Volume 12 Issue 3
Jun.  2019
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WANG Shao-xin, QI Ke-qi, WANG Yu-kun, WANG Zhi, CHEN Li-heng. Study on loss of performance in inertial sensors due to electrode asymmetry[J]. Chinese Optics, 2019, 12(3): 455-462. doi: 10.3788/CO.20191203.0455
Citation: WANG Shao-xin, QI Ke-qi, WANG Yu-kun, WANG Zhi, CHEN Li-heng. Study on loss of performance in inertial sensors due to electrode asymmetry[J]. Chinese Optics, 2019, 12(3): 455-462. doi: 10.3788/CO.20191203.0455

Study on loss of performance in inertial sensors due to electrode asymmetry

doi: 10.3788/CO.20191203.0455

Leading Special Project of Chinese Academy of Sciences XDA15020704

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  • Corresponding author: QI Ke-qi, E-mail:qikeqi1985@126.com
  • Received Date: 2019-04-10
  • Rev Recd Date: 2019-04-25
  • Publish Date: 2019-06-01
  • Inertial sensors are widely used to measure small disturbances in acceleration caused by non-conservative forces in space and to realize the drag-free control of spacecrafts in scientific experiments, such as earth gravity field inversion and equivalent principle verification. In the space gravitational wave detection researchbeing carried out at home and abroad, the inertial sensor is used as the core measurement load to shield external noise and achieve free-fall motion of the Test Mass in the direction of the space sensitive axis through electrostatic control. In this paper, on the basis of the electrostatic suspension inertial sensor capacitor structures, with consideration to the working principle of the electrostatic force driving control system and based on actual processing conditions, the source of error in the system asymmetry is analyzed. Through comparative analysis of the system's performance effects on various asymmetry conditions, the asymmetry of the electrods is obtained, especially in the range of high loss in performance. On this basis, combined with the actual processing conditions, the basic requirements to control the dimensional error of the machining line within 10 μm and the area asymmetry between 1% and 2% are obtained, so as to reduce the measurement range limitation of the system and improve its scientific goal.
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