矩形离轴非球面反射镜双摆法加工与检测

宋淑梅

doi:10.3788/CO.20140706.0975

Volume 7 Issue 6

Nov. 2014

Turn off MathJax

Article Contents

Chinese Optics > 2014 > 7(6): 975-981.

SONG Shu-mei. Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method[J]. Chinese Optics, 2014, 7(6): 975-981. doi: 10.3788/CO.20140706.0975

Citation:

SONG Shu-mei. Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method[J]. Chinese Optics, 2014, 7(6): 975-981. doi: 10.3788/CO.20140706.0975

SONG Shu-mei. Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method[J]. Chinese Optics, 2014, 7(6): 975-981. doi: 10.3788/CO.20140706.0975

Citation:

SONG Shu-mei. Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method[J]. Chinese Optics, 2014, 7(6): 975-981. doi: 10.3788/CO.20140706.0975

PDF( 848 KB)

Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method

doi: 10.3788/CO.20140706.0975

SONG Shu-mei^,

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033

Received Date: 13 Sep 2014
Rev Recd Date: 15 Nov 2014
Publish Date: 25 Nov 2014

Abstract

Abstract

A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is introduced. In order to overcome the corner effect, double-swing polishing(DSP) method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm110 mm are polished, and the final surface precision figures are better than 0.020(RMS, @633 nm). Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.
- optical manufacture,
- off-axis aspheric surface,
- double-swing,
- 4-pole method

FullText(HTML)

References(1)

References

[1] 丁蛟腾,许亮,马臻,等. 矩形口径离轴非球面镜的加工与检测[J]. 光学技术,2012,38(5):607-610. DING J T,XU L,MA ZH. Manufacture and test of rectangle aperture off-axis aspheric mirror[J]. Optical Technique,2012,38(5):607-610.(in Chinese)
[2] 廖文林,戴一帆,周林,等. 离子束抛光加工矩形离轴非球面镜[J]. 国防科技大学学报,2011,33(1):100-104. LIAO W L,DAI Y F,ZHOU L,et al.. Ion beam figuring for rectangular off-axis aspheric mirrors[J]. J. National University of Defense Technology,2011,33(1):100-104.(in Chinese)
[3] ROBERT A J. Fabrication using the computer controlled polisher[J]. Applied Optics,1978,17(12):1889-1891.
[4] BOGDANOV A P. Automation of planning of technological process for machining high-precision optical components[J]. Sov. J. Opt. Technol,1984,51(9):539-541.
[5] 邓伟杰,郑立功,史亚莉,等. 离轴非球面抛光路径的自适应规划[J]. 光学精密工程,2009,17(1): 65-71. DENG W J,ZHENG L G,SHI Y L,et al.. Adaptive programming algorithm for generating polishing tool-path in computer controlled optical surfacing[J]. Opt. Precision Eng.,2009,17 (1):65-71.(in Chinese)
[6] 郑立功,张学军,张峰. 矩形离轴非球面的数控加工[J]. 光学精密工程,2004,12(1): 113-117. ZHENG L G,ZHANG X J,ZHANG F. NC surfacing of two off-axis aspheric mirrors[J]. Opt. Precision Eng.,2004,12(1):113-117.(in Chinese)
[7] SONG C,DAVID W,YU G Y. Misfit of rigid tools and interferometer subapertures on off-axis aspheric mirror segments[J]. Optics Engineering,2011,50(7):073401.
[8] 潘君骅. 光学非球面的设计、加工与检验[M].北京:科学出版社,1991:142-158. PAN J H. The Design, Manufacture and Test of Aspherical Optical Surfaces[M]. Beijing:Science Press,1991:168-179.(in Chinese)
[9] WANG P,LI J F,XUAN B,et al.. Double-swing method used for polishing off-axis aspherical mirrors[J]. SPIE,2009,7282:728203.
[10] 李俊峰,宋淑梅. 应用双摆动技术加工离轴碳化硅反射镜[J]. 光学精密工程,2012,20(8):1671-1675. LI J F,SONG SH M. Applying the double-swing method for manufacturing the SiC off-axis aspheric mirror[J]. Opt. Precision Eng.,2012,20 (8):1671-1675.(in Chinese)
[11] MALACARA D. Optical Shop Testing[M]. Hoboken:John Wiley& Sons Inc.,1978:444-454.
[12] XUAN B,CHENG X P,WANG P,et al.. Alignment of off-axis asphere and compensator with four poles[J]. SPIE,2009,7283:72830A.