Volume 7 Issue 1
Jan.  2014
Turn off MathJax
Article Contents
CHEN Yun, LI Yan-ru, ZHANG Hong-sheng. Improvement on fabrication technology of metallic mesh based on ZnS[J]. Chinese Optics, 2014, 7(1): 131-136. doi: 10.3788/CO.20140701.0131
Citation: CHEN Yun, LI Yan-ru, ZHANG Hong-sheng. Improvement on fabrication technology of metallic mesh based on ZnS[J]. Chinese Optics, 2014, 7(1): 131-136. doi: 10.3788/CO.20140701.0131

Improvement on fabrication technology of metallic mesh based on ZnS

doi: 10.3788/CO.20140701.0131
  • Received Date: 11 Oct 2013
  • Rev Recd Date: 15 Dec 2013
  • Publish Date: 25 Jan 2014
  • In order to fabricate metallic meshes based on ZnS which can shield electromagnetic wave, a new type of photolithography copy technology process is adopted, in which photoresist is coated firstly and then plated in vacuum machine. But the color of polycrystalline ZnS resembles that of photo-resist, it is hard to estimate the developing degree of meshes during the process of making metallic meshes, which affects the preparation of metallic meshes film in the process of vacuum plating. A new method by plating a transition film is proposed, in which the processes including vacuum coating, spin-coating, developing, etching, vacuum coating, removing, etching are adopted combining the fabrication technology of metallic meshes. The testing results indicate that the metallic meshes with the line width of 8 m and the line period of 400 m are fabricated successfully. With this technology, the yield of metallic meshes is improved up to 90%.

     

  • loading
  • [1] 张兴德, 刘 琳, 李荣刚. 机载光电设备红外窗口技术[J]. 红外与激光工程, 2010, 39(4):600-606. ZHANG X D, LIU L, LI R G. Infrared optical window for airborne photoelectric equipments[J]. Infrared and Laser Eng., 2010, 39(4):600-606.(in Chinese) [2] 王长伟. 金属网栅用于隐身技术的研究[D].哈尔滨:哈尔滨工业大学, 2006. WANG CH W. Research on the metallic mesh for stealth technology[D].Harbin:Harbin institute of Technology, 2006.(in Chinese) [3] 李凤友, 卢振武, 谢永军, 等. 激光直写方法制作透明导电金属网栅[J]. 光子学报, 2002, 31(10):1270-1272. LI F Y, LU ZH W, XIE Y J, et al.. Transparent conductive metallic film mesh fabricated by laser direct writing technique[J]. Acta Photonica Sinica, 2002, 31(10):1270-1272. (in Chinese) [4] 范有余, 羊毅, 姜雄伟, 等. 一种新型中红外材料及其隐身功能研究[J]. 红外与激光工程, 2010, 39(1):12-16. FAN Y Y, YANG Y, JIANG X W, et al.. New mid-infrared material and its radar stealth function[J]. Infrared and Laser Eng., 2010, 39(1):12-16.(in Chinese) [5] 申振峰, 冯晓国, 高劲松, 等. 用于红外窗电磁屏蔽的电感性网栅薄膜[J]. 红外技术, 2008, 30(8):468-471. SHEN ZH F, FENG X G, GAO J S, et al.. The inducting mesh coating used for electromagnetic shielding of the infrared windows[J]. Infrared Technology, 2008, 30(8):468-471.(in Chinese) [6] 冯晓国, 方 梁, 孙连春. 金属网栅结构参数设计与制作[J]. 光学 精密工程, 2005, 13(1):59-64. FENG X G, FANG L, SUN L CH. Characteristic dimension design and fabrication of metallic mesh[J]. Opt. Precision Eng., 2005, 13(1):59-64.(in Chinese) [7] 陈赟, 李艳茹, 张红胜. 计量圆光栅的制作工艺及质量参数研究[J]. 长春理工大学学报 (自然科学版), 2012, 35(3):40-43. CHEN Y, LI Y R, ZHANG H SH. The research on manufacture and quality parameter of metrology circular grating[J]. J. Changchun University of Science and Technology(Natural Science Edition), 2012, 35(3):40-43.(in Chinese) [8] ULRICH R. Far-infrared properties of metallic mesh and its complementary structure[J]. Infrared Physics, 1967, (7):37-57. [9] 刘小涵, 赵晶丽, 冯晓国, 等. 高透光率感性网栅膜的电磁屏蔽[J]. 光学 精密工程, 2012, 20(1):80-86. LIU X H, ZHAO J L, FENG X G, et al.. Electromagnetic shielding of highly transparent inductive mesh[J]. Opt. Precision Eng., 2012, 20(1):80-86.(in Chinese) [10] 朱新华, 冯晓国, 赵晶丽, 等. ZnS光窗上增透与带通频率选择表面组合膜设计[J]. 光学学报, 2010, 30(9):2766-2770. ZHU X H, FENG X G, ZHAO J L, et al.. Design of antireflection and band-pass frequency selective surface combining coatings for zns optical window[J]. Acta Photonica Sinica, 2010, 30(9):2766-2770.(in Chinese) [11] 张运强, 潘国庆, 李福巍. 金属网栅电磁屏蔽薄膜在红外空空导弹上的应用研究[J]. 红外技术, 2010, 32(7):395-398. ZHANG Y Q, PAN G Q, LI F W. Research of metallic mesh in improving electromagnetic shielding of air-to-air missile[J]. Infrared Technology, 2010, 32(7):395-398.(in Chinese) [12] 李跃龙, 黎建明, 苏小平, 等. 红外窗口和整流罩材料研究现状与发展趋势[J]. 人工晶体学报, 2007, 36(4):877-884. LI Y L, LI J M, SU X P, et al.. Research trends and current status in infrared window and dome materials[J]. J. Synthetic Crystals, 2007, 36(4):877-884.(in Chinese) [13] 么艳平, 刘景和. ZnS红外窗口材料的性能及其制备[J]. 人工晶体学报, 2006, 35(1):183-187. YAO Y P, LIU J H. Property and fabrication of ZnS infrared window material[J]. J. Synthetic Crystals, 2006, 35(1):183-187.(in Chinese) [14] 谢启明, 李奕威, 潘顺臣. 红外窗口和整流罩材料的发展和应用[J]. 红外技术, 2012, 34(10):559-567. XIE Q M, LI Y W, PAN SH CH. The development and application of the materials and infrared windows and domes[J]. Infrared Technology, 2012, 34(10):559-567.(in Chinese) [15] 熊远鹏, 吴 波, 温翠莲, 等. 透红外晶体材料的研究现状[J]. 红外, 2012, 33(11):1-7. XIONG Y P, WU B, WEN C L, et al.. Current status of infrared transmission crystal material[J]. Infrared, 2012, 33(11):1-7.(in Chinese)
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索
    Article views(1292) PDF downloads(575) Cited by()
    Proportional views

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return