Volume 6 Issue 2
Apr.  2013
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SU Zhi-de, SHI Zhen-guang, PENG Ji, SUI Yong-xin, YANG Huai-jiang. Implementation of accurate phase shift in Fizeau interferometer[J]. Chinese Optics, 2013, 6(2): 244-250. doi: 10.3788/CO.20130602.0244
Citation: SU Zhi-de, SHI Zhen-guang, PENG Ji, SUI Yong-xin, YANG Huai-jiang. Implementation of accurate phase shift in Fizeau interferometer[J]. Chinese Optics, 2013, 6(2): 244-250. doi: 10.3788/CO.20130602.0244

Implementation of accurate phase shift in Fizeau interferometer

doi: 10.3788/CO.20130602.0244
  • Received Date: 11 Dec 2012
  • Rev Recd Date: 17 Feb 2013
  • Publish Date: 10 Apr 2013
  • To realize the high accuracy measurement of optical surfaces by a phase-shifting Fizeau interferometer, a synchronous acquisition phase-shifting system in the interferometer was established, and an accurate phase shifting method was researched. First, the composition and working principle of the phase-shifting system were introduced. Then, the velocity of PZT phase shifter during measurement was calculated. Since there exist defocus errors as well as speed-up and speed-down steps during phase shift, the moving process of phase shifter was detailedly designed. Finally, the phase shifter was calibrated. A verified experiment was carried out on the modified interferometer, and it shows that the RMS simple repeatability is /11 340. Comparative measurement was also carried out with two same components between the modified interferometer and the Verifire XP/D interferometer(Zygo company), and the RMS difference is about 0.9 nm. It can be seen that the repeatability and accuracy of this phase-shifting system and phase-shifting method have satisfied the requirement of nano-scale form measurement, which can provide references for developing high accuracy phase-shifting interferometers.

     

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