基于散斑干涉的光滑表面变形快速检测

涂思琪; 王永红; 孙方圆; 高新亚; 赵琪涵; 闫佩正

doi:10.3788/CO.20181102.0248

Volume 11 Issue 2

Apr. 2018

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Article Contents

Chinese Optics > 2018 > 11(2): 248-254.

TU Si-qi, WANG Yong-hong, SUN Fang-yuan, GAO Xin-ya, ZHAO Qi-han, YAN Pei-zheng. Fast detection of smooth surface deformation based on DSPI[J]. Chinese Optics, 2018, 11(2): 248-254. doi: 10.3788/CO.20181102.0248

Citation:

TU Si-qi, WANG Yong-hong, SUN Fang-yuan, GAO Xin-ya, ZHAO Qi-han, YAN Pei-zheng. Fast detection of smooth surface deformation based on DSPI[J]. Chinese Optics, 2018, 11(2): 248-254. doi: 10.3788/CO.20181102.0248

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Fast detection of smooth surface deformation based on DSPI

doi: 10.3788/CO.20181102.0248

School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Hefei 230009, China

Funds:

National Key Research and Development Program 2016YFF0101803

National Natural Science Foundation 51375136

Special Project of Industry-University-Research of AVIC CXY2013HFGD22

More Information

Corresponding author: WANG Yong-hong, E-mail:yhwang@hfut.edu.cn
Received Date: 11 Dec 2017
Rev Recd Date: 13 Feb 2018
Publish Date: 01 Apr 2018

Abstract

Abstract

In view of the difficulty of testing the mechanical properties of smooth surface, a measuring system based on improved digital laser speckle interferometry is established. First, speckle illumination is achieved by designing a new speckle interferometer optical path. At the same time, the dynamic speckle interferograms of the smooth parts are processed using the spatial-carrier Fourier transform method. Finally, the distribution of the deformation field of the smooth surface is obtained. This method does not perform any processing on the surface to be measured, which enables high-precision full-field deformation measurement on a smooth surface. The experimental results show that the maximum deformation is at the center of the mirror plate and the maximum deformation is 1.936, 1.861 and 1.797 μm, respectively, which is close to the preset value of center deformation. The method has simple optical path, a practical measurement scheme, which can realize fast dynamic measurement of smooth surface deformation.
- smooth surface,
- digital speckle pattern interferometry,
- Fourier transform method,
- frosted glass,
- deformation measurement

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References(24)

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