少鑫; 齐克奇; 王玉坤; 王智; 陈立恒

doi:10.3788/CO.20191203.0455

Volume 12 Issue 3

Jun. 2019

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Chinese Optics > 2019 > 12(3): 455-462.

WANG Shao-xin, QI Ke-qi, WANG Yu-kun, WANG Zhi, CHEN Li-heng. Study on loss of performance in inertial sensors due to electrode asymmetry[J]. Chinese Optics, 2019, 12(3): 455-462. doi: 10.3788/CO.20191203.0455

Citation:

WANG Shao-xin, QI Ke-qi, WANG Yu-kun, WANG Zhi, CHEN Li-heng. Study on loss of performance in inertial sensors due to electrode asymmetry[J]. Chinese Optics, 2019, 12(3): 455-462. doi: 10.3788/CO.20191203.0455

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Study on loss of performance in inertial sensors due to electrode asymmetry

doi: 10.3788/CO.20191203.0455

WANG Shao-xin^{1, 2
,},
QI Ke-qi^{1
,
,},
WANG Yu-kun¹,
WANG Zhi¹,
CHEN Li-heng¹

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:

Leading Special Project of Chinese Academy of Sciences XDA15020704

More Information

Corresponding author: QI Ke-qi, E-mail:qikeqi1985@126.com
Received Date: 10 Apr 2019
Rev Recd Date: 25 Apr 2019
Publish Date: 01 Jun 2019

Abstract

Abstract

Inertial sensors are widely used to measure small disturbances in acceleration caused by non-conservative forces in space and to realize the drag-free control of spacecrafts in scientific experiments, such as earth gravity field inversion and equivalent principle verification. In the space gravitational wave detection researchbeing carried out at home and abroad, the inertial sensor is used as the core measurement load to shield external noise and achieve free-fall motion of the Test Mass in the direction of the space sensitive axis through electrostatic control. In this paper, on the basis of the electrostatic suspension inertial sensor capacitor structures, with consideration to the working principle of the electrostatic force driving control system and based on actual processing conditions, the source of error in the system asymmetry is analyzed. Through comparative analysis of the system's performance effects on various asymmetry conditions, the asymmetry of the electrods is obtained, especially in the range of high loss in performance. On this basis, combined with the actual processing conditions, the basic requirements to control the dimensional error of the machining line within 10 μm and the area asymmetry between 1% and 2% are obtained, so as to reduce the measurement range limitation of the system and improve its scientific goal.
- inertial sensor,
- sensitive structure,
- electrode asymmetry,
- measuring range

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References(20)

References

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