提取标记点中心在子孔径拼接检测中的应用

张敏; 隋永新; 杨怀江

doi:10.3788/CO.20140705.0830

Volume 7 Issue 5

Sep. 2014

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Article Contents

Chinese Optics > 2014 > 7(5): 830-836.

ZHANG Min, SUI Yong-xin, YANG Huai-jiang. Subaperture stitching interferometry based on detection of marker center[J]. Chinese Optics, 2014, 7(5): 830-836. doi: 10.3788/CO.20140705.0830

Citation:

ZHANG Min, SUI Yong-xin, YANG Huai-jiang. Subaperture stitching interferometry based on detection of marker center[J]. Chinese Optics, 2014, 7(5): 830-836. doi: 10.3788/CO.20140705.0830

ZHANG Min, SUI Yong-xin, YANG Huai-jiang. Subaperture stitching interferometry based on detection of marker center[J]. Chinese Optics, 2014, 7(5): 830-836. doi: 10.3788/CO.20140705.0830

Citation:

ZHANG Min, SUI Yong-xin, YANG Huai-jiang. Subaperture stitching interferometry based on detection of marker center[J]. Chinese Optics, 2014, 7(5): 830-836. doi: 10.3788/CO.20140705.0830

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Subaperture stitching interferometry based on detection of marker center

doi: 10.3788/CO.20140705.0830

1.
State Key Laboratory of Applied Optics, Changchun Institute of Optic, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Received Date: 15 Apr 2014
Rev Recd Date: 22 Jul 2014
Publish Date: 25 Sep 2014

Abstract

Abstract

The stitching interferometer systems with larger relative movement will show a significantly lower positioning accuracy of subapertures. As a consequence a stitching method based on detection of artificial circular mark center to find the necessary translation between two neighborly subapertures is implemented. Firstly, we take coordinates of mark centers as the marks' coordinates by which the translation is computed. Then all the subaperture data are unified into the same reference by homogeneous coordinate transformation and the full aperture phase are stitched by using mechanical system error compensation algorithm. A subaperture stitching process for a 468 mm flat mirror was carried out including surface accuracy tests during the polishing. In this process, subaperture stitching test offered the surface data precisely for polishing, which ensured the surface error converged quickly to a final RMS of 35 nm. The experimental results show that the method relaxes the precision requirement for subaperture location and can get the full aperture phase for large optical element correctly.
- optical measurement,
- interferometer,
- subaperture stitching algorithm,
- marker center

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References(1)

References

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