Volume 6 Issue 2
Apr.  2013
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SU Zhi-de, SHI Zhen-guang, PENG Ji, SUI Yong-xin, YANG Huai-jiang. Implementation of accurate phase shift in Fizeau interferometer[J]. Chinese Optics, 2013, 6(2): 244-250. doi: 10.3788/CO.20130602.0244
Citation: SU Zhi-de, SHI Zhen-guang, PENG Ji, SUI Yong-xin, YANG Huai-jiang. Implementation of accurate phase shift in Fizeau interferometer[J]. Chinese Optics, 2013, 6(2): 244-250. doi: 10.3788/CO.20130602.0244

Implementation of accurate phase shift in Fizeau interferometer

doi: 10.3788/CO.20130602.0244
  • Received Date: 2012-12-11
  • Rev Recd Date: 2013-02-17
  • Publish Date: 2013-04-10
  • To realize the high accuracy measurement of optical surfaces by a phase-shifting Fizeau interferometer, a synchronous acquisition phase-shifting system in the interferometer was established, and an accurate phase shifting method was researched. First, the composition and working principle of the phase-shifting system were introduced. Then, the velocity of PZT phase shifter during measurement was calculated. Since there exist defocus errors as well as speed-up and speed-down steps during phase shift, the moving process of phase shifter was detailedly designed. Finally, the phase shifter was calibrated. A verified experiment was carried out on the modified interferometer, and it shows that the RMS simple repeatability is /11 340. Comparative measurement was also carried out with two same components between the modified interferometer and the Verifire XP/D interferometer(Zygo company), and the RMS difference is about 0.9 nm. It can be seen that the repeatability and accuracy of this phase-shifting system and phase-shifting method have satisfied the requirement of nano-scale form measurement, which can provide references for developing high accuracy phase-shifting interferometers.
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  • [1] MALACARA D. Optical Shop Testing[M]. New York:John Wiley & Sons Inc.,1994:17-33. [2] BRUNING J H,HERRIOTT D R,GALLAGHER J E,et al.. Digital wavefront measuring interferometer for testing optical surfaces and lenses[J]. Appl. Optics,1974,13(11):2693-2703. [3] 苗二龙,张健,谷勇强,等.用于光刻投影物镜检测的高精度菲佐干涉仪误差分析[J].中国激光,2010,37(8):2029-2034. MIAO E L,ZHANG J,GU Y Q,et al.. Measurement error analysis of high precision Fizeau interferometer for lithography projection objective[J]. Chinese J. Lasers,2010,37(8):2029-2034.(in Chinese) [4] 刘兆栋,陈磊,韩志刚,等.斜入射干涉检测大口径碳化硅平面反射镜[J].光学 精密工程,2011,19(7):1437-1443. LIU ZH D,CHEN L,HAN ZH G,et al..Measurement of large aperture SiC flat mirrors by oblique incidence interferometry[J]. Opt. Precision Eng.,2011,19(7):1437-1433.(in Chinese) [5] 吴栋,朱日宏,陈磊,等.抗振型移相干涉仪中PZT移相器的改进[J].光学 精密工程,2003,11(6):567-571. WU D,ZHU R H,CHEN L,et al.. Improvement of PZT phase shifter in vibration-resistant phase-shifting interferometer[J]. Opt. Precision Eng.,2003,11(6):567-571.(in Chinese) [6] CHAI L Q,XU Q,YU Y J,et al.. 500-mm-aperture wavelength-tuning phase-shifting interferometer[J]. SPIE,2005,5956:589-596. [7] 杨李茗,叶海仙.大口径大曲率半径光学元件的高精度检测[J].光学 精密工程,2011,19(6):1207-1212. YANG L M,YE H X. High-precision metrology for optical components with large-apertures and large radii of curvature[J]. Opt. Precision Eng.,2011,19(6):1207-1212.(in Chinese) [8] CHENG Y Y,WYANT J C. Phase shifter calibration in phase-shifting interferometry[J]. Appl. Optics,1985,24(18):3049-3052. [9] CHIAYU A,WYANT J C. Effect of piezoelectric transducer nonlinearity on phase shift interferometry[J]. Appl. Optics,1987,26(6):1112-1116. [10] KENICHI H,BOB F O,KIERAN G L. Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts[J]. J. Opt. Soc. Am. A,1997,14(4):918-930. [11] 王道档,杨甬英,刘东,等.压电移相器的空间旋转误差建模与实验分析[J].光电子·激光,2009,20(5):571-575. WANG D D,YANG Y Y,LIU D,et al.. Modeling and analysis of space-rotation error induced by phase-shifter in phase shifting interferometry[J]. J. Optolectronics Laser,2009,20(5):571-575.(in Chinese) [12] 张景和,张顺国,董跃华.乌氏干涉测量的信息读取[J].中国光学,2011,4(2):147-153. ZHANG J H,ZHANG SH G,DONG Y H. Information reading of Ubbelohde interferometry[J]. Chinese Optics,2011,4(2):147-153.(in Chinese) [13] BERND G,HERBERT W. Phase-shifter calibration and error detection in phase-shifting applications:a new method[J]. Appl. Optics,1998,37(32):7624-7631. [14] PETER D G. Phase-shift calibration errors in interferometers with spherical Fizeau cavities[J]. Appl. Optics,1995,34(16):2856-2863.
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