光学元件狭缝柔性调节机构的设计与分析

董世则; 郭抗; 李显凌; 陈华男; 张德福

doi:10.3788/CO.20171006.0790

Volume 10 Issue 6

Dec. 2017

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Chinese Optics > 2017 > 10(6): 790-797.

DONG Shi-ze, GUO Kang, LI Xian-ling, CHEN Hua-nan, ZHANG De-fu. Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements[J]. Chinese Optics, 2017, 10(6): 790-797. doi: 10.3788/CO.20171006.0790

Citation:

DONG Shi-ze, GUO Kang, LI Xian-ling, CHEN Hua-nan, ZHANG De-fu. Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements[J]. Chinese Optics, 2017, 10(6): 790-797. doi: 10.3788/CO.20171006.0790

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Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements

doi: 10.3788/CO.20171006.0790

1.
Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academic of Sciences, Beijing 100049, China

Funds:

National Science and Technology Major Project of China 2009ZX02205

National Natural Science Foundation of China 61504142

More Information

Corresponding author: LI Xian-ling, E-mail: lixianling@sklao.ac.cn
Received Date: 11 Jun 2017
Rev Recd Date: 13 Aug 2017
Publish Date: 01 Dec 2017

Abstract

Abstract

An adjustment mechanism with slit diaphragm flexures is designed to keep the optical elements with higher guide precision while maintaining higher accuracy of adjustment. The stiffness of the slit diaphragm flexures structure is analyzed using the elastic mechanics stress function method. The ratio of the radial stiffness to the axial rigidity is taken as the objective function to optimize the dimension parameters of the slit diaphragm flexures structure. Under the condition of not exceeding the yield stress of the flexible structure material, the optimal value of the stiffness ratio reaches 1 573.6. A larger stiffness ratio can reduce the coupling displacement of the adjustment mechanism, so as to improve the guide accuracy of the mechanism. This mechanism is easily fabricated and assembled, and allows adjustment of three degree of freedom (θ_x-θ_y-Z). The stiffness of the slit diaphragm flexure is simulated and analyzed. The results show that the ratio of radial stiffness to axial stiffness is 1 660.4, and the error between analytical value and simulation value is 5.23%, which proves the validity of the stiffness analysis method. The optimized structure has an axial adjustment stroke of 2.09 mm, an adjustment stroke of ±16.6 mrad about the x-axis deflection angle and a ±14.4 mrad deflection angle about the y-axis, which satisfies the large stroke adjustment requirement of the optical element.
- lithographic objective,
- adjustment mechanism,
- slit diaphragm flexures,
- stiffness ratio,
- guide precision

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References(16)

References

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