基底温度对中阶梯光栅厚铝膜质量的影响

孙梦至; 高劲松; 李资政; 杨海贵; 王笑夷

doi:10.3788/CO.20160906.0656

Volume 9 Issue 6

Nov. 2016

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Chinese Optics > 2016 > 9(6): 656-662.

SUN Meng-zhi, GAO Jin-song, LI Zi-zheng, YANG Hai-gui, WANG Xiao-yi. Influence of substrate temperature on the quality of thick Al films of echelle grating[J]. Chinese Optics, 2016, 9(6): 656-662. doi: 10.3788/CO.20160906.0656

Citation:

SUN Meng-zhi, GAO Jin-song, LI Zi-zheng, YANG Hai-gui, WANG Xiao-yi. Influence of substrate temperature on the quality of thick Al films of echelle grating[J]. Chinese Optics, 2016, 9(6): 656-662. doi: 10.3788/CO.20160906.0656

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Influence of substrate temperature on the quality of thick Al films of echelle grating

doi: 10.3788/CO.20160906.0656

SUN Meng-zhi^{1, 2, 3
,},
GAO Jin-song^{1, 2
,
,},
LI Zi-zheng^{1, 2, 3},
YANG Hai-gui^{1, 2},
WANG Xiao-yi^{1, 2}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun 130033, China
3.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:

Supported by National Key Scientific and Research Equipment Development Foundation of China No.ZBY2008-1

National Natural Science Foundation of China No.61306125,No.U1435210

Jilin Provincial S&T Development Project of China No.Y3453UM130

Jilin Provincial S&T Innovation Project of China No. Y3293UM130

More Information

Corresponding author: E-mail:gaojs@ciomp.ac.cn
Received Date: 01 Jun 2016
Rev Recd Date: 12 Aug 2016
Publish Date: 01 Dec 2016

Abstract

Abstract

Large-size echelle grating has extremely high spectral resolution due to its large aperture and high diffractive order. Generally, echelle grating ruling is performed on a thick Al film. Consequently, the preparation of high-quality large-area thick Al films becomes one of the most important factors to realize a high-performance large-size echelle grating. In the thick Al films deposition process, substrate temperature is the most important technological parameter. In this paper, the thick Al films samples are prepared at different temperatures by electron-beam evaporation technique. Then, the influence of substrate temperature on the Al films quality are analyzed by means of an atomic force microscope and scanning electron microscope. It is found that the average grain size and surface roughness increase rapidly from 264.34 nm, 34.7 nm at 100℃ to 384.97 nm, 58.9 nm at 200℃ and 596.35 nm, 95.1 nm at 300℃. Experimental results show that with an increased substrate temperature, grain size and surface roughness increase sharply and the surface quality of thick Al films degrades seriously.
- echelle grating,
- thick Al films,
- substrate temperature

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References(29)

References

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